Installation guide

Graphical User Interface
Advanced Dicing Technologies Ltd.
2.2-34
Sensors
The following sensors are listed under Sensor Calibration (see
Figure 2-10):
• Main Air Sensor
• Wafer Holder Vacuum Sensor
• Chuck Holder Vacuum Sensor
• Theta Vacuum Sensor
• Theta Air Sensor
This section is designed for use by version 4.5.2 or later.
Figure 2-10: Calibration Workbook: Sensor Calibration