Instruction Manual

5-3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 5 Parts List
Table 5-1 Model 5851i Replacement Parts List (Continued on next page)
Item
No. Quantity Description Part Number
1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169CZ%
5 1 O-Ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem, High Flow 949Z203QOA
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-Ring 375B016***
7 1 Valve Plunger Assembly, High Flow S622Z165AAA
8 1 Lower Guide Spring 820Z083BMA
9 AR Small Valve Spacer, 0.005" Thick 810A362BMA
Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
Large Valve Spacer, 0.010" Thick 810A361BMA
11 1 Valve Seat with Viton
TM
Insert S715Z051AAG
Valve Seat with Buna Insert S715Z050AAG
Valve Seat with Kalrez
TM
Insert S715Z163AAA
Valve Seat Solid 316 Stainless Steel 715Z181BNT
12 1 Orifice, Stainless Steel ID 0.0040" 577Z275BMT
ID 0.0067" 577Z277BMT
ID 0.0091" 577Z280BMT
ID 0.0120" 577Z283BMT
ID 0.0160" 577Z286BMT
ID 0.0210" 577Z289BMT
ID 0.0260" 577Z293BMT
ID 0.0310" 577Z296BMT
ID 0.0360" 577Z300BMT
ID 0.0410" 577Z305BMT
ID 0.0465" 577Z308BMT
ID 0.0550" 577Z310BMT
(Refer to Section 4-6 ID 0.0635" 577Z312BMT
for sizing) ID 0.0700" 577Z314BMT
ID 0.0760" 577Z316BMT
ID 0.0820" 577Z319BMT
ID 0.0935" 577Z322BMT
ID 0.1065" 577Z328BMT
ID 0.1200" 577Z333BMT
ID 0.1405" 577C336BMT
13 1 O-Ring, Orifice, Size 0011 375B011***
14 1 Controller Body S854Z157BMA
15 1 PC Board Assembly (D-Connector) S097Y901AAA
16 1 Sensor Assembly S774Z607AAA
17 2 O-Ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 753Q103ACZ
19 2 Lock Washer, Sensor 962D005AWA
20 5 Screw, Sensor-PC, Board-Cover 753L056AWZ
21 1 Restrictor Assembly and Components (Refer to Section 4-7 for sizing)
22 1 O-Ring, Restrictor, Size 026 375B026***
23 1 Electronics Cover Can (D-Connector) 219Z431EA%
23A 1 Cover Plate (D-Connector) 852Z209EA%
24 1 PC Board Mounting Bracket 079Z135EAA
26 2 Pot Hole Plug 620Z434SXA
*** QTA = Viton
TM
, SUA = Buna, TTA = Kalrez
TM
AR As required, NS Not Shown