User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
1. May result in Oxygen-Short.
2. Evacuate from inside of stocker when low O2
Concentration
1. When power is supplied, non-professional
personnel should not operate it to avoid electric
shock hazard.
2. Before checking, maintenance and repair,
please turn off the power.
3 Description of starting steps
3.1 Turn on breaker power.
3.2 Facility department is suggested to be AC 110~230V
3.3 Turn on MOXA。
3.4 Turn on IPC power at the rear side of the machine.
3.5 Pressure gauge setting
3.5.1 After turning on the power, please zero the inlet pressure gauge first
3.5.2 Facility Pressure adjustment and setup：Process& Vac Control Gas 100PSI(0.7 Mpa)
3.5.3 Machine Pressure adjustment and setup：Process 70PSI(0.5 Mpa)，Vac Control 100PSI(0.7
Mpa)
3.6 All the reported FDC values should be based on program GUI screen, therefore, when adjusting
all kinds of values, please have them based on GUI screen.
4 Description of stopping steps
4.1 Please use externally connected screen or remote control program to confirm all the ports Purge
program are all in idle states.
4.2 After log in into the program, please select Quit to end the program.
4.3 Turn off IPC.
4.4 Turn off breaker power.
4.5 Install lock for breaker and lock it.
4.6 Close the gas source switch at the facility end.