User guide

Brooks

Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Contents

Section 5

Parts List

5-1 General ............................................................................. 5-1

Section A

CE Certification

CE Certification of Mass Flow Equipment ................................... A-1

Warranty, Sales/Service Contact Information ......................Back Cover

Figures

Figure

Number Page

1-1 Command Steps, Soft Start Disabled ................................ 1-2

1-2 0-100% Command Step, Soft Start Enabled ..................... 1-2

2-1 Model 5850E Dimensions ................................................. 2-3

2-2 Model 5850E Card Edge Connector Comparison Guide... 2-4

2-3 Model 5850E Card Edge Connector Hookup Diagram...... 2-5

2-4 D-Type Connector Pin Arrangement ................................. 2-5

3-1 Flow Sensor Operational Diagram .................................... 3-2

3-2 Flow Control System Block Diagram ................................. 3-3

3-3 Card Edge PC Board Jumper Location & Function ........... 3-4

3-4 D-Connector PC Board Jumper Location & Function........ 3-5

3-5 Model 5850E Calibration Connections .............................. 3-6

3-6 Adjustment Potentiometer Location .................................. 3-9

3-7 Fast Response Adjustment .............................................. 3-11

4-1 Torque Sequence for the Valve Retainer Plate .................. 4-7

4-2a Valve Adjusting Spacer Locations (N.C.) .......................... 4-11

4-2b Valve Adjusting Spacer Locations (N.O.) .......................... 4-12

4-3 Voltmeter Connections for Valve Adjustment ................... 4-14

4-4 Example Nomograph ....................................................... 4-18

5-1 Model 5850E Parts Drawing.............................................. 5-1

Tables

Table

Number Page

2-1 Recommended Filter Size ................................................. 2-6

4-1 Bench Troubleshooting...................................................... 4-4

4-2 Sensor Troubleshooting .................................................... 4-5

4-3 Conversion Factors (Nitrogen Base) ................................ 4-15

4-4 Model 5850E Orifice Sizing Nomograph .......................... 4-19

4-5 Model 5850E Standard Restrictors ................................... 4-23

5-1 Model 5850E Replacement Parts List ............................... 5-2

5-2 Tool and Spare Part Kits for 5850E Series ........................ 5-4