Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Model 5851i Mass Flow Controller Brooks® Model 5851i
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Section 1 Introduction Paragraph Number Page 1-1 Purpose ............................................................................. 1-1 1-2 Description ........................................................................ 1-1 1-3 Specifications .................................................................... 1-3 2-1 Receipt of Equipment ......................................
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figures Figure Page 1-1 Command Steps, Soft Start Disabled ................................. 1-2 1-2 0-100% Command Step, Soft Start Enabled ...................... 1-2 2-1 Model 5851i Dimensions ................................................... 2-3 2-2 D Connector Shielded Cable Hookup Diagram .................. 2-4 2-3 Maximum Allowable Loop Resistance ...........................
Section 1 Introduction Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 1-1 Purpose The Brooks® Model 5851i Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5851i Mass Flow Controller.
Section 1 Introduction Brooks® Model 5851i Figure 1-1 Command Steps, Soft Start Disabled 1-2 Figure 1-2 0 - 100% Command Step, Soft Start Enabled Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009
Section 1 Introduction Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 1-3 Specifications Standard Ranges Any full scale flow rate from 10 slpm to 100 slpm (nitrogen equivalent); up to 200 slpm hydrogen. Accuracy ±1% full scale including linearity at calibration conditions Repeatability 0.25% of rate Response Time Less than 6 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements +22.
Section 1 Introduction Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Leak Integrity 1 x 10-9 Atm. scc/sec Helium Control Range 50 to 1 Mechanical Connection Interchangeable with most popular mass flow controllers. Refer to Figure 2-1. Electrical Connection D-Type, 15-pin connector (DA-15P). Mating connector supplied.
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Connection Section 2 Installation Brooks® Model 5851i "X"Dim. 1/4"Compression Fitting 5.70 145 1/4" Tube VCO 5.22 133 1/4" Tube VCR 5.56 141 3/8"Compression Fitting 5.82 148 1/2" Tube VCO 5.48 139 1/2" Tube VCR 5.86 149 Figure 2-1 Model 5851i Dimensions Recommended installation procedures: a. The Model 5851i should be located in a clean dry atmosphere relatively free from shock and vibration. b.
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 15 PIN MALE D-CONNECTOR *BROOKS READ OUT MFC / MFM SIDE SUB D (15 PIN) PIN 6 10 9 2 13 14 3 5 12 8 4 7 1 11 15 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 FUNCTION WIRE COLOR Setpoint, Common Input (-) Flow Signal, 0(1)-5 volt, Output (+) NA Flow Signal, 0(4)-20 mA, Output (+) Power Supply, +15 Vdc to +28 Vdc NA Setpoint, 0(4)-20 mA, Input (+) Setpoint, 0(1)-5 volt, Input
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 2-3 Maximum Allowable Loop Resistance 2-7 Electrical Interfacing To insure proper operation, the 5851i must be connected per Figures 2-2, 2-3 and 2-4 and configured according to Section 2-7. As a minimum, the following connections must be made for new installations: Function Chassis Ground Signal Output Return Voltage or Current Signal Output 22.
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 2-4 Common Electrical Hook-Ups, Voltage I/O Version Signal Output The flow signal output can be measured as a voltage and a current simultaneously on two different pins of the D-connector. Pin 2 indicates the flowrate with a 0-5 Vdc signal proportional to the mass flow rate.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section 2 Installation Brooks® Model 5851i Figure 2-5 Recommended I/O Wiring Configuration for Current Sugnals (Non-Isolated Power Supply) Figure 2-6 Recommended I/O Wiring Configuration for Current Sugnals (Isolated Power Supply) 2-7
Section 2 Installation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Chassis Ground Connect earth ground to pin 14 of the D-connector. Valve Override (connection optional) The valve override function allows full opening and closing of the valve independent of the setpoint: To open the valve, apply +22.5 to +28 Vdc to pin 12 To close the valve, connect pin 12 to ground.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5851i works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 3-1 Flow Sensor Operational Diagram Soft Start enabled by moving a jumper on the PC Board. This circuit provides a slow injection of the gas as a protection to the process, particularly those using a volatile or reactive gas. Full gas flow is achieved in approximately 20 seconds. Refer to Section 2-7.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 3-2 Flow Control System Block Diagram 3-3 Zero Adjustment Each 5851i is factory adjusted to provide a zero ±10 mVdc signal or a 4 mAdc ±0.05 mAdc signal at zero flow. The adjustment is made in our calibration laboratory which is temperature controlled to 21.1°C (70°F ±2°F).
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 3-4 Calibration Procedure NOTE 1: If the valve has been disassembled and any of the following parts have been replaced, the control valve adjusting procedure in Section 4-4c must be performed before the Model 5851i is calibrated.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i f. Connect the DVM positive lead to TP1 (100x sensor voltage) and the negative lead to TP4 (circuit common). The setpoint should still be set at 100% flow (5.000V). Measure the flow rate using suitable volumetric calibration equipment.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i j. Set the command potentiometer for 100% flow (5.000V). Connect the DVM positive lead to TP2 and the negative lead to TP4. k. Adjust the linearity potentiometer for an output equal to the new calculated TP2 voltage. l. Repeat steps f, g and h. 1. If the error recorded in step “h” is less than 0.5%, then the calibration procedure is complete. 2.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Figure 3-3 PC Board Jumper Location & Function Section 3 Operation Brooks® Model 5851i 3-7
Section 3 Operation Brooks® Model 5851i Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Figure 3-4 Model 5851i Calibration Connections 3-8 Figure 3-5 Adjustment Potentiometer Location
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section 3 Operation Brooks® Model 5851i Figure 3-6 Fast Response Adjustment a. Set the command potentiometer for 100% flow (5.00V) and wait about 45 seconds for the flow output signal to stabilize. b. Step the command signal to 0% or activate valve override closed to stop the flow. Observe the flow signal output as it decays. c.
Section 3 Operation Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-10
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5851i 4-1 General No routine maintenance is required on the Model 5851i other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i A. System Checks The 5851i is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Actual flow overshoots setpoint by more than 5% full scale. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 . Output stays at zero regardless of setpoint and there is no flow through the controller.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 4-1 Torque Sequence for the Valve Retainer Plate Table 4-1 lists possible malfunctions which may be encountered during bench troubleshooting. C. Sensor Troubleshooting The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5851i Table 4-2 Sensor Troubleshooting An alternate method for flushing out the sensor is to replace the restrictor element with a low flow plug restrictor. This plug forces all the flow through the sensor and may dislodge any obstructions. With the valve orifice removed, subject the flow controller to a high differential pressure.
Section 4 Maintenance & Troubleshooting Brooks® Model 5851i 4-6 Figure 4-2 Valve Adjusting Spacer Locations Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 8. Purge the assembled controller with dry nitrogen. 9. Perform the calibration procedure in Section 3-4. 10. When the controller is re-installed in the system, the connections should be leak-tested and the system should be purged with dry nitrogen for 30 minutes prior to start-up to prevent the formation of deposits.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 4-3 Voltmeter Connections for Valve Adjustment 6. Remove and note the position of the valve spring spacers (10) which may be located above and/or below the lower valve springs (8). 7. Unscrew the orifice (12) from the flow controller body (14) using the orifice removal tool. (See Section 5, Table 5-2.) 8.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 12. Remove the adapter fittings and O-rings (27) from the flow controller body (14). 13. Remove the four screws (29) from the end block (28) and carefully remove the end block. 14. Remove the restrictor assembly (21) from the inlet side of the flow controller body (14) using the header removal tool (Section 5, Table 52).
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 9. Install the coil assembly (2) over the valve stem assembly (6) and secure with a jam nut (1). 10. Install the PC Board (15), secure with the bracket (24) and two screws. Plug the connector from the sensor assembly onto the PC Board. The flow arrow on the connector should be pointing toward the valve assembly. 11.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i c. Disassemble the control valve following the procedure given in Section 4-4A above. Note the number, locations and thicknesses of all spacers (9 and 10). d. Decrease the preload of the valve by 0.005 inches by either removing a 0.005-inch small preload spacer or by adding a 0.005-inch large preload spacer. Refer to Figure 4-2. e.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Example: The controller is calibrated for Nitrogen. The desired gas is Carbon Dioxide. The output reading is 75 sccm when Carbon Dioxide is flowing. Then 75 x 0.778 = 58.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Table 4-3. Conversion Factors (Nitrogen Base).
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Table 4-3. Conversion Factors (Nitrogen Base) Continued.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Flow Rate: 100 slpm Outlet Pressure: 30 psig Inlet Pressure: 50 psig 1. Determine Nitrogen equivalent flow rate (refer to Table 4-3).
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i QNitrogen = Qgas (orifice conversion factor) = 20 x 1.439 = 28.34 slpm Nitrogen 2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7 to convert to absolute pressure (psia). Outlet Pressure — 30 psig + 14.7 = 44.7 psia Inlet Pressure — 50 psig + 14.7 = 64.7 psia 3.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 4-4 Example Nomograph Table 4-4 5851i Restrictor Selection Guide. Range Restrictor slpm Nitrogen Element Equivalent Flow* Combination Part Number 4.
Section 4 Maintenance & Troubleshooting Brooks® Model 5851i Table 4-5 Model 5851i Orifice Sizing Nomograph 4-18 Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Figure 4-6 Model 5851i Restrictor Element Assembly Figure 4-7 Model 5851i Restrictor Element Orientation in Controller Body 4-19
Section 4 Maintenance & Troubleshooting Brooks® Model 5851i Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 4-7 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the controller. It creates a pressure drop which is linear with flow rate. This diverts a sample quantity of the process gas flow through the sensor.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5851i Assembly Procedures 1. Select the proper restrictor element combination. 2. When handling restrictor elements, use care to insure that they are not contaminated with dirt, grease, oil, etc. The use of rubber gloves is recommended. 3. Put a lightly lubricated O-ring onto the header plate.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-22
Section 5 Parts List Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).
Section 5 Parts List Brooks® Model 5851i 5-2 Figure 5-1 Model 5851i Parts Drawing Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009
Section 5 Parts List Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Table 5-1 Model 5851i Replacement Parts List (Continued on next page) Item No.
Section 5 Parts List Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i Table 5-1 Model 5851i Replacement Parts List (Continued) Item No.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section A CE Certification Brooks® Model 5851i Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certification Brooks® Model 5851i Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section A CE Certification Brooks® Model 5851i Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certification Brooks® Model 5851i Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Section A CE Certification Brooks® Model 5851i Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certification Brooks® Model 5851i Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5851i-MFC-eng Part Number: 541B109AAG September, 2009 Brooks® Model 5851i LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
