Instruction Manual

4-11
Brooks
®
Models 5965, 5851EM
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009
Figure 4-1 Model 5965/5851EM Orifice Sizing Nomograph