3-12
Brooks
®
Models 5964, 5850EM
Section 3 Operation
Installation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Figure 3-10 Command Steps,Soft Start Disabled
Figure 3-11 100% Command Step, Soft Start Enabled
ENHANCED RESPONSE PCB
