Instruction Manual

i
Brooks
®
Models 5965, 5851EM
Contents
Installation and Operation Manual
X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
Paragraph Page
Number Number
Section 1 Introduction
1-1 How to Use This Manual ............................................................................................................ 1-1
1-2 Description ................................................................................................................................. 1-1
1-3 Specifications ............................................................................................................................. 1-3
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment .................................................................................................................2-1
2-3 Recommended Storage Practice ............................................................................................... 2-2
2-4 Return Shipment ........................................................................................................................ 2-2
2-5 Transit Precaution ......................................................................................................................2-3
2-6 Removal from Storage ............................................................................................................... 2-3
2-7 Gas Connections........................................................................................................................2-3
2-8 In-Line Filter ...............................................................................................................................2-4
2-9 Installation ..................................................................................................................................2-4
2-10 Electrical Interface......................................................................................................................2-6
2-11 Configuring the PC Board .........................................................................................................2-10
Section 3 Operation
3-1 Theory of Operation ...................................................................................................................3-1
3-2 Operating Procedure ..................................................................................................................3-2
3-3 Zero Adjustment .........................................................................................................................3-3
3-4 Calibration Procedure ................................................................................................................3-5
3-5 Response ..................................................................................................................................3-10
Section 4 Maintenance & Troubleshooting
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting.......................................................................................................................... 4-2
4-3 Gas Conversion Factors ............................................................................................................ 4-6
4-4 Orifice Sizing .............................................................................................................................4-10
4-5 Restrictor Sizing ........................................................................................................................4-15
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover