Owner's manual

4-5

Brooks

Models 5964, 5850EM

Section 4 MaintenanceInstallation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Table 4-2 Sensor Troubleshooting

Remove the sensor connector from the PC Board for this procedure.

OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL

Open circuit on ohmmeter. If either heater (1) or

Pin 1 or 4 to meter body sensor common (4) are shorted, an ohmmeter

reading will be obtained.

Pin 4 to Pin 2 Nominal 1100 ohms reading, depending on

Pin 4 to Pin 3

Pin 5 to Pin 1 Nominal 1200 ohm reading.

temperature and ohmmeter current.

SENSOR

SCHEMATIC

NO. FUNCTION

1 Heater

Upstream

2 Temperature

Sensor (Su)

Downstream

3 Temperature

Sensor (Sd)

4 Sensor Common

5 Heater Common