Owner's manual

1-7
Brooks
®
Models 5964, 5850EM
Section 1 IntroductionInstallation and Operation Manual
X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008
Figure 1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector