User's Manual

I
Brillian Network & Automation Integrated System Co., Ltd.
Contents
1 Introduction............................................................................................................................. - 1 -
2 Description of safety rule of OHB N2 Purge System .................................................................. - 2 -
3 Description of starting steps ..................................................................................................... - 3 -
4 Description of stopping steps .................................................................................................... - 3 -
5 Emergency Stop and Recovery ................................................................................................. - 4 -
6 Facility Requirement ................................................................................................................ - 5 -
7 FCC........................................................................................................................................ - 5 -
8 OHB N2 AD100 Module ......................................................................................................... - 6 -
9 OHB N2 AD100 Module .......................................................................................................... - 9 -
9.1 Front Illustration -1 ..................................................................................................... - 9 -
9.2 Front Illustration -2 ..................................................................................................... - 9 -
9.3 Under Illustration ...................................................................................................... - 10 -
9.4 Plate Illustration ........................................................................................................ - 10 -
9.5 Light tower ............................................................................................................... - 11 -
10 Signal I/O List ....................................................................................................................... - 12 -
11 Communication Layout .......................................................................................................... - 12 -
12 OHB N2 AD100 Hardware .................................................................................................... - 13 -
12.1 Piping ....................................................................................................................... - 13 -
12.2 Hardware Method ..................................................................................................... - 13 -
12.3 Piping Connect.......................................................................................................... - 14 -
12.3.1 Facility Connect .................................................................................................... - 14 -
13 OHB N2 AD100 Vacuum generator adjust .............................................................................. - 15 -
14 BR PCB description ............................................................................................................... - 16 -
15 Alarm code & Alarm Analysis ................................................................................................ - 17 -
16 Periodical Maintenance .......................................................................................................... - 20 -
16.1 OHB AD100 Maintenance Table ................................................................................ - 20 -
16.2 Periodical maintenance Attention ............................................................................... - 21 -
17 Revision History .................................................................................................................... - 28 -