Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Compact Turbo™ TurboDrag Pump PM 0470 BE/O (0709) TMH 261 TMU 261 idealvac.com (505)872-0037 idealvac.
Table of contents Table of contents 1 1.1 1.2 2 2.1 2.2 2.3 3 3.1 3.2 4 4.1 4.2 4.3 5 5.1 5.2 5.3 5.4 5.5 5.6 5.7 6 6.1 6.2 6.3 6.4 6.5 7 7.1 7.2 7.3 8 8.1 8.2 8.3 9 9.1 10 11 12 13 13.1 2 About this manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Safety . . . . . .
About this manual 1 About this manual 1.1 Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
About this manual Piktograph definitions Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents. Warning of a displayed source of danger in connection with operation of the unit or equipment. Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents. Instructions in the text Î Work instruction: here you have to do something.
Safety 2 Safety 2.1 Safety precautions NOTE Duty to inform Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions. Î Absolute observe the safety information for vacuum pumps (PT 0300 BN) ! Î The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump, the pumped medium and the entire system.
Transport and storage 2.3 Improper use Improper use will cause all claims for liability and guarantees to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned above, especially: • • • • • • • • • Pumping of corrosive or explosive media. Pumping of condensing vapors. Operation with improper high levels of gas loads. Operation with improper high fore-vacuum pressures. Operation with improper gas mode. Operation with improper high levels of insulated heat input.
Product description 4 Product description 4.1 Product identification Pump types The product designations of Pfeiffer vacuum turbomolecular pumps are self-explanatory and permit conclusions about the different versions. The product designation consists of a family designation (1), the size (2), which is oriented on the pumping speed, and the properties (3) of the pump. TMH(1) 261(2) P(3) 1. Family designation 2.
Product description 4 H 8 4 8 High vacuum flange Electronic drive unit TC 600 17 Venting screw 20a Fore-vacuum flange 98 Remote plug 17 F 98 VV 20a Fig. 2: View of CompactTurbo™ TMH 261 NOTE Observe the connection instructions! On delivery turbopumps with TC 600 are set up for operations with "Remote Control". Î Before operating with DCU, HPU or PC the 15-pole D-Sub connector (remote plug) must be removed from the TC 600.
Installation 5 Installation WARNING Danger from the turbopump being ripped off. If the rotor is suddenly blocked, torques of up to 1860 Nm can occur; if the turbopump is not properly fastened, it can be ripped off. Î Precisely follow installation instructions. Î Only use original components for the installation. NOTE Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories.
Installation Vibration damper CAUTION Danger from the pump being ripped off When a Pfeiffer Vacuum vibration damper is used, suitable safety measures must be taken to compensate for the torques in case of sudden blocking. Î Definitely consult with Pfeiffer Vacuum. Î Do not exceed the maximum permitted temperature at the vibration compensator (100°C).
Installation NOTE Possible damage to the pump If a pump with an ISO-K flange is fastened to a vacuum chamber with an ISO-F flange or if ISO-KF flanges are used, sudden blocking of the rotor can result in twisting despite proper installation. Installation of ISO-K flange with ISO-K flange For the installation of the flange connections the following components are available: Connection nominal diameter DN 100 ISO-K Designation Pieces Ordering No.
Installation The connection types for installation of CF to CF flange are "stud screw and pocket hole" as well as "hex screw and through hole". The following elements are required: • A set of mounting material for the respective type of connection • A copper seal • A protective screen or splinter shield can optionally be used Nominal connection diameter DN 100 CF-F Designation Ordering no.
Installation 5.4 Connections to the turbopump H TC 600 RS 485 REMOTE F HEAT/TMS VENT FV PUMP FAN VV Fig. 5: Connection designations for turbopumps with electronic drive unit TC 600 Connecting the forevacuum side Recommendation: As backing pump, use a dry-compressing diaphragm pump or rotary vane pumps from the Pfeiffer Vacuum programme. The backing pump must generate a vacuum pressure of ≤ 5 mbar.
Installation Electrical connection Î Plug the control lead of the venting valve in accordance with the accessory’s operating instructions. Î Select the venting mode of the venting valve via the DCU, HPU or serial interface RS485. Casing heating unit The turbopump and vacuum chamber can be heated to reach the final pressure more quickly. Use of a casing heating unit makes sense only for pumps with the high vacuum flange in stainless steel design.
Installation • When operating the pump with more than 50 % of the maximum gas load, sealing gas must be used to ensure rotor cooling. Connecting the electronic drive unit to the power supply The turbopumps CompactTurbo™ TMH/U 261 form a single unit with the electronic drive unit. For voltage supply, use only Pfeiffer Vacuum power supplies (e.g. TPS 200 or DCU 200).
Installation 5.5 Connecting Pfeiffer Vacuum display and control units or PC NOTE Observe the connection instructions! On delivery turbopumps with TC 600 are set up for operations with "Remote Control". Î Before operating with DCU, HPU or PC the 15-pole D-Sub connector (remote plug) must be removed from the TC 600. USB/RS485-converter RS-232 DCU 100-600 TIC 001 RS-485 HPU 001 TC 600 DCU 001 Fig.
Installation Cross-linking via the connection RS485 TIC 001/ USB/RS485-converter TC D+ D- TC D+ D- D+ D- D+ D- RS 485 CAUTION Danger of electric shock The insulation measures of the bus system are designed only for use with safety extralow voltage. Î Connect only suitable devices to the bus system. Î The connections must be made in accordance with the specification of the interface RS485. Î Connect all units with D+ (pin 5 / RS485) and D- (pin 7 / RS485) to the bus.
Installation Pin Function Open (low) Closed (high) 4 Pumpstand aus Pumping station on: the turbopump is driven, backing pump control via relay box, the air cooling unit runs Heizung aus Heating on: the heating is switched on once the rotation switchpoint is attained.
Installation 5.7 Connections diagram TC TC 600 TC 750 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 RS 485 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 REMOTE 1 2 3 4 5 6 HEAT/TMS VENT 1 2 3 4 5 6 FV PUMP 1 2 3 4 5 6 n.c. +24 VDC* / max. 200 mA (supply voltage, DCU) n.c. n.c. RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. +24 VDC*/max. 50 mA Venting release Motor TMP Pumping station Heating / Reset (opt. sealing gas) Standby PWM on (touch relation 25 - 75 %) Switching output 1 (24 VDC / max.
Operation 6 Operation NOTE Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components. Î For information on the operating instructions of components, see "Accessories". Î Use original accessory parts only.
Operation S1 X1 X2 F1 F2 Switch ON/OFF Mains connection Connection TC 600 Fuse Fuse Fig. 9: Rear panel of power supply TPS 6.3 Function description Operation without operating unit • On delivery: Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the remote plug. • For operation without the control unit, the 15-pole D-Sub plug must be in the "REMOTE" connection on the TC 600. Î Switch on the supply voltage with switch S1 on the power supply.
Operation • Settings are possible via the RS485 on the TC 600 by using DCU, HPU or PC. Turbopump motor After the pumping station is switched on and the self-test successfully completed (duration approx. 10 seconds), the turbopump is set into operation. During operation, the turbopump can be switched off and on again, while the pumping station remains switched on. The turbopump is not vented thereby. Pumping station Connected pumping station components (e.g.
Operation A relay is connected between Pin 10 (earth) and the respective switching output Pin 8 or Pin 9. Contact outputs • Relay contact 1: The contact between Pin 11 and Pin 12 is closed, if the rotation switchpoint is exceeded. • Relay contact 2: The contact between Pin 13 and Pin 14 is closed at failure-free operation. Analogue output Over the analog output, a speed-proportional voltage (0-10 VDC equals 0 - 100 % *fend) can be picked up (load R ≥ 10 kΩ).
Operation 6.4 Monitoring of the operation conditions Operating mode display via LED LEDs in the front panel of the TC 600 show basic operating conditions of the turbopump and TC. A differentiated malfunction and warning display is possible only for operation with DCU or HPU. LED green Temperature monitoring LED red Cause glows power supply is o.k. function ”pumping station on“ is carried out flashes short (1/12s active) power supply is o.k.
Maintenance / replacement – For small vacuum chambers, use the Pfeiffer Vacuum TVF 005 venting valve. Î Then vent with an additional venting valve of any desired size. 7 Maintenance / replacement WARNING Contamination of parts and operating fluid by pumped media is possible. Poisoning hazard through contact with materials that damage health. Î In the case of contamination, carry out appropriate safety precautions in order to prevent danger to health through dangerous substances.
Maintenance / replacement NOTE Lubricant filling The lubricant reservoir is sufficiently filled with TL 011 lubricant. Î Do not add additional lubricant. Standard version Î Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if necessary. Î Remove the vacuum pump from the system, if necessary. Î Close the flange openings by using the original protective covers. Î Turn the turbopump over onto the closed high vacuum flange.
Maintenance / replacement Y Version Î Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if necessary. Î Remove the vacuum pump from the system, if necessary. Î Close the flange openings by using the original protective covers. Î Turn the turbopump over onto the closed high vacuum flange. E 7 6 Î Screw out the end cover on the bottom of the turbopump with special tool E. Pay attention to O-ring. Î Using tweezers, lift out the lubricant reservoir.
Maintenance / replacement 7.3 Replacing the electronic drive unit WARNING Danger of electric shock Even after mains power is switched off, the subsequently running turbopump delivers voltages > 50 V eff.. There is a danger of electric shock when touching open contacts on conducting parts. Î Never separate the electronic drive unit from the pump when the mains power is connected or the rotor is running. Î Wait for the turbopump to reach complete standstill.
Decommissioning 8 Decommissioning 8.1 Shutting down for longer periods WARNING Contamination of parts and operating fluid by pumped media is possible. Poisoning hazard through contact with materials that damage health. Î In the case of contamination, carry out appropriate safety precautions in order to prevent danger to health through dangerous substances. Î Decontaminate affected parts before carrying out maintenance work.
Malfunctions 9 Malfunctions If malfunctions on the pump occur, you will find possible causes and instructions for repair in the following table. 9.
Service 10 Service Pfeiffer Vacuum offers first-class service! • • • • Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService Maintenance / repair in the nearby ServiceCenter or ServicePoint Fast replacement with exchange products in mint condition Advice on the most cost-efficient and quickest solution Detailed information, addresses and forms at: www.pfeiffer-vacuum.net (Service).
Spare parts TMH/U 261 11 Spare parts TMH/U 261 Item Designation Size Order Number 6 End cover M40 x 1 PM 003 619 A 7 Lubricant reservoir Pieces Order Qty 1 PM 063 265 -T incl. O-ring PM 063 266 -T incl.
Accessories 12 Accessories Designation Size Order Number Operating instructions DCU 200 power supply with Display Control Unit 200 W PM C01 695 PM 0477 BN PM 0547 BN TPS 200 power supply for wall/ standard rail mounting 200 W PM 041 813 -T PM 0521 BN TPS 201 power supply 19" rack module 3HU 200 W PM 041 819 -T PM 0521 BN Mains cable with safety plug 230 V, 3 m P 4564 309 ZA Mains cable with UL plug 115 V, 3 m P 4564 309 ZE Mains cable with UL plug 208 V, 3 m P 4564 309 ZF Notes Or
Technical data 13 Technical data Parameter TMH 261 P TMH 261 YP TMU 261 P TMU 261 YP Flange (in) DN 100 ISO-K DN 100 CF-F Flange (out) DN 25 ISO-KF / G 1/4" DN 25 ISO-KF / G 1/4" Venting connection G 1/8" G 1/8'' Rotational speed ±2% 60000 rpm 60000 rpm Run-up time 1.6 min 1.6 min Ultimate pressure with rotary vane pump < 1·10-7 mbar < 5·10-10 mbar Ultimate pressure with diaphragm pump -7 < 1·10 mbar < 1·10-8 mbar Fore Vacuum max.
Technical data 13.1 Dimension diagrams 82 60˚ M6 82 113.5 67 60˚ 30˚ 45˚ M6 M8 G 113.5 67 30˚ 45˚ M8 G DN 25 ISO-KF 14 Ø138.5 Ø119 DN 100 ISO-K DN 100 CF-F 53.5 VV 48 F VV 120 F 194.5 162.5 146 128.5 96.5 86.5 48 G 3 3 Fig. 12: TMH 261 P / YP, DN 100 ISO-K 14 H 120 194.5 162.5 146 128.5 96.5 86.5 H G 104.2 125 53.5 Ø138.5 Ø119 M8 50 G1/8" 5 104.2 125 Ø8 F 5 M8 50 95 100 88.5 Ø8 F G1/8" 33˚ 33˚ 88.7 VV VV 58 58 95 100 DN 25 ISO-KF Fig.
Declaration of conformity according to the EC directive: • Machinery 2006/42/EC (Annex II, no. 1 A) We hereby declare that the product cited below satisfies all relevant provisions of EC directive "Machinery" 2006/42/EC. In addition, the product cited below satisfies all relevant provisions of EC directive "Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.
Vacuum is nothing, but everything to us! Turbopumps Rotary vane pumps Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.
