Owner's manual

4-16
Brooks
®
Models 5964, 5850EM
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
In the example above a Size P restrictor would be selected.
Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
Table 4-4 Model 5850EM Standard Restrictors
Range
SCCM Nitrogen Equivalent Flow* Part Number
Size Low High ACLFE Wire Mesh
D 8.038 11.38 S110Z275BMG
E 11.25 15.93 S110Z276BMG
F 15.75 22.30 S110Z277BMG
G 22.05 31.23 S110Z278BMG
H 30.88 43.73 S110Z279BMG
J 43.23 61.21 S110Z280BMG
K 60.52 85.70 S110Z281BMG
L 84.73 119.9 S110Z282BMG
M 118.6 167.9 S110Z283BMG
N 166.0 235.2 S110Z284BMG
P 232.5 329.3 S110Z285BMG
Q 325.4 460.9 S110Z286BMG
R 455.7 645.3 S110Z287BMG
S 638.0 903.4 S110Z288BMG
T 893.2 1265. S110Z289BMG
U 1250. 1771. S110Z290BMG
V 1750. 2479. S110Z291BMG
W 2451. 3471. S110Z292BMG
X 3431. 4859. S110Z319BMG
Y 4804. 6802. S110Z321BMG
1 6724. 9523. S110Z317BMG
2 9388. 13337. S110Z228BMG
3 13176. 18667. S110Z226BMG
4 18457. 30060. S110Z224BMG
*Materials: BMG = 316 Stainless Steel Electropolished
CVA = Hastelloy C
TM
(ACLFE only)
DCA = Monel R
TM
(ACLFE only)
NOTES: • For flow rates less than 8 sccm, use the low flow plug, P/N 618-K-019-BMG in place of a restrictor assembly.
• If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.