Instruction Manual

ii
Brooks
®
Models 5965, 5851EM
Contents
Installation and Operation Manual
X -TMF-5965-5851EM-MFC-eng
Part Number:541B122AAG
September, 2009
Figures
Figure Page
Number Number
1-1 0 to 100% Command Step, Soft Start Enabled ....................................................................... 1-2
1-2 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector orCard
Edge with VCR Fittings ........................................................................................................... 1-6
1-3 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or
Card EdgeDownported............................................................................................................ 1-7
2-1 Model 5956/5851EM Card Edge Connector Arrangement ...................................................... 2-5
2-2 D-Connector Pin Arrangement (Voltage I/O Version) .............................................................. 2-7
2-3 D-Connector Pin Arrangement (Current I/O Version) .............................................................. 2-7
2-4 Maximum Allowable Loop Resistance..................................................................................... 2-7
2-5 Common Electrical Hookups Current I/O version ................................................................... 2-9
3-1 Flow Sensor Operational Diagram .......................................................................................... 3-1
3-2 Flow Controller System Block Diagram ................................................................................... 3-2
3-3 Card Edge PC Board Jumper Location and Function ............................................................. 3-4
3-4 D-Connector PC Board Jumper Location and Function (Voltage I/O Version) ........................ 3-5
3-5 D-Connector PC Board Jumper Location and Function (Current I/O Version) ........................ 3-6
3-6 Model 5965/5851EM Calibration Connections ........................................................................ 3-7
3-7 Fast Response Adjustment ..................................................................................................... 3-8
4-1 Model 5965/5851EM Orifice Sizing Nomograph ................................................................... 4-11
4-2 Example Nomograph ............................................................................................................ 4-14
Tables
Table Page
Number Number
2-1 Recommended Filter Size ..........................................................................................................2-3
4-1 Bench Troubleshooting .............................................................................................................. 4-3
4-2 Sensor Troubleshooting .............................................................................................................4-4
4-3 Conversion Factors (Nitrogen Base) ..........................................................................................4-7
4-4 Model 5965/5851EM Orifice Sizing Nomograph ....................................................................... 4-11
4-5 Model 5965/5851EM Standard Restrictors................................................................................ 4-16