Instruction Manual

2-3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Brooks
®
Model 5851i
Section 2 Installation
Recommended installation procedures:
a. The Model 5851i should be located in a clean dry atmosphere rela-
tively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5851i Mass Flow Controller can be installed in any
position. However, mounting orientations other than the original
factory calibration (see data sheet) will result in a ±0.5% maximum
full scale shift after re-zeroing.
e. When installing controllers, be aware that sharp abrupt angles in the
system piping directly upstream of the controller may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of
straight tubing upstream of the 5851i mass flow controller.
NOTE: The control valve in the Model 5851i provides precision control
and is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.
Figure 2-1 Model 5851i Dimensions
Connection "X" Dim.
1/4" Compression
5.70
Fitting 145
1/4" Tube VCO
5.22
133
1/4" Tube VCR
5.56
141
3/8" Compression
5.82
Fitting 148
1/2" Tube VCO
5.48
139
1/2" Tube VCR
5.86
149