User Manual

2-4

Brooks

Model 5850i

Section 2 Installation

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Note: The control valve in the Model 5850i provides precision control and

is not designed for positive shut-off. If positive shut-off is required, it is

recommended that a separate shut-off valve be installed in-line.

2-6 In-Line Filter

It is recommended that an in-line filter be installed upstream from the

controller to prevent the possibility of any foreign material entering the flow

sensor or control valve. The filtering element should be replaced

periodically or ultrasonically cleaned.

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron

500 sccm 2 microns

1 to 5 slpm 7 microns

10 to 30 slpm

15 microns

Figure 2-2 "D" Type Connector Pin Arrangement

1 SETPOINT RETURN 9 SUPPLY COMMON

2 VOLTAGE SIGNAL OUTPUT 10 SIGNAL OUTPUT RETURN

3 NOT USED 11 5V REFERENCE OUTPUT

4 CURRENT SIGNAL OUTPUT 12 VALVE OVERRIDE INPUT

5 +15 TO +28 Vdc SUPPLY 13 NOT USED

6 NOT USED 14 CHASSIS GROUND

7 CURRENT SETPOINT INPUT 15 NOT USED

8 VOLTAGE SETPOINT INPUT

*JUMPER SELECTABLE

NOTE: Cable shield tied to chassis ground in connector. Make no

connection on customer end.

Table 2-1 Recommended Filter Size