User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
13 OHB N2 AD100 Vacuum generator adjust
13.1 Place the FOUP on the OHB Plate
13.2 Manual Mode
13.3 Setting page->Open Inlet& Outlet &Vac Valve
13.4 Turn needle Valve，Observe the Flow Meter value in the GUI screen and adjust to the required
flow rate.
13.5 Setting page Close Valve
13.6 Auto Mode