4-19
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 4 Maintenance
& Troubleshooting
Figure 4-6 Model 5851i Restrictor Element Assembly
Figure 4-7 Model 5851i Restrictor Element Orientation in Controller Body
