Instruction Manual

2-4
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 2 Installation
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
10 to 30 slpm 15 micron
Above 30 slpm 30 micron
NOTE: The above lists the maximum recommended porosity for each flow range. It is
recommended that the minimum micron porosity that does not limit the full scale
flowrate be used.
Figure 2-2 D Connector Shielded Cable Hookup Diagram
15 PIN MALE
D-CONNECTOR
*BROOKS READ OUT MFC / MFM FUNCTION WIRE
SIDE SUB D (15 PIN) PIN COLOR
61
Setpoint
, Common Input (-)
BLACK
10 2
Flow Signal
, 0(1)-5 volt, Output (+)
WHITE
93
N
A
RED
24
Flow Signal
, 0
(
4
)
-20 mA, Output
(
+
)
GREEN
13 5
Power Supply
, +15 Vdc to +28 Vdc ORANGE
14 6
N
A
BLUE
37
Setpoint
, 0
(
4
)
-20 mA, Input
(
+
)
WHT/BLK
58
Setpoint
, 0
(
1
)
-5 volt, Input
(
+
)
RED/BLK
12 9
Power Supply
, Common (-)
GRN/BLK
810
Flow Signal
, Common, Output (-)
ORG/BLK
411
Reference
, +5 Vdc, Output (+)
BLU/BLK
712
V
alve Override
, Input
BLK/WHT
113
N
A
RED/WHT
11 14
Chassis Ground
GRN/WHT
15 15
N
A
BLU/WHT
* Brooks Read Out Models 0151, 0152, 0154, 0254