User's Manual
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Brillian Network & Automation Integrated System Co., Ltd.
16.3.3 Purpose:Maintain gas cleanliness
Material:Filter
Manual tool:Wrench
Notice:The direction is marked on the appearance, please install according
to the flow direction
PM Step:Turn off power,assemble components and snug fingertight,
Then use a movable wrench to loosen the SWG connectors on the left and
right sides of the Filter and replace it with a new Filter.。
N2 Filter description
Under Plate Filter description,Two
groups SEP&A300