User's Manual

- 18 -
Brillian Network & Automation Integrated System Co., Ltd.
100092
EMO Error.
a. Confirm operator touched by mistake
b. Check if BR PCB Board power & signal wire connectors are
dropped or in bad contact.
2001
RFID Read Error.
a. Check if Antenna & signal wire connectors are dropped or in
bad contact.
b. Confirm if BR PCB Board is normal
2007
PortX Open Valve
Fail.
a. BR PCB board AI board is abnormal.
b. Confirm if the supply amount in gas source end is normal.
1094
PortX Flow Low
Error.
a. Confirm if SPEC setting is normal.
b. Confirm if the supply amount in gas source end is normal.
c. Check if MFC wire connectors are dropped or in bad contact.
d. Confirm if MFC is normal
e. Confirm if BR PCB Board is normal
1096
N2 Inlet Pressure
Switch Out of
Specified.
a. Confirm if SPEC setting is normal.
b. Confirm if the supply amount in gas source end is normal.
c. Check if AI wire connectors are dropped or in bad contact.
d. Confirm if Pressure is normal
e. Confirm if BR PCB Board is normal
1097
MFC Flow Out of
Specified limit.(High).
a. Confirm if the supply amount in gas source end is normal.
1098
MFC Flow Out of
Specified limit.(Low).
a. Confirm if the supply amount in gas source end is normal.
b. Confirm if Inlet end pipeline is abnormal or not.
1099
MFC Timeout
Count=20 , Can't
Control Flow.
a. Check if MFC wire connectors are dropped or in bad contact.
b. Confirm if BR PCB Board is normal
c. Confirm if MFC is normal
1101
Outlet Pressure Switch
Out of Specified.
a. Confirm if the supply amount in gas source end is normal.
b. Check if AI wire connectors are dropped or in bad contact.
c. Confirm if Outlet end pipeline is abnormal or not.