Installation guide

ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Manual Inspection Parameters
P/N 97100-9002-000-14 Ver 06/05
A-41
Manual
Inspection
Coaxial
Illumination Before
Cut
Defines the Coaxial illumination intensity for the
inspection that is done before the cut. (This parameter
value is inserted manually).
Possible Values:
min = 0, max = 255, Default = 0
Manual
Inspection
First Cut No.
Possible Values:
min = 1, max = 999, Default = 1
Manual
Inspection
Focus on Kerf
Step After Cut
Defines what focus settings are used for manual
inspection after cut. The focus setting are taught at
the Teach Kerf Check stage for every step of Kerf
Check.
Options: 1 (Default); 2
Manual
Inspection
Focus on Kerf
Step Before Cut
Defines what focus settings are used for manual
inspection before cut. The focus setting are taught at
the Teach Kerf Check stage for every step of Kerf
Check.
Options: 1 (Default); 2
Manual
Inspection
Inspection Before
Cut
When set to Yes, enables performing inspection on a
cut map street prior to the cut.
Optional Values:
Yes, No (Default)
Manual
Inspection
Inspection Focus
Type After Cut
Defines the Z position for the inspection that is done
after the cut.
Possible Values:
Wafer (Default), Align, Kerf
Manual
Inspection
Inspection Focus
Type Before Cut
Defines the Z position for the inspection that is done
before the cut.
Possible Values:
Wafer (Default), Align, Kerf
Manual
Inspection
Last Cut No.
Possible Values:
min = 1, max = 999, Default = 1
Manual
Inspection
Oblique
Illumination After
Cut
Defines the intensity of Coaxial Illumination for the
Manual Inspection after cut.
Possible Values:
min = 0, max = 255, Default = 0
Table A-21: Manual Inspection Parameters
Category Parameter Description