Owner's manual

3-3
Brooks
®
Models 5964, 5850EM
Section 3 OperationInstallation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Table 3-1 Cables, Calibration Covers and PC Boards for Model 5964/5850EM
5964/5850EM To Model Cable Type Cable Part Number
5 feet 10 feet 25 feet 50 feet
0151E (Panel) Ribbon S124Z469AAA S124Z470AAA S124Z471AAA S124Z472AAA
Card Open Frame
Edge 0151E (Table Top)
0152E Shielded S124Z669AAA S124Z539AAA S124Z562AAA S124Z670AAA
0154E
0151E (Panel) Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA
D-Connector Open Frame
(Voltage I/O) 0151E (Table Top)
0152E Shielded S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA
0154E
0151i (Panel) Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA
D-Connector 0151i (Table Top)
(Current I/O) 0152i Shielded S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA
0154i
***QTA = Viton, SUA = Buna, TTA = Kalrez
Break Out Board Assembly:
Card Edge P/N S273Z649AAA
D-Connector P/N S273Z668AAA
Installs directly between mass flow controller and
interconnecting cable. Allows convenient access to all signals
for easy troubleshooting of the system.
Contains:
1 Break Out PC Board
1 5 foot Extension Cable
1 Terminal PC Board
Calibration Cover:
Card Edge P/N 909Z011EAD
D-Connector P/N 909Z017EAD
Calibration covers reduce the chance of accidental cantact with
the circuit board but allow access for all adjustment
potentiometers and test points needed for calibration.