1-4
Brooks
®
4800 Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
September, 2013
Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections
Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections
