User's Manual
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Brillian Network & Automation Integrated System Co., Ltd.
16.3.2 Purpose:Check Nozzle Whether there is damage, scratches,
accumulation of particles, etc.
Material:Nozzle
Manual tool:Cleanroom wiper、AIR GUN
Notice:Do not use DI Water to wipe Nozzle
PM Step:Use a Cleanroom wiper to the Nozzle or use CDA (Air Gun) to
clean the Nozzle, and install it after cleaning.
Please use Cleanroom wiper and gloves
when taking Nozzle
When AIR Gun Purge Nozzle, the gas
can be cleaned with XCDA or N2
A300 Nozzle
SEP Nozzle