Instruction Manual

5-4
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 5 Parts List
Table 5-1 Model 5851i Replacement Parts List (Continued)
Item
No. Quantity Description Part Number
NS 2 Fitting, 1/4" Compression, Swagelok 320B136BMA
Fitting, 1/4" Male VCR, Cajon 315Z036BMA
Fitting, 1/4" Male VCO, Cajon 315Z035BMA
Fitting, 3/8" Compression 320B150BMA
Fitting, 3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA
Fitting, 3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA
27 2 O-Ring, Fitting, Size 906 375B906***
NS 2 O-Ring, VCO Gland, Size 010 375B010***
NS 1 O-Ring, End Block, Size 029 375B029***
NS 1 Interconnecting Cables Length D-Connector
D-Connector on one end with no 5 Feet S124Z361AAA
termination on the other end 10 Feet S124Z362AAA
25 Feet S124Z363AAA
50 Feet S124Z435AAA
NS 2 8-32 Mounting Screw Customer Supplied
28 1 End Block with Integral Inlet Screen S079Z200AAA
29 4 Screw, End Block 751Z105AAO
*** QTA = Viton, SUA = Buna, TTA = Kalrez
AR As required, NS Not Shown
5850/5851 Series Service Tool Kit 5851 Header Removal Tool
P/N S778D017AAA P/N S817Z036AAA
Permits the complete disassembly of the 5850i for servicing 0550/5851 Orifice Removal Tool
P/N S908Z049AAA
Contains:
1 — O-Ring Removal Tool
1 — Potentiometer Adjustment Tool
1 — Ball Point Allen Wrench
1 — Phillips Screw Driver
1 — Nut Driver for Orifice
1 — Restrictor Removal Tool
1 — Common Screw Driver
5850/5851 Series Break Out Board Assembly 5850/5851 Series Valve Shim Kit
P/N S273Z668AAA P/N S810A372BMA
Installs directly between mass flow controller and interconnecting Contains:
cable. Allows convenient access to all signals for easy trouble- 1 — .010" Large Spacer
shooting of system. 2 — .005" Large Spacers
1 — .010" Small Spacer
Contains: 2 — .005" Small Spacers
1 — Break Out PC Board
1 — 5 Foot Extension Cable
1 — Terminal PC Board
*** QTA = Viton, SUA = Buna, TTA = Kalrez
NOTE: Refer to Brooks' publication DS-5800 for additional
accessories.
Additional publications available:
T-086 MFC Contamination Control in Semiconductor Processing
Equipment Valve Application Guide/Service Manual
Table 5-2 Tool and Spare Part Kits for 5850 Series