User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
1 Introduction
Brillian N2 Purge Solution is a series of nitrogen gas products designed specifically to remove
moisture and oxygen content and extend Q-Time, including OHB N2, UTS (Under Track Storage)
It can be used with semiconductor AMHS automation equipment, and it is small size and does not
occupy space. In addition, it can be configured beside the process equipment far away from the
storage system to shorten the OHT delivery time.
Item
OHB N2
UTS
Installation
location
under the Fab automation track
SIDE the Fab automation track
Flow SLM
≤ 50
≤ 50
Process
Front of the process
Back-end of the process
Front of the process
Back-end of the process
FOUP Type
Barrier & ASYST Entegris /
ShinETsu
Barrier & ASYST Entegris /
ShinETsu