Instruction Manual

4-17
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 4 Maintenance
& Troubleshooting
Figure 4-4 Example Nomograph
Range Restrictor
slpm Nitrogen Element
Equivalent Flow* Combination Part Number
4.6 to 15 1-40 micron (1 inch) S-613-E-604-BMT
15 to 26 1-40 micron S-613-E-636-BMT
26 to 42 2-40 micron S-613-E-523-BMT
42 to 60 3-40 micron S-613-E-526-BMT
60 to 79 2-40 micron/1-60 micron S-613-E-528-BMT
79 to 93 1-40 micron/2-60 micron S-613-E-529-BMT
93 to 130** 3-60 micron S-613-E-527-BMT
* Based on 0°C Standard Reference Temperature
** For Hydrogen from 130 slpm to 200 slpm use 3-60 micron restrictor
elements.
NOTE: If the nitrogen equivalent flow is between two sizes, select the
larger size.
Table 4-4 5851i Restrictor Selection Guide.