Specifications

Quarterly Maintenance Procedures (page 1 of 3)
Advanced Dicing Technologies Ltd.
3.3-2
Quarterly Maintenance Procedures
(page 2 of 3)
Maintenance Technician Name: ________________________
Date: ________________________
Quarterly Maintenance Procedures
Examine Procedure & Specifications Passed
Cutting Chuck
Flatness
See Chapter 5.
The specifications are:
• 6 inch (150 mm) Chuck - 7 microns
• 8 inch (200 mm) Chuck -
10 microns
• 12 inch (300 mm) Chuck -
15 microns
Condition of the
Cutting Chuck
Inspect the condition of the Cutting
Chuck. Clean the Chuck:
• when dirt is apparent on the Chuck
or the underside of the Tape.
• when error messages associated
with the Cutting Chuck appear,
and other potential causes have
been ruled out.
Use ultrasonic cleaning equipment and
purified water for cleaning. Use an
Arkansas Stone to finely abrade the
surface and remove small protrusions.
Clean the underside of the Chuck by
blowing an alcohol-air mixture, then
blow with dry air until the Chuck is
completely dry.
Parallelism of the
Spindle to the X Axis
See Chapter 5.
The specification is 5 microns.
Spindle Runout (radial
& axial)
See Chapter 5.
The specification is 1 micron.