Instruction Manual

Installation and Operation Manual

X-TMF-5851i-MFC-eng

Part Number: 541B109AAG

September, 2009

Brooks

Model 5851i

Section 1

Introduction

Paragraph

Number Page

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-3

Section 2

Installation

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice ....................................... 2-1

2-3 Return Shipment................................................................ 2-2

2-4 Gas Connections ............................................................... 2-2

2-5 Installation ......................................................................... 2-3

2-6 In-Line Filter....................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

2-8 Configuring the PC Board .................................................. 2-8

Section 3

Operation

3-1 Theory of Operation........................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-3

3-4 Calibration Procedure ........................................................ 3-4

3-5 Response .......................................................................... 3-6

Section 4

Maintenance and

Troubleshooting

4-1 General.............................................................................. 4-1

4-2 Troubleshooting ................................................................. 4-1

4-3 Sensor Tube ...................................................................... 4-6

4-4 Disassembly and Assembly ............................................... 4-6

4-5 Use of the Conversion Tables ........................................... 4-10

4-6 Use of Orifice Sizing Nomograph ......................................4-11

4-7 Restrictor Sizing ............................................................... 4-15

Section 5

Parts List

5-1 General.............................................................................. 5-1

Section A

CE Certification

CE Certification of Mass Flow Equipment.......................... A-1