User Manual

Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Brooks
®
Model 5850i
5-2
Section 5 Parts List
Item Qty. Description Part Number
No.
1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169AH%
5 1 O-ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem: Normally Closed Valve 949Z194QOT
Valve Stem: Normally Open Valve 949Z215BMT
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-ring 375B016***
7 1 Valve Plunger Assy: Normally Closed Valve S622Z165AAA
Normally Open Valve S622Z203QOT
31 1 Insert Sleeve Normally Open Valve 456Z071QOT
32 1 Plunger Extension Normally Open Valve 622Z200BMT
8 1 Lower Guide Spring,unit with NO ORIFICE 820Z109DR%
Normally Closed Valve .001-.014 orifice 820Z109DR%
Normally Closed Valve .020-.120 orifice 820Z110DR%
Normally Open Valve all orifice sizes 820Z110DR%
9 AR Small Valve Spacer, 0.005" Thick 810A362BMA
9 AR Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
10 AR Large Valve Spacer, 0.010" Thick 810A361BMA
33 1 Preload Spacer, Spring Normally Open valve 810A388BMT
Valve Seat with Viton Insert S715Z051AAG
11 1 Valve Seat with Buna Insert S715Z050AAG
Valve seat w/Kalrez insert (<or=200 psig) S715Z297AAG
Valve Seat with Kalrez Insert (>200 psig) S715Z163AAA
Valve Seat Solid 316 Stainless Steel 715Z181BNT
Stainless
ID 0.0013" 577Z375BMT
ID 0.002" 577Z376BMT
ID 0.003" 577Z377BMT
ID 0.004" 577Z378BMT
ID 0.007" 577Z381BMT
ID 0.010" 577Z383BMT
12 1 Orifice ID 0.014" 577Z385BMT
ID 0.020" 577Z387BMT
ID 0.032" 577Z391BMT
ID 0.048" 577Z393BMT
ID 0.062" 577Z395BMT
ID 0.078" 577Z397BMT
(Refer to Section 4-6 ID 0.093" 577Z398BMT
for sizing) ID 0.116" 577Z399BMT
ID 0.120" 577Z400BMT
13 1 O-ring, Orifice, Size 008 375B008***
14 1 Controller Body 092Z768BI%
15 1 PC Board Assembly (D-Connector) S097Y249AAA
16 1 Sensor Assembly S774Z508AAA
17 2 O-ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 753B269AWA
19 2 Lock Washer, Sensor 962D006AWA
20 5 Screw, Sensor-PC Board-Cover 753L056AWZ
21 1 Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
22 1 O-ring, Restrictor, Size 109 375B109***
23 1 Electronics Cover Can (D-Connector) 219Z432EA%
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=NS Not Shown
Table 5-1 Model 5850i Replacement Parts List