Specifications

Quick-Start Operating Guide

Humex 2™ Inline Humidification System

Terra Universal, Inc. • TerraUniversal.com • 800 S. Raymond Ave. • Fullerton, CA 92831 • TEL: (714) 578-6000 • FAX: (714) 578-6020

• If the %RH does not rise after 3 – 5 minutes of Humex 2 operation, open the pinch valve incrementally to

increase water flow.

• Keep the “gas out” line from the Humex 2 to the process chamber as short as possible.

• If the Dual Purge System remains at high-level purge, or if it frequently fluctuates between high and low-level

purge, you need to increase your flowmeter setting. Increase the flowmeter setting until the humidity level falls a

few percent below your set point. At this flowmeter setting, the system will be able to maintain the desired

humidity while on the low-level purge—and save nitrogen.

As you increase the flow, the internal positive pressure will also increase. You may safely increase this pressure

as high as .3" WC as long as the chamber incorporates Automatic RB Valves, which automatically protect

against the possibility of warping or explosion.

5.0 Maintenance

Replacing Heater

The Humex 2 heater has a MTBF (mean time before failure) rating of 500 hours, equivalent to years of typical

operation. If the heater needs to be replaced,

4.1 Remove the sheet metal screws to remove the top cover.

4.2 Use a 7/16" wrench to loose the fittings around the heater.

4.3 Remove the tubing elbows by loosening the fittings at both ends (see illustration)

4.4 Undo the heater wires (one at the relay, the other at the terminal block)

4.5 Install new heater, using reverse procedure.

Cat. #

Replacement Heater 9081-05

Replacement Filter 9081-06

Activated charcoal filter, attached to incoming water line