User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
16.3 Cleaning method
16.3.1 Purpose：Cleaning Plate Particle
Material：NA
Manual tool：Cleanroom wiper、DI Water
Notice：Before action, please confirm whether the machine is down
PM Step：Cleanroom wiper cloth into the DI Water from inside to outside
and from top to clean the Plate surface.
The cleanroom wiper that has been wiped cannot be reused to avoid accumulation of particles