User's Manual

- 19 -
Brillian Network & Automation Integrated System Co., Ltd.
1102
CDA Inlet Pressure
Switch Out of
Specified.
a. Confirm if the supply amount in gas source end is normal.
b. Check if AI wire connectors are dropped or in bad contact
1103
EXH. Pressure Swtitch
Out of Specified.
a. Confirm if Vacuum generator is normal
b. Check if DO wire connectors are dropped or in bad contact
1104
Temperature Out of
Specified.
a. Confirm if SPEC setting is normal.
b. Confirm if RH Sensor is normal.
c. Confirm if BR PCB Sensor is normal.
3003
FOUP [MID]is Idle for
600 seconds.
a. Confirm if the upper layer of SECS does not make Unload
command,
b. Software or PC Restart