Owner's manual

i
Brooks
®
Models 5964, 5850EM
Contents
Installation and Operation Manual
X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Paragraph Page
Number Number
Section 1 Introduction
1-1 How to Use This Manual ............................................................................................................ 1-1
1-2 Description ................................................................................................................................. 1-1
1-3 Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment .................................................................................................................2-1
2-3 Recommended Storage Practice ............................................................................................... 2-1
2-4 Return Shipment ........................................................................................................................ 2-2
2-5 Transit Precaution ......................................................................................................................2-2
2-6 Removal from Storage ............................................................................................................... 2-2
2-7 In-Line Filter ...............................................................................................................................2-3
2-8 Installation ..................................................................................................................................2-3
2-9 Electrical Interface......................................................................................................................2-4
2-10 Operation Procedure .................................................................................................................. 2-5
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Connections and Controls ..........................................................................................................3-1
3-3 Theory of Operation ...................................................................................................................3-4
3-4 Features .....................................................................................................................................3-6
3-5 Adjustment Potentiometers .......................................................................................................3-15
3-6 Zero Adjustment ........................................................................................................................3-16
3-7 Calibration Procedure ...............................................................................................................3-17
3-8 Response Adjustment ...............................................................................................................3-22
Section 4 Maintenance
4-1 Overview ....................................................................................................................................4-1
4-2 Troubleshooting.......................................................................................................................... 4-2
4-3 Gas Conversion Factors ............................................................................................................ 4-6
4-4 Orifice Sizing ............................................................................................................................. 4-10
4-5 Restrictor Sizing ........................................................................................................................4-15
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover