Installation and Operation Manual X -TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Brooks® Models 5965, 5851EM Mass Flow Controllers Model 5851EM Downported Mass Flow Controller with Card Edge Model 5965 Mass Flow Controller with Card Edge Model 5851EM Mass Flow Controller with D-Connector
Installation and Operation Manual Brooks® Models 5965, 5851EM X -TMF-5965-5851EM-MFC-eng Part Number:541B122AAG September, 2009 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X -TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X -TMF-5965-5851EM-MFC-eng Part Number:541B122AAG September, 2009 Brooks® Models 5965, 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X -TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Paragraph Number Contents Brooks® Models 5965, 5851EM Page Number Section 1 Introduction 1-1 How to Use This Manual ............................................................................................................ 1-1 1-2 Description ................................................................................................................................. 1-1 1-3 Specifications .........
Contents Brooks® Models 5965, 5851EM Installation and Operation Manual X -TMF-5965-5851EM-MFC-eng Part Number:541B122AAG September, 2009 Figures Figure Page Number Number 1-1 0 to 100% Command Step, Soft Start Enabled ....................................................................... 1-2 1-2 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector orCard Edge with VCR Fittings ...........................................................................................................
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 1 Introduction Brooks® Models 5965, 5851EM 1-1 How to Use This Manual This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks® Models 5965 and 5851EM This manual is organized into the following sections: Section 1. Section 2. Section 3. Section 4.
Installation and Operation Manual Section 1 Introduction Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 • Fast response control permits rapid gas settling times with minimal over/undershoot. • Soft start provides a flow ramping function which slows down the introduction of process gas for those processes which cannot tolerate rapid flow transition. Refer to section 2-7 and Figure 1-1.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 1 Introduction Brooks® Models 5965, 5851EM • Remote transducer input (Note 1) is accessed via terminal 5 on the Card Edge or Pin 15 on the D-Connector version. This feature allows the use of the integral control electronics and valve to regulate flow in response to the signal from an external 0-5 Vdc signal. The mass flow signal from the Model 5965/5851EM is still available for process monitoring.
Installation and Operation Manual Section 1 Introduction Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 PERFORMANCE CHARACTERISTICS (continued): Pressure Equipment Directive (PED) 97/23/EC Working Pressure 1000 psi (70 bar) max. Mounting Sensitivity +0.5% maximum full scale deviation after re-zeroing. ELECTRICAL CHARACTERISTICS: Power Requirements Voltage Option: + 15 Vdc +5% Watts power consumption Current Option: +22.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 1 Introduction Brooks® Models 5965, 5851EM ELECTRICAL CHARACTERISTICS (continued): Differential Pressure Voltage I/O option Valve orifice sized for any pressure drop between 5 to 50 psi (Minimum pressure drop depends on gas and range). Refer to Orifice Sizing, Section 4-5.
Section 1 Introduction Brooks® Models 5965, 5851EM Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Figure 1-2 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or Card Edge with VCR Fittings 1-6
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 1 Introduction Brooks® Models 5965, 5851EM Figure 1-3 MFC/MFM Dimensional Drawing for Models 5965, 5851EM with D-Connector or Card Edge, Downported 1-7
Installation and Operation Manual Section 1 Introduction X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-8
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 2 Installation Brooks® Models 5965, 5851EM 2-1 General This section contains the procedures for the receipt and installation of the instrument. See Section 1 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented.
Installation and Operation Manual Section 2 Installation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 2-3 Recommended Storage Practice If intermediate or long-term storage of equipment is required, it is recommended that the equipment be stored in accordance with the following conditions: a. Within the original shipping container. b. Stored in a sheltered area, preferably a warm, dry, heated warehouse. c.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 2 Installation Brooks® Models 5965, 5851EM 2-5 Transit Precautions To safeguard the instrument against transportation damage, it is recommended to keep the instrument in its factory container until ready for installation. 2-6 Removal from Storage Upon removal from storage, a visual inspection should be conducted to verify the condition of the equipment is “as received”.
Installation and Operation Manual Section 2 Installation X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM 2-8 In-Line Filter It is recommended that an in-line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 2 Installation Brooks® Models 5965, 5851EM CAUTION Use caution when installing surface mount (downported) controllers. Most metal seals can not be reused after compression. Follow the seal manufacturers’ recommendations for installation. Tighten the mounting screws in 10 in-lb. increments such that the seal undergoes uniform compression.
Installation and Operation Manual Section 2 Installation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Note:The control valve in the Models 5965 and 5851EM provides precision control and is not designed for positive shut-off. lf positive shut-off is required, it is recommended that a separate shut-off valve be installed inline. Controllers with 316L or Teflon valve seats may not shut off flow below 3% of full scale.
Installation and Operation Manual Section 2 Installation X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Pin No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Brooks® Models 5965, 5851EM Function Command Common (Command Pot "CCW") 0-5 Volt Signal Output External Valve Return (See Note 3)** Valve Off +15 Vdc Supply -15 Vdc Supply Valve Test Point/Purge Cmd. Input or Cmd. Pot "S" Supply Voltage Common 0-5 Signal Common +5 Volt Reference Output (Cmd.
Installation and Operation Manual Section 2 Installation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Electrical Hookup (Voltage l/O Version) For installations which replace Unit lnstrument’s UFC-1000’s, (Card Edge version) Pin 10 is f requently grounded. ln these situations the 5 Volt reference output must be disabled. Refer to Section 2-7.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 2 Installation Brooks® Models 5965, 5851EM Grounding the valve test point pin willcause the valve to open fully regardless of command input voltage. Note: For normally open valves grounding this pin will cause the valve to fully close. Valve Off Refer to Figures 2-1, 2-2 and 2-3.The control valve can be forced closed regardless of command input signal by applying a TTL level low (<0.
Installation and Operation Manual Section 2 Installation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Electrical Hookup (Current I/O Option) Setpoint (Command) lnput The Model 5965/5851EM Mass Flow Controller can be used with a current (4-20 mAdc) or voltage (0-5 Vdc) setpoint. To use the current setpoint, connect the setpoint (+) signalto Pin 7 and the setpoint return (-) signal to Pin 1 of the D-Connector and configure the PC board per Section 2-10.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 2 Installation Brooks® Models 5965, 5851EM Configuring PC Board (Vottage I/O Option) 5 Volt Reference OutpuWalve Drive Gonfiguration A. Card Edge Refer to Figures 2-1 and 3-3.Terminal 10 can be jumper selected as 5 Volt reference output, external valve return or “not used”.
Installation and Operation Manual Section 2 Installation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 RemoteTransducer lnput (Factory lnstalled Option) Refer to Figures 3-3, 3-4 and 3-5. To allow the Model 5965/5851EM control circuitry and valve to be used with an 0-5 Vdc external transducer signal, a green jumper is moved to the lower two pins at J7. With this feature enabled a 0-5 Vdc signal may be applied to the external transducer input terminal.
Installation and Operation Manual Section 3 Operation X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM 3-1 Theory of Operation The thermal mass flow sensing technique used in the Model 5851EM works as follows: Constant power (p) is provided to the heater winding which is located at the midpoint of the sensor tube. Refer to Figure 3-1. During no flow conditions, the heat reaching each temperature sensor is equal.Therefore the temperatures T1 and T2, are equal.
Installation and Operation Manual Section 3 Operation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 The flow restrictor shown in Figure 3-1 peforms a ranging function similar to a shunt resistor in an electrical ammeter. The restrictor provides a pressure drop that is linear with flow rate. The sensor tube has the same linear pressure drop/flow relationship.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 3 Operation Brooks® Models 5965, 5851EM d. Set the command for the desired flow rate to assume normal operation. Note: lf a separate positive shut-off solenoid valve is not installed, a flow signal may result from leak-through. Leak-through is more significant with stainless steel and Teflon valve seats.
Installation and Operation Manual Section 3 Operation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Note 4: lf Brooks secondary electronics are being used as a power supply during the calibration, the 5 volt reference must be enabled on the card Edge version for proper operation (see Section 2-7). Remember to deactivate the 5 Volt reference before installing the calibrated mass flow controller in the system where Terminal 10 is grounded.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 3 Operation Brooks® Models 5965, 5851EM Figure 3-4 D-Connector PC Board Jumper Location and Function (Voltage I/O Version) 3-5
Installation and Operation Manual Section 3 Operation X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM J7 - GREEN SETPOINT INPUT SIGNAL TYPE (Mass Flow Controller only) A A 4 - 20 mA 0 - 5 VOLTS NOTE: The 5V Reference is always enabled and is available on Pin 11.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 3 Operation Brooks® Models 5965, 5851EM Figure 3-6 Model 5851EM Calibration Connections Note 5: when calibrating the current l/o Version, it is easiest to calibrate using 0-5 vdc command and flow signals. Refer to section 2, Figures 2-4, 2-6 and 3-5 for proper hookups. After calibration, the Model 5965/5851EM may be reconfigured for Current l/O operation with negligible change in calibration. a.
Installation and Operation Manual Section 3 Operation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 b. Adjust the anticipate potentiometer with 20 clockwise full turns. Next, adjust the anticipate potentiometer with 10 counterclockwise turns to center the potentiometer. This will provide a rough adjustment of this circuit and make the flow more stable for calibration. c.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 3 Operation Brooks® Models 5965, 5851EM Note: The voltage at TP1 is -100 times the output voltage (+100 times for Current l/O Version) of the sensor. This voltage can range from -1.2 to -12 Volts (+1.2 to 12 Volts for the Current l/O Version), however, it is recommended that this voltage stay between -2.0 and -9.0 (+2 and +9 for Current l/O Version) Volts for proper operation.
Installation and Operation Manual Section 3 Operation Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Example: Controller error = 0.7% Measured TP2 voltage = -0.567 Volts TP2 correction = 0.7 x 0.450 = 0.315 Volts New TP2 correction = 0.315 + (-0.567) = -0.252 Volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat Steps f, g and h. Note:The voltage at TP2 can range from -10 to +3.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 3 Operation Brooks® Models 5965, 5851EM c. The behavior of the flow signal during this transition between 100% and zero percent flow indicates the adjustment required of the anticipate potentiometer (refer to Figure 3-7). 1 . lf the flow signal decays to -.05 to -.5 Volt, then rises to zero Volts, the anticipate potent¡ometer is properly adjusted. 2.
Installation and Operation Manual Section 3 Operation X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-12
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM 4-1 Overview 4-1
Installation and Operation Manual Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 No routine maintenance is required on the Models 5965 and 5851EM. If an in-line filter is used, the filtering element should periodically be replaced. 4-2 Troubleshooting CAUTION It is important that this controller only be serviced by properly trained and qualified personnel. A.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM B. Bench Troubleshooting 1. Properly connect the mass flow controller to a + 15 Vdc power supply command voltage source (+27.5 +28 Vdc for Current l/O version) and connect an output signal readout device (4-112 Digit Voltmeter recommended) to Terminals 2 and 3 or D-Connector pins 2 and 10 (refer to Figs.2-2,2-3 and 2-9.
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM 2. Connect the controller to a source of the gas on which it was originally calibrated. Command 100% flow and adjust the inlet and outlet pressures to the calibration conditions. Verify that the output signal reaches and stabilizes at 5.000 Volts.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM C. Sensor Troubleshooting lf it is believed the sensor coils are either open or shorted, troubleshoot using Table 4-2. If any of the steps do not produce expected results, the sensor assembly is defective. Return to Brooks lnstrument for sensor replacement. Note:Do not attempt to disassemble the sensor. D.
Installation and Operation Manual Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 4-3 Gas Conversion Factors If a mass flow controller is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relation between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases.
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon T
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME Ethylene Ethylene Oxide Fluorine Fluoroform f-23 Germane Germanium Tetrachloride Halothane (R-123B1) Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f-116 Hexafuoropropylene (HFP) Hexamethyldisilane (HMDS) Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME FORMULA Pentane (n-Pentane) Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoride Propane (same as CH3CH2CH3) Propylene (Propene) Rhenium Hexafluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride S
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM 4-4 Orifice Sizing The Orifice Sizing Nomograph, Figure 4-4, is used to calculate the control valve's orifice size when changing any or all of the following factors from the original factory calibration: gas operating pressure (inlet and outlet) flow range The flow controller's orifice is factory-sized to a preselected gas, operating pres
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM Figure 4-1 Model 5965/5851EM Orifice Sizing Nomograph 4-11
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM Example: Qgas = 2,000 sccm = 2,000 x .
Installation and Operation Manual Section 4 Maintenance & Troubleshooting X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM 3.
Installation and Operation Manual Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM Figure 4-2 Example Nomograph 4-14 X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM 4-5 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the controller. It creates a pressure drop which is linear with flow rate. This diverts a sample quantity of the process gas flow through the sensor.
Installation and Operation Manual Section 4 Maintenance & Troubleshooting Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 In the example, the restrictor should be sized for a 60.1 slpm flow rate. Note: If the calculated flow rate is such that two different size restrictors could be used, always select the larger size. If a mixture of two or more gases is being used, the restrictor selection must be based on a Nitrogen equivalent flow rate of the mixture.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section A, CE Certification of Mass Flow Equipment Brooks® Models 5965, 5851EM Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A, CE Certification of Mass Flow Equipment Brooks® Models 5965, 5851EM Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Section A, CE Certification of Mass Flow Equipment Brooks® Models 5965, 5851EM Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A, CE Certification of Mass Flow Equipment Brooks® Models 5965, 5851EM Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A, CE Certification of Mass Flow Equipment Brooks® Models 5965, 5851EM Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Installation and Operation Manual X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 Brooks® Models 5965, 5851EM THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual Brooks® Models 5965, 5851EM X-TMF-5965-5851EM-MFC-eng Part Number: 541B122AAG September, 2009 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipmen
