Installation guide

ADT Model 7100 Semi-Automatic Dicing System Operations Manual
Special Features
P/N 97100-9002-000-14 Ver 06/05
8-1
8 SPECIAL FEATURES
This chapter describes the special features available for the Model 7100,
including:
• Load Monitoring, section 8.1.
• Multi-Language GUI, section 8.2
• Wafer Vacuum Check, section 8.3
• Open Loop Theta Accuracy Procedures, section 8.4
• Spindle Velocity, section 8.5.
• Focus Change, section 8.6
• Manual Inspection Illumination, section 8.7
• Daily Database Backup, section 8.8
• Theta Safety Limits on X-Axis, section 8.9
• Change of Length Unit Type, section 8.10