User's Manual

- 17 -
Brillian Network & Automation Integrated System Co., Ltd.
15 Alarm code & Alarm Analysis
Code
Alarm
Action
100001
FOUP Remove During
Purging.
a. Confirm if the upper layer of SECS end does not make Purge
End command,
100002
FOUP Detect Error.
a. Confirm Plate is abnormal or not.
b. Confirm Block is abnormal or not.
100003
Humidity is not low
enough
a. Confirm if SPEC setting is normal.
b. Confirm if Intlet end pipeline is abnormal or not.
c. Confirm if Outtlet end pipeline is abnormal or not.
d. Confirm if seal tightness between FOUP and Nozzle is
normal.
e. Confirm if RH Sensor is normal.
f. Confirm if BR PCB Board is normal.
100006
Board TimeOut
Count:{0} , Can't
Control Flow.
a. Check if BR PCB Board power & signal wire connectors are
dropped or in bad contact.
b. Confirm if BR PCB Board is normal.
c. Confirm if MOXA is normal.
100007
Out Flow Meter Out of
Specified.
a. BR PCB board AI board is abnormal.
b. Confirm if BR PCB Board is normal.
c. Confirm if Outlet end pipeline is abnormal or not.
100021
100022
100023
100024
100025
E84 TP1 Time Out.
E84 TP2 Time Out.
E84 TP3 Time Out.
E84 TP4 Time Out.
E84 TP5 Time Out.
a. Confirm if E84 Sensor is normal
b. Confirm if BR PCB Board is normal.