User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
16 Periodical Maintenance
16.1 OHB AD100 Maintenance Table
Item Maintenance Content Cycle Result Remark
1 Confirm that all nozzles HOLD are firm Three months □OK □NG
Three months □OK □NG
One Year □OK □NG
3
Confirm the smoothness of the up and
down movement of the nozzle shaft
Three months □OK □NG
4 Plate Placement function verification Three months □OK □NG
5 Plate cleaning Three months □OK □NG
5LPM 10LPM 20LPM 30LPM
Port 1 □OK □NG
Port 2 □OK □NG
Port 3 □OK □NG
Port 4 □OK □NG
7 Confirm Inlet&Outlet Valve Three months □OK □NG
8 Confirm Flow Meter Three months □OK □NG
9 Confirm Vacuum generator Three months □OK □NG
10 Confirm EMO Three months □OK □NG
11 Chang Inlet Filter One Year □OK □NG
12 Confirm Inlet&Outlet Pressure Three months □OK □NG
Confirm if value is normal
Remark:
One Year Content with Three months
If you change Parts, please record it in the remarks
Manual Mode control Valve is abnormal or not
Manual Mode control Valve is abnormal or not
Manual Mode control Valve is abnormal or not
Chang Filter and Check function
Manual control press EMO to confirm whether the
GUI displays a signal, All valve closed
Chang Filter,Need to confirm the flow direction
Confirm that the nozzle axis moves up and down
smoothly
Plate cleaning&Sensor Check
Manual control press the Sensor to confirm
whether the red light is on, the GUI is Normal
display
盤面清潔
Check MFC & Valve
6
Confirm MFC
Three months
Nozzle&Hold Check
Use a cross head to lock the screws
2
Confirmation and cleaning of the nozzle
Nozzle cleaning
Nozzle chang
OHB AD100 Maintenance Table
Machine Tool:
□ Three months □One Year
Date:
Operator:
Action