Owner manual

Brooks

4800 Series

Contents Installation and Operation Manual

X-TMF-4800-MFC-eng

Part Number: 541B0072AG

September, 2013

Figures

Figure Page

Number Number

1-1 Dimensions for Model 4850/4860 with Standard Process Connections .....................................1-4

1-2 Dimensions for Model 4850/4860 with Downport Connections ..................................................1-4

1-3 Dimensions for the 4800 Series Local Operator Interface (LOI) ................................................ 1-6

3-1 Gas Flow Across the MEMS Sensor .......................................................................................... 3-1

4-1 Bench Troubleshooting Circuit ...................................................................................................4-5

Tables

Table Page

Number Number

1-1 15-Pin D-Sub Connector Pin-out................................................................................................ 1-3

4-1 Troubleshooting..........................................................................................................................4-2