Hardware manual

Installation AGR Series Stage Hardware Manual
2.2. Preparing the Mounting Surface
The mounting surface should be flat and have adequate stiffness in order to achieve the maximum
performance from the AGR. When the AGR is mounted to a non-flat surface, the stage can be distorted as
the mounting screws are tightened. This distortion will decrease the overall accuracy of the stage.
Adjustments to the mounting surface must be done before the stage is secured.
N O T E : To maintain accuracy, the mounting surface should be flat within 10 µm over the entire stage
footprint.
Figure 2-1: Results of Flat Versus Non-Flat Mounting
N O T E : The AGR is precision machined and verified for flatness prior to product assembly at the factory.
If machining is required to achieve the desired flatness, it should be performed on the mounting surface
rather than the AGR . Shimming should be avoided if possible. If shimming is required, it should be
minimized to improve the rigidity of the system.
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