Installation and Operation Manual X -TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Brooks® Models 5964, 5850EM Mass Flow Controllers Model 5964 Mass Flow Controller with D-Connector Model 5850EM Downported Mass Flow Controller with Card Edge Model 5850EM Mass Flow Controller with D-Connector
Installation and Operation Manual Brooks® Models 5964, 5850EM X -TMF-5964-5850EM-MFC-eng Part Number:541B121AHG November, 2008 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X -TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X -TMF-5964-5850EM-MFC-eng Part Number:541B121AHG November, 2008 Brooks® Models 5964, 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X -TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Paragraph Number Contents Brooks® Models 5964, 5850EM Page Number Section 1 Introduction 1-1 How to Use This Manual ............................................................................................................ 1-1 1-2 Description ................................................................................................................................. 1-1 1-3 Specifications ..........
Contents Brooks® Models 5964, 5850EM Installation and Operation Manual X -TMF-5964-5850EM-MFC-eng Part Number:541B121AHG November, 2008 Figures Figure Page Number Number 1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM with D-Connector and VCR Fittings ........................................................................................ 1-5 1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM with Card Edge and VCR Fittings ........................................................................
Installation and Operation Manual Section 1 Introduction X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 1-1 How to Use This Manual This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks® Models 5964 and 5850EM This manual is organized into the following sections: Section 1. Section 2. Section 3. Section 4.
Installation and Operation Manual Section 1 Introduction Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 1-3 Specifications PERFORMANCE CHARACTERISTICS: Flow Ranges* Any range from 0 - 3 sccm to 0 - 30,000 sccm Nitrogen equivalent. Lower flows available, consult factory. *Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 1 Introduction Brooks® Models 5964, 5850EM Differential Pressure Valve orifice sized for any pressure drop between 5 to 50 psi (Minimum pressure drop depends on gas and range). Ambient Temperature Limits Operating: 40°F to 150°F (5°C to 65°C) Non-Operating: -13°F to 212°F (-25°C to 100°C) Leak Integrity Inboard to outboard 1 x 10-10 atm. cc/sec. Helium max.
Installation and Operation Manual Section 1 Introduction Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 ELECTRICAL CHARACTERISTICS (continued): 5 Volt Reference Output 5 Volts, ±0.01 Vdc into 2,000 ohms minimum Power Requirements Voltage Option: N.C. Valve (or N.O. Valve with flow less than 2.5 slpm): 3.25 watts max., + 15 Vdc @ 35 mA -15 Vdc @ 180 mA N.O. Valve with flow rate greater than 2.5 slpm: 10.5 watts max.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 1 Introduction Brooks® Models 5964, 5850EM Figure 1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM with D-Connector and VCR Fittings 1-5
Section 1 Introduction Brooks® Models 5964, 5850EM Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Figure 1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM with Card Edge and VCR Fittings 1-6
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 1 Introduction Brooks® Models 5964, 5850EM Figure 1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector 1-7
Section 1 Introduction Brooks® Models 5964, 5850EM Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Figure 1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge 1-8
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 2 Installation Brooks® Models 5964, 5850EM 2-1 General This section contains the procedures for the receipt and installation of the instrument. See Section 1 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented.
Installation and Operation Manual Section 2 Installation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W. Vine Street P.O.
Installation and Operation Manual Section 2 Installation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 2-7 In-Line Filter It is recommended that an in-line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned.
Installation and Operation Manual Section 2 Installation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 CAUTION Use caution when installing surface mount (downported) controllers. Most metal seals can not be reused after compression. Follow the seal manufacturers’ recommendations for installation. Tighten the mounting screws in 10 in-lb. increments such that the seal undergoes uniform compression.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 2 Installation Brooks® Models 5964, 5850EM To insure proper operation, the Model 5964/5850EM must be connected per Figures 2-1 through 2-6 depending upon the type of printed circuit board and connector.
Installation and Operation Manual Section 2 Installation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 1 23 456 SLOT SLOT Brooks® Models 5964, 5850EM 8 9 10 LKJ Component Side of PC Board F EDCBA Non-Component Side of PC Board Chassis Ground 1 Flow Signal Common* 2 Flow Signal Output 3 +15 Vdc Supply 4 Not Used** 5 Not Used 6 Slot 7 Not Used 8 Valve Override 9 5V Ref.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 2 Installation Brooks® Models 5964, 5850EM PCB No. Connector Pin No.
Installation and Operation Manual Section 2 Installation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 1 8 9 Pin No.
Installation and Operation Manual Section 2 Installation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM + 1 + Current Setpoint Input 8 Note 2 15 9 Power Supply 15 - 28 Vdc Com Current Output Signal Output Return Indicator or + Receiver Current Signal: Setpoint and Output + 1 + 8 Voltage Setpoint Input V Note 2 Ret 15 9 Power Supply 15 - 28 Vdc Com Voltage Output Signal Output Return Ret Indicator or + Receiver Voltage Signal: Setpoint an
Installation and Operation Manual Section 2 Installation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM 3-1 Overview After the flowmeter has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge.Bypass is a help in bringing the flow on smoothly. Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Electronics Cover Electrical Interface Valve Connector Adjustment Potentiometers Valve Coil Assembly Inlet Connector Outlet Connector Tubing Connections Electrical Interface Electronics Cover Valve Connector Adjustment Potentiometers Valve Coil Assembly Mounting Fastener Bore Downported Figure 3-1 Model 5964/5850EM Components 3-2
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 3-1 Cables, Calibration Covers and PC Boards for Model 5964/5850EM Break Out Board Assembly: Card Edge P/N S273Z649AAA D-Connector P/N S273Z668AAA Calibration Cover: Card Edge P/N 909Z011EAD D-Connector P/N 909Z017EAD Installs directly between mass flow controller and interconnecting cable.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 3-3 Theory of Operation The thermal mass flow sensing technique used in the Model 5964/5850EM works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube. Refer to Figure 3-3. At zero, or no flow conditions, the heat reaching each temperature sensor is equal.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM Figure 3-3. Flow Sensor Operational Diagram (VCRTM End Connections Shown) Figure 3-4. Flow Control System Block Diagram.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 The flow restrictor shown in Figure 3-3 performs a ranging function similar to a shunt resistor in an electrical ammeter. The restrictor provides a pressure drop that is linear with flow rate. The sensor tube has the same linear pressure drop/flow relationship.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Grounding the valve test point pin will cause the valve to open fully on normally closed devices and close fully on normally open devices regardless of command input voltage. Note: The Current I/O Version does not offer purge functions or a relative control valve voltage monitor.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM J4 & J1 - BLUE VALVE FUNCTION J7 - GREEN REMOTE TRANSDUCER INPUT Disabled (Standard) Enabled Normally Closed Normally Open NOTE: Normally open valves are identified by a label on the solenoid cover.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM J3 - BLACK VALVE DRIVE JUMPER J1 - GREEN LINEARITY JUMPER Valve Drive (15 Volts) B B - Error + Error NOTE: The 5V Reference is always enabled and is available on Pin 11.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM J7 - GREEN REMOTE TRANSDUCER INPUT Disabled (Standard) Enabled TEST POINTS: CIRCUIT COMMON TP4 VALVE VOLTAGE TP3 LINEARITY VOLTAGE TP2 SENSOR VOLTAGE TP1 (Multiplied by -100) J7 N SS J2 ADJUSTMENT POTENTIOMETERS: R1 LINEARITY R2 ANTICIPATE R3 ZERO R4 J2 - RED SOFT START VALVE CONNECTOR J4 & J1 - BLUE VALVE FUNCTION J3 51 50 J4 J1 SENSOR CO
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM J7 - GREEN SETPOINT INPUT SIGNAL TYPE (Mass Flow Controller only) A A 4 - 20 mA 0 - 5 VOLTS NOTE: The 5V Reference is always enabled and is available on Pin 11.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 ENHANCED RESPONSE PCB Figure 3-10 Command Steps,Soft Start Disabled Figure 3-11 100% Command Step, Soft Start Enabled 3-12
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM Five-Volt Reference Output/Valve Drive Configuration The 5 Volt reference output is required if a potentiometer is to be used to generate the Command Signal. On Card Edge PC Boards, Pin 10 can be jumper selected as any of three mutually exclusive functions, 5 Volt reference output, external valve return or “not used.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Valve Off This feature allows the user to close the control valve by supplying a TTL level low signal (<0.4 Vdc) to the proper terminal, independently of the command input. A TTL level high or floating at this pin has no effect. Valve off is accessed via Pin L on the Card Edge or Pin 4 on the D-Connector version.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM 3-5 Adjustment Potentiometers All Model 5964/5850EM instruments are factory calibrated for optimum performance. The only potentiometer recommended for field adjustment is the Zero. As shown in Figure 3-2, access to the Zero Potentiometer is provided by removing the plug labeled 'Z'.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Linearity The linearity potentiometer is used to linearize the flow calibration due to subtle non-linearities in various bypass elements. The linearity signal can be viewed between TP2 and TP4 (circuit common). The value of the signal is flow rate and gas dependent.
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 3-7 Calibration Procedure If the valve has been disassembled and any of the following parts have been replaced, the control valve adjusting procedure in Section 4-4 must be performed before the Model 5964/5850EM is calibrated.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 When calibrating the Current I/O Version, it is easiest to calibrate using 0-5 Vdc command and flow signals and follow the standard response procedure. Refer to Section 3-4, Features, Current I/O Version, for proper hookups. After calibration, the Model 5964/5850EM may be reconfigured for Current I/O operation with negligible change in calibration.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM Adjust the span potentiometer until the TP1 to TP0 (sensor voltage) is equal to the value calculated above. Recheck the flow rate after the flow is stable (at least two minutes). Repeat this step until the measured flow rate is within specification. When the flow rate is within specification, record the sensor voltage and proceed to Step h.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Calibration Procedure for the Standard Response and Current I/O PC Board (4 Adjustment Potentiometers) a. With the controller installed in an unpressurized gas line, apply power and allow approximately 45 minutes for warm-up. During the warm-up, adjustment, and calibration check procedures, do not allow the control valve to drift when gas flow is not present.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM g. Set the command potentiometer for zero percent of flow. Connect the DVM positive lead to flow signal output (Pin 3 Card Edge, Pin 2 DConnector) and the negative lead to TP4 (circuit common). Readjust the zero potentiometer for an output of zero mV ±2 mV as necessary. h. Set the command potentiometer for 50% of flow (2.500 V) and measure the flow rate.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Note: The voltage at TP2 can range from -10 to +3 Volts. It is recommended, however, that this voltage stay between -2.5 and +2.5 Volts for proper operation. If the recommended voltage range is exceeded, the desired accuracy and/or signal stability may not be achieved. If one of the limits is reached, check the restrictor sizing in Section 4-7.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM Figure 3-14 Response Adjustment c1.If the flow signal decays to -0.05 to -0.5 Volt, then rises to zero Volts, the anticipate potentiometer properly adjusted. c2.If the flow signal decays rapidly and goes below -0.5 Volt before rising to zero Volt, the anticipate potentiometer must be adjusted clockwise and Steps a and b repeated. c3.
Installation and Operation Manual Section 3 Operation Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 c. Repeat Steps a and b above until no further anticipate potentiometer adjustment is necessary. d. If the response time and overshoot are not within the required limits, the response potentiometer must be adjusted to control the amount of overshoot. Set the command to 0% flow rate (0.000 V) and allow the flow signal output to stabilize (30 seconds minimum).
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 3 Operation Brooks® Models 5964, 5850EM Standard Response and Current I/O PC Board Adjustment #2 (specification guaranteed) Note: Adjustment of the anticipate potentiometer to obtain a flow rate performance to be within 2% of flow rate commanded in less than three seconds (six seconds for Current I/O Version) after command change requires the use of a fast response flowmeter (500 millisecond response
Installation and Operation Manual Section 3 Operation X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-26
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 4 Maintenance Brooks® Models 5964, 5850EM 4-1 Overview 4-1
Installation and Operation Manual Section 4 Maintenance Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 No routine maintenance is required on the Model 5964/5850EM. If an inline filter is used, the filtering element should periodically be replaced.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 4 Maintenance Brooks® Models 5964, 5850EM B. Bench Troubleshooting In order to assist in troubleshooting it is highly recommended that the controller be installed in a flow circuit as shown in Figure 3-13. 1. Properly connect the mass flow controller to a ±15 Vdc power supply or a +15 to +28 Vdc in the case of a current I/O board.
Section 4 Maintenance Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Actual flow overshoots setpoint by more than 5% full scale. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Sections 3-5 & 3-8 . Output stays at zero level regardless of command and there is no flow through the controller.
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 4-2 Sensor Troubleshooting SENSOR SCHEMATIC PIN NO. 1 2 3 4 5 FUNCTION Heater Upstream Temperature Sensor (Su) Downstream Temperature Sensor (Sd) Sensor Common Heater Common Remove the sensor connector from the PC Board for this procedure.
Installation and Operation Manual Section 4 Maintenance Brooks® Models 5964, 5850EM X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 4-3 Gas Conversion Factors If a mass flow controller is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relation between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases.
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME Ethylene Ethylene Oxide Fluorine Fluoroform f-23 Germane Germanium Tetrachloride Halothane (R-123B1) Helium Hexafluoroacetone Hexaflorobenzine Hexafluoroethane f-116 Hexafuoropropylene (HFP) Hexamethyldisilane (HMDS) Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fl
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME FORMULA Pentane (n-Pentane) Phosgene Phosphine Phosphorous Pentafluoride Phosphorous Trifluoride Propane (same as CH3CH2CH3) Propylene (Propene) Rhenium Hexafluoride Silane Silicon Tetrachloride Silicon Tetrafluoride Sulfur Dioxide Sulfur Hexafluoride Sulfur Tetrafluoride Sulfur Trioxide Sulf
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 4-4 Orifice Sizing The Orifice Sizing Nomograph, Figure 4-1, is used to calculate the control valve's orifice size when changing any or all of the following factors from the original factory calibration: gas operating pressure (inlet and outlet) flow range The flow controller's orifice is factory-sized to a preselected gas, operating pressure and flow range
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 4 Maintenance Brooks® Models 5964, 5850EM Figure 4-1 Model 5850EM Orifice Sizing Nomograph 4-11
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM Example: Qgas = 2,000 sccm = 2,000 x .
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM 3.
Installation and Operation Manual Section 4 Maintenance Brooks® Models 5964, 5850EM Figure 4-2 Example Nomograph 4-14 X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section 4 Maintenance Brooks® Models 5964, 5850EM 4-5 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the controller. It creates a pressure drop which is linear with flow rate. This diverts a sample quantity of the process gas flow through the sensor.
Installation and Operation Manual Section 4 Maintenance X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM In the example above a Size P restrictor would be selected. Note: If the calculated flow rate is such that two different size restrictors could be used, always select the larger size. If a mixture of two or more gases is being used, the restrictor selection must be based on a Nitrogen equivalent flow rate of the mixture.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section A, CE Certification of Mass Flow Equipment Brooks® Models 5964, 5850EM Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section CE Certification Brooks® Models 5964, 5850EM Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Section A, CE Certification of Mass Flow Equipment Brooks® Models 5964, 5850EM Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section CE Certification Brooks® Models 5964, 5850EM Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section CE Certification Brooks® Models 5964, 5850EM Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5964-5850EM-MFC-eng Part Number: 541B121AHG November, 2008 Brooks® Models 5964, 5850EM LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment
