Installation guide

Height Procedures
Advanced Dicing Technologies Ltd.
7.3-6
contact Height, it can only be done when no Workpiece is present on the
Cutting Chuck.
To Perform Chuck to Height Device Delta Measurement:
1 In the Setup & Diagnostics Workbook, select Saw > Dicer > Height to
display the Height tools, as shown in Figures
7-2 or 7-3.
2 Click Chuck to Height Device Delta Measurement. The System
performs Chuck Height, followed by Button Height, then calibrates the
two values. When completed, the message "Button/Non-Contact
Height completed" appears in the Wizard.
7.3.3.1 Multi-Delta/Contact Calculations
To increase chuck to non-chuck delta measurement validity and increase
accuracy, several measurements can be performed and avaraged. This is
done by checking the delta several times and comparing the current result
to the previous one. The machine seeks two results that are within a
defined tolerance. After this is established, the machine calculates the
average of these two results and compares it to a second tolerance
parameter. This logic is also used when performing Sample blade
calibration, except that the calculated results are of the contact height and
not the delta.
To Enable Multi-Delta/Contact Calculations:
1 Access the Workbook Workspace by clicking in the main window
toolbar.
2 Select the Height category.
3 Define the following parameters as required:
• Number of delta measurement: 1 to 10 measurements
• Chuck to non-chuck init tolerance: this value defines the initial
tolerance between measuraments.
• Chuck to non-chuck tolerance: this value defines the calculated
avarage tolerance.
7.3.4 Sample Blade Calibration
Sample Blade Calibration is performed using a new Blade of known
diameter to set the benchmark spindle position value. This value is then
used during operation to determine the accurate exposure of the current
Blade when performing Process Height (e.g. using a high accuracy and
high magnification microscope).
Note: This procedure should be performed using a dressed blade (especially,
for the systems equipped with NCHD).