Your Resource for Advanced Dicing Solutions ADT 7100 Dicing Series Vectus/Fortis Model Types Operations Manual Software Version 5.6.
Customer Support Advanced Dicing Technologies Ltd. Advanced Technologies Center Haifa, Israel, 31905 Telephone: (+972)-4-8545222 Fax: (+972)-4-8550007 Confidential This information is the property of Advanced Dicing Technologies Ltd. Any reproduction, publication or distribution to a third party is strictly forbidden unless written permission is given by an authorized agent of Advanced Dicing Technologies Ltd. Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Record of Changes RECORD OF CHANGES Item New Part Number New Page Number Revision Date Comments P/N 97100-9002-000-14 Ver 06/05 iii
Safety First SAFETY FIRST Advanced Dicing Technologies Ltd. believes that the safety of personnel working with and around our Systems is the most important consideration. Please read all Safety information below before attempting to operate the System, and in the Maintenance Manual before attempting to perform any maintenance function. Warnings 1 Obey and follow all warnings and cautions given in the manuals.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Safety First Danger – Bodily Injury Hazard: Be careful not to drop any of the Covers while opening or closing them. Let go only once they are completely opened or closed. Failure to do so could cause bodily injury or damage to the Covers. Danger – High Pressure Water and Air Hazards: Observe standard operating procedures to avoid contact with High Pressure Air and Water, which can present hazards, especially to eyes.
Safety First displayed if the Spindle Cover is opened while an Axis is moving or when a bypass key is used. The Axes stop immediately and the spindle keep moving mechanically. The Spindle Interlock is automatically engaged while the Dicer is initializing, and disengaged when initialization is completed. In addition, the Spindle Interlock is disengaged whenever the System is powered down. The Model 7100 cannot be powered down while the spindle is rotating.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Safety First The Load/Unload Interlock can be locked and unlocked from the Dicer screen in the Setup & Diagnostics workbook. Access rights to this function can be restricted. For more information about the Setup & Diagnostics workbook, see Chapter 2. For more information about access rights and Access Levels, see Chapter 4. Note: Once the Unload button is pressed, the Load/Unload Interlock is unlocked and cover can be opened.
Before You Begin BEFORE YOU BEGIN This Manual Before you begin to work with the 7100 Dicing Series machine, please read this Manual. It explains how to work with the System, where and when to perform operations, and why to do them. Please be sure to read the section on Conventions. This section makes it easier for you to perform procedures and understand concepts by explaining the standards used in this Manual.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Contents at a Glance Contents at a Glance Chapter 1: Introduction Chapter 2: System Description Chapter 3: System Operation Chapter 4: Administration Chapter 5: Building Recipes Chapter 6: Dicer Procedures Chapter 7: Saw Procedures Chapter 8: Special Features Chapter 9: Configuration Options Chapter 10: Troubleshooting Appendices Index P/N 97100-9002-000-14 Ver 06/05 ix
Reference Documents Reference Documents • ADT Model 7100 Semi-Automatic Dicing System Maintenance Manual. It provides information and procedures to aid in the performance of preventative maintenance, as well as troubleshooting and repair procedures. • ADT Model 7100 Semi-Automatic Dicing System Large Area Option Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Conventions CONVENTIONS This section explains basic symbols and conventions used in this Manual. Symbols The following symbols have been inserted on the left hand side of the text in order to make it easier to perform procedures: Symbol Description Note: Information given in a note describes how the Model 7100 functions or provides a tip on how best to use it.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Abbreviations and Acronyms A Amps BBD Broken Blade Detector gf Grams of force GUI Graphical User Interface Hz Hertz (frequency) in. Inch in. Hg Inch of Mercury (vacuum pressure unit) kgf*cm Kilograms of force times lever length, in centimeters (torque unit) mil 0.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents TABLE OF CONTENTS Safety First ______________________________________ iv Before You Begin ________________________________ viii Conventions _____________________________________ xi Table of Contents ________________________________ xiii List of Figures ___________________________________ xix List of Tables __________________________________ xxv 1 2 3 INTRODUCTION ____________________________________ 1-1 1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents 4 5 3.1.1 Powering Up the System __________________________________________3.1-1 3.1.2 Powering Down the System ________________________________________3.1-3 3.2 Logging In _________________________________________ 3.2-1 3.3 System Initialization _________________________________ 3.3-1 3.4 Defining the Job ____________________________________ 3.4-1 3.5 Placing/Removing a Workpiece ________________________ 3.5-1 3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents 6 5.4.2 Monitoring the Cutting Process _____________________________________5.4-4 5.4.3 General and Angle Parameters _____________________________________5.4-5 5.5 Importing and Exporting Recipes ______________________ 5.5-1 5.6 Recipe Templates ___________________________________ 5.6-1 5.6.1 APC Standard Template ___________________________________________5.6-1 5.6.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents 7 8 6.5.4 Chopping ______________________________________________________6.5-4 6.5.5 Multi-Panel Alignment _____________________________________________6.5-4 6.5.6 Cut Depth Compensation _________________________________________6.5-11 6.5.7 Negative Index _________________________________________________6.5-11 SAW PROCEDURES _________________________________ 7-1 7.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents 9 10 8.8 Database Backup ____________________________________ 8.8-1 8.9 Theta Safety Limits on X-Axis _________________________ 8.9-1 8.10 Change of Length Unit Type __________________________ 8.10-1 8.11 Multi-Panel Bar Code _______________________________ 8.11-1 8.11.1 Activating the Bar Code Feature ___________________________________8.11-1 8.11.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Table of Contents Appendices ____________________________________________ A-1 The Model 7100 Glossary _____________________________________ A-1 Algorithms _________________________________________________ A-8 Cut Algorithms _______________________________________________________ A-8 Align Algorithms ______________________________________________________ A-9 Kerf Check Algorithm _________________________________________________ A-10 Bright Kerf A
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures LIST OF FIGURES Figure 1-1: Figure 2-1: Figure 2-2: Figure 2-3: Figure 2-4: Figure 2-5: Figure 2-6: Figure 2-7: Figure 2-8: Figure 2-9: Figure 2-10: Figure 2-11: Model 7100 ProVectus __________________________________ 1-1 Model 7100 External Parts at a Glance_____________________ 2-1 Model 7100 Series Front Panel __________________________ 2.1-1 Stop Button Parameters _______________________________ 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures Figure 2-8: Figure 2-9: Figure 2-10: Figure 2-11: Figure 2-12: Figure 2-13: Figure 2-14: Figure 2-15: Figure 3-1: Figure 3-2: Figure 3-3: Figure 3-4: Figure 3-5: Figure 3-6: Figure 3-7: Figure 3-8: Figure 4-9: Figure 4-10: Figure 4-11: Figure 4-12: Figure 4-13: Figure 4-14: Figure 4-15: Figure 4-16: Figure 5-1: Figure 5-2: Water Overflow Message______________________________ 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures Figure 5-14: Figure 5-15: Figure 5-16: Figure 5-17: Figure 5-18: Figure 5-19: Figure 5-20: Figure 5-21: Figure 5-22: Figure 5-23: Figure 5-24: Figure 5-25: Figure 5-26: Figure 5-27: Figure 6-1: Figure 6-2: Figure 6-3: Figure 6-4: Figure 6-5: Figure 6-6: Figure 6-7: Figure 6-8: Figure 6-9: Figure 6-10: Figure 6-11: Figure 6-12: Angle Tab Popup Menu ________________________________ 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures Figure 6-24: Figure 6-25: Figure 6-26: Figure 6-27: Figure 6-28: Figure 6-29: Figure 6-30: Figure 6-31: Figure 6-32: Figure 6-33: Figure 6-34: Figure 6-35: Figure 6-36: Figure 6-37: Figure 6-38: Figure 6-39: Figure 6-40: Figure 6-41: Figure 6-42: Figure 6-43: Figure 7-1: Figure 7-2: Figure 7-3: Figure 7-4: Figure 7-5: Figure 7-6: Kerf Check Workflow __________________________________ 6.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures Figure 7-18: Figure 7-19: Figure 7-20: Figure 7-21: Figure 7-22: Figure 8-1: Figure 8-2: Figure 8-3: Figure 8-4: Figure 8-5: Figure 8-6: Figure 8-7: Figure 8-8: Figure 8-9: Figure 8-10: Figure 8-11: Figure 8-12: Figure 8-13: Figure 8-14: Figure 8-15: Figure 8-16: Figure 9-1: Figure 9-2: Figure 9-3: Figure 9-4: Figure 9-5: 4" Spindle with Cooling Block _________________________ 7.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Figures Figure 9-17: Figure 9-18: Figure 9-19: Figure 9-20: Figure 9-21: Figure 9-22: Figure 9-23: Figure 9-24: Figure 9-25: Figure 9-26: Figure 9-27: Figure 9-28: Figure 9-29: Figure 9-30: Figure 9-31: Figure 9-32: Figure 10-1: Figure 10-2: Figure 10-3: Figure 10-4: Figure 10-5: Figure A-1: Spindle Holding Screws _______________________________ 9.2-5 Camera Holding Screws _______________________________ 9.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual List of Tables LIST OF TABLES Table 6-1: Table 2-1: Table 4-1: Table 4-2: Table 5-1: Table 5-2: Table 5-3: Table 6-1: Table 6-2: Table 7-1: Table 7-2: Table 7-3: Available Models of the 7100 Dicing Series ______________ 1.6-1 Light Tower States __________________________________ 2.1-6 Access Rights Color Codes __________________________ 4.2-1 User Interface Elements Access Color Codes ____________ 4.
K&S Model 7100 Semi-Automatic Dicing System Operations Manual List of Tables Table A-22: Table A-23: Table A-24: Table A-25: Table A-26: Table A-27: Table A-28: Table A-29: Table A-30: Model Processing Parameters ________________________ MHS Parameters ____________________________________ Material Handling System Parameters __________________ Override Parameters ________________________________ Shrinkage Parameters _______________________________ Teach Center _______________________________________ Tilted
ADT Model 7100 Semi-Automatic Dicing System Operations Manual 1 INTRODUCTION The Model 7100 Series is a semi-automatic dicing system, manufactured by Advanced Dicing Technologies Ltd. Semiconductor, glass, and plastic workpieces of all types can be automatically cut after the workpiece has been loaded by a user. Any part of the cutting process can also be performed manually by a user, if required. Each workpiece must be manually removed and cleaned after cutting.
Introduction 1.2 Standard Features The Model 7100 Series includes the following features: 1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual • 1.4 Exhibition Mode: This mode is intended for exhibition use and allows to operate the System without connecting to a water supply. For more information, refer to Appendix 5, "Exhibition Mode" of the Maintenance Manual.
Introduction Advanced Dicing Technologies Ltd.
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NA Standard Standard Standard Standard Standard N/A Optional Standard Optional Standard Optional Optional Optional Optional Optional High Cooling Water Separator Venturi Vacuum Pump Y Axis Linear Encoder Vacuum Sensor High Definition Vision System with x120 Magnification Vision Magnification x30 Vision Magnification x60, x240 Pattern Recognition System (PRS) with Vertical and Oblique LED Illumination Pattern Recognition System (PRS) with Vertical and Oblique (Ring) Halogen Illumination Load Moni
Optional NA NA CE Interlocks Tilted Spindle (0 to 15 degrees) Autoloader Handling System Optional Optional Optional ProVectus (2") NA NA Optional Fortis (4") Optional NA Optional ProFortis (4") Note: Not all the configurations can be upgraded on the customer’s site. P/N 97100-9002-000-14 Ver 06/05 1.6-3 Additional Models: Tilted Spindle, Autoloader, Large Area (for dicing 300 mm circular or 12"x9"rectangular workpieces) on the Pro-type machines, according to the above configurations.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual System Description 2 SYSTEM DESCRIPTION This chapter describes the Model 7100 Series elements. The first section describes the main subsystems (Front Panel, Dicer and Vision System). The second section describes the Graphic User Interface of the Model 7100 Series software.
System Description Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Main Subsystems 2.1 Main Subsystems 2.1.1 Front Panel The Front Panel is located on the front of the Model 7100 Series and includes the following controls and indicators: 1 2 3 4 Emergency Stop Power Indicators ON Button STOP/OFF Button 1 3 2 4 Figure 2-2: Model 7100 Series Front Panel 2.1.1.
Main Subsystems The ON button powers on the Components and the PC, which then starts loading the software. When the ON button is pressed, it lights. The STOP > OFF button stops the system operation (if pressed once) and shuts down the System (if pressed twice). To start the System up again, press ON and wait for the GUI screen asking for the User Password. This button enables the operator to immediately stop any activity in order to prevent self-injury or damaging the material.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Main Subsystems In systems with Autoloader, the Stop button behaves the same way as in a standard system. Upon Stop confirmation (the second press), the system becomes idle, while the Autoloader performs initiation. All buttons are disabled until the Autoloader initiation is completed.
Main Subsystems 2.1.2 • The AC Input light is lit to indicate presence of AC power in the System. • The 24 VDC light is lit when power is available in all outlets of the power supply. Dicer The Dicer is where Workpieces are aligned and then cut. 1 2 3 4 5 3 Cutting Chuck Vision System Cooling Block Spindle Unit Height Device 2 4 1 5 Figure 2-4: Dicer The Dicer includes the following main components and sub-components: 1 Cutting Axes a. X-Axis b. Y-Axis c. Z-Axis d. Theta Axis e.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Main Subsystems 2.1.2.1 Vision System The Model 7100 Series incorporates a high-performance Vision System that executes precise positioning of Workpieces for Alignment and Kerf Checking. 1 Camera 2 Microscope 3 Illumination Unit 1 2 3 Figure 2-5: Vision System The Vision System includes the following Components: 2.1.2.1.
Main Subsystems • Coaxial: Vertical illumination passing through the Microscope, generally used on silicon Workpieces, which have reflective surfaces. • Oblique: Surrounding illumination on the sides of the Microscope, generally used on Ball Grid Array (BGA) or metal Workpieces, which have diffusive surfaces. Illumination of the Workpiece intensifies the display of each pixel viewed using a range of 0-255, where 0 produces a very dark (black) display, and 255 produces a very light (white) display.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Main Subsystems Table 2-1: Light Tower States Red Yellow Green System State Off Off On The last workpiece is being processed (relevant for systems with Autoloader) Off Rapid Flash Off User interference required (operator call) Off Med Flash Wizard is displayed, operator action is required. Off Note: The Light Tower indicators may vary since they can be configured to meet individual customer requirements. 2.1.3.
Main Subsystems a. Open the main workspace Configuration screen. b. In the value column, next to the parameter Digit I/O, select: Yes. c. Click Save (see Figure 2-8). Figure 2-8: Enabling the Digital I/O PCB 2 2.1.4 Modify the buzzer wiring to accommodate the new feature.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2 Graphical User Interface When the software is launched, the following screen is displayed: Run Button Blade Indicator Stop Button Toolbar Menu Bar Activity Log Workspace Active User Field Gauges Dicer Status Indicator Figure 2-10: Model 7100 Series Opening Screen Each element of the main window is described in the following sections: • Menu Bar, section 2.2.1 • Toolbar, section 2.2.
Graphical User Interface 2.2.1 Menu Bar The menu bar in the main window contains seven menus, described on the following pages. 2.2.1.1 User Menu The User menu contains the following options: 2.2.1.2 System Init Initializes the System. Logout & Login Allows to log out the current user and log in a different one. Registration Defines new Users, their access level and password. Configuration Defines different system configuration options Calculator Provides access to an online calculator.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.1.3 Load Monitor Menu The Load Monitor menu contains the following options: Control Enables the user to specify upper and lower load limits. Load Displays graphs that represent the measured load on the Spindle during dicing. For more information about Load Monitor menu options, see Chapter 8. 2.2.1.
Graphical User Interface Blade Treatment 2.2.1.5 Enables the selection of Override or Dressing as the mode for Dressing a Blade. For more information, see Chapter 7. Dress on Dress Block Enables manual dressing procedure on the Dress Block. Applicable only if the system configuration includes a Dress Station. Change Dress Block Enables manual Dress Block replacement. Applicable only if the system configuration includes a Dress Station.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.1.6 Help Menu The Help menu contains the following menu options: Books Online Enables the User to open the soft copy of Model 7100 Series Operations Manual, Maintenance Manual, Pre-Installation Guide and the manuals for additional options (see Chapter 9). About Displays the version number of the Model 7100 Series software, DCE version and the Vision Card type (see Figure 2-11). Figure 2-11: Help/About Screen 2.
Graphical User Interface Load Monitor Workspace See section 2.2.10.5. Multiview 1, 4 or 12 Displays the current Kerf Check. Displays the last four models found. Displays up to 12 Kerf Checks. 2.2.2.1 Workbook Workspace See section 2.2.10.4. Blade Info/ Override/ Dressing Workspace See section 2.2.10.6 Help Loads the Operation Manual file.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.2.2 Manual Y Offset Starts the Manual Y Offset procedure. For more information, see Chapter 6. Auto/Manual Cut Verification Starts the Cut Verification process. For more information, see Chapter 6. Manual Kerf Check Starts the Manual Kerf Check process. For more information about Kerf Checking, see Chapter 6. Wafer Full/ Partial Cut Gives the user two options: Full Wafer Cut and Partial Wafer Cut.
Graphical User Interface 2.2.2.3 Additional Tools - Workbook Workspace In the Workbook Workspace, the toolbar contains the following additional buttons: 2.2.3 Save Saves the current parameters defined in Workbook Workspace. Cancel Cancels the last changes. Gauges The Gauges on the right side of the main window indicate the speed of the Spindle, current load on the Spindle, Blade Cooling Water and Spray indication, Main Air Inlet Pressure and Vacuum level on the Workpiece Holder. 2.2.3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.3.4 Wafer Holder Gauge Wafer Holder Gauge indicates the status of the wafer (substrate) Vacuum level. 2.2.3.5 Water Adjust The Water Adjust Gauge indicates the flow rate and spray of the cutting water and cleaning jets. Pressing the Water Adj. button activates the water flow. 2.2.4 Dicer Status Indicator The lower right section of the main window displays the status of the Dicer.
Graphical User Interface 2.2.5 Active User Field The Active User field displays the current recipe file name assigned to the loaded workpiece, and the operations performed, according to the recipe. 2.2.6 Activity Log The Activity Log is located in the lower left corner. It provides a history log of activities performed by the system. Figure 2-13: Activity Log Events that have scrolled off the display can be reviewed using the scroll buttons. 2.2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.8 Run Button The Run Button serves both as a control and an indicator while the system is in Auto Mode. 2.2.9 Ready The system is idle. Press the button to run the process. In Progress System is active. A process in progress. Paused Process paused. The machine stops at the end of the current kerf. Stop Button The Stop Button stops any activity in order to prevent self-injury or damaging the material.
Graphical User Interface If the Stop button is clicked, while the system is in Auto Run mode, the system finishes the current process and brings the workpiece to the manual unload station. The user is prompted to manually unload the workpiece. In order to return to the Auto Run mode, press Auto Run. The Stop button parameters can be defined under Cutting Block station (see Figure 2-14).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface • Video Workspace: Displays a real-time video image of the Workpiece on the Cutting Chuck. The Video Workspace also displays the Cut Map and the Wizards that guide the User through selected procedures. • Programming Workspace: Enables the User to create and edit Recipes assigned to Workpieces. • Workbook Workspace: Displays a set of operations and parameters used to prepare the System for operation.
Graphical User Interface 2.2.10.1 Main Workspace The Main Workspace is automatically displayed when the software is launched and can be redisplayed at any time by clicking the Main Workspace toolbar button. When selected, the Main Workspace displays the following: Figure 2-16: Main Workspace The Main Workspace displays an animated graphical representation of the Workpiece being processed in real-time. Advanced Dicing Technologies Ltd. 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.1.1 Top View Area The Top View area depicts the System stations from above, including the Workpiece (if present), Spindle, Blade and Camera. When cutting is performed, the Blade is shown moving across the surface of the Workpiece.
Graphical User Interface • Show Z view: Toggles the display of the Side View area (see section 2.2.10.1.2). • Show Cameras: Toggles the display of the Camera, Microscope, and Spindle with Blade in the Top View area. • Auto Switch Views: The System automatically switches between Main Workspace and Video Workspace when necessary, for example, after Manual Alignment is completed in Video Workspace and the User clicks Finish, the Main Workspace is automatically displayed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.1.2 Side View Area The Side View area depicts the Dicer from the side, showing the Dicer and Workpiece (if present). 1 Theta Table 2 Cutting Chuck 2 1 Figure 2-20: Side View Area When Process Height is performed, the Blade is shown being lowered to the surface of the Cutting Chuck before returning to its previous position.
Graphical User Interface 2.2.10.2 Video Workspace The Video Workspace is selected by clicking toolbar. Main Workspace Window (Reduced) Wizard/Model in the main window Field of View Illumination Controls Axes Controls Figure 2-22: Video Workspace The Video Workspace displays a real-time video image of the Cutting Chuck from the camera mounted on the Spindle. The area of the Video Workspace where the video image is displayed is called the Field of View (FOV).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface In other operation modes, the Video Workspace also contains additional tools for: 2.2.10.2.1 • Changing the type of Search Area used in the FOV • Teaching and finding models • Setting Auto Focus • Setting illumination intensity Field of View (FOV) The FOV displays real-time video images of the Cutting Chuck, as viewed by the active camera.
Graphical User Interface Reticle The Reticle consists of green crosshairs that are used to pinpoint a location on the part of the Workpiece displayed in the FOV. In addition, the horizontal line of the Reticle is used when teaching Alignment or performing Manual Alignment. The length of the lines of the Reticle can be adjusted by using the Guide Control (the central Display Control.) Teach Area The Teach Area is a blue box that is used when Teaching Alignment or Kerf Checking.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface Clicking on an axis button turns the coordinate value on the current axis into a reference point (zero) as shown in Figure 2-24. Figure 2-24: Zeroed Axis Buttons The Axis buttons turn blue and an "r" (reference) letter appears next to the Axis letter.
Graphical User Interface Click here to move 1 pixel up Y Axis X Axis Click here to move 1 pixel down Click here to move 1 pixel to the right Click here to move 1 pixel to the left Double-clicking any point in the FOV bring the FOV center to that point. Center-clicking moves the FOV center 1 pixel along the axes, depending on the zone clicked: Note: The axes can also be moved by typing in coordinates values and pressing Enter.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.2.3 Zoom Controls Note: The Zoom option is available only on machines that support a “Teli” camera type. Digital Magnification enables using digital zoom to improve system performance regarding alignment and accuracy. The Video Workspace contains the tools for setting magnification levels used to display, align and cut objects, according to specific needs.
Graphical User Interface After configuring the Zoom option, magnification can be set in the Video Workspace by using the following controls (see Figure 2-26): • Manually adjusting the Magnification/Zoom ComboBox control to x1, x2 or x4 • Clicking the +/- button in the video screen of the Video Workspace GUI Figure 2-26: Zoom Controls Note: During the Teach Align Mode Pre-Condition state, the user must choose the Magnification size.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface • Clicking the “ticker” up and down arrows next to the magnification value in the Video Workspace GUI. Figure 4: Using Digital Magnification 2.2.10.2.4 Illumination Controls The two Illumination Controls to the right of the FOV are used to adjust the following display values: The intensity of the Vertical (Coaxial) illumination used on the part of the Workpiece displayed in the FOV.
Graphical User Interface Wizard The Wizard tab displays step-by-step instructions for carrying out a selected procedure. Figure 2-1: Wizard Tab In the example given in Figure 2-1, the User would place the workpiece on the Cutting Chuck, and then click Finish. The buttons located beneath the Wizard are used to do the following: Aborts the current procedure. Reverts to the previous step in a procedure. Proceeds to the next step in a procedure. Instructs the System to complete the procedure.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface Model After the Teach procedure has been performed, the Model tab displays the Model that was taught. During Alignment or Kerf Checking, the Model tab displays the Model currently being searched. Figure 2-2: Model Tab 2.2.10.2.6 Main Workspace Window The Main Workspace Window provides a small representation of the Main Workspace, as described in section 2.2.10.1.
Graphical User Interface Figure 2-3: Main Workspace Window in Video Workspace The colors of the Indexes on the Cut Map reflect the following: 2.2.10.2.7 • Yellow (blinking): The Index currently being cut. • Green: Completed Indexes. • Red: Cuts that have failed. • Blue: Indexes waiting to be cut. • Yellow: Indexes that have been cut once but are waiting to be cut again, for example, Bevel cuts.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.3 Programming Workspace The Programming Workspace, selected by clicking in the main window toolbar, enables the User to create and edit Recipes assigned to Workpieces. Figure 2-4: Programming Workspace Selecting a Recipe in the Programming tree on the left of the Programming Workspace displays its properties on the right of the Workspace.
Graphical User Interface parameters for that category on the right of the Programming Workspace, as follows: Figure 2-5: Recipe Parameters Parameters are modified by double-clicking in the Value field and entering a value or selecting a value from a drop-down list. The buttons (tools) in the lower pane of the Programming Workspace enable the User to perform the following operations: • Add parameters to and delete parameters from a Recipe, for more details see Chapter 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface There are three workbooks, as follows: • Setup & Diagnostics workbook, see section 2.2.10.4.1. • Calibration workbook, see section 2.2.10.4.2. The User can open workbooks by selecting them from the Select Workbook drop-down list or using the Explorer-style tree on the left of the Workbook Workspace. 2.2.10.4.
Graphical User Interface Overflow Sensor In the Setup & Diagnostics tree, under Saw, the Overflow sensor is displayed. This sensor is intended to prevent the damage to the System due to the drain pan overflow, which may be caused by clogged drain outlet Figure 2-7: Overflow Sensor Indication If the drain pan becomes overflown, the indicator (see Figure 2-7) changes its color from gray to red, and an error message appears (see Figure 2-8).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.4.2 Calibration Workbook The Calibration Workbook enables the User to calibrate specific elements in the System.
Graphical User Interface Sensors The following sensors are listed under Sensor Calibration (see Figure 2-10): • Main Air Sensor • Wafer Holder Vacuum Sensor • Chuck Holder Vacuum Sensor • Theta Vacuum Sensor • Theta Air Sensor Figure 2-10: Calibration Workbook: Sensor Calibration This section is designed for use by version 4.5.2 or later. Advanced Dicing Technologies Ltd. 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface 2.2.10.5 Load Monitor Workspace The Load Monitor Workspace is selected by clicking window toolbar. in the main Figure 2-11: Load Monitor Workspace The Load Monitor Workspace displays load monitoring statistics from different perspectives. For a detailed description of this Workspace, refer to Chapter 8. 2.2.10.
Graphical User Interface Figure 2-12: Dressing Workspace Figure 2-13: Override Workspace Advanced Dicing Technologies Ltd. 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Graphical User Interface Figure 2-14: Blade Info Screen The Blade Info/Override/Dressing Workspace enables the User to start and stop Blade Dressing and displays information about the Blade Dressing procedure. Blade Dressing is performed to prepare a Blade for use, either using a Dressing Workpiece or by Override cutting. The Blade Info/Override/Dressing Workspace is described in section 7.4.3. P/N 97100-9002-000-14 Ver 06/05 2.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual System Configuration 2.3 System Configuration The Configuration Dialog box shown in Figure 2-15 enables the user to see what components are installed on the system. The user can update the system configuration if there are any changes (e.g. Height Device type change). Once configured, the System is aware of which features it is equipped with. To Configure the System: 1 From the User Menu, select Configuration.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Menu Navigation Chart 2.4 Menu Navigation Chart P/N 97100-9002-000-14 Ver 06/05 2.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual System Operation 3 SYSTEM OPERATION This chapter describes the Model 7100 operation in automatic and manual workflows and includes the following sections: • Powering Up and Down, section 3.1 • Logging in, section 3.2 • System Initialization, section 3.3 • Defining Jobs, section 3.4 • Placing/Removing Workpieces, section 3.5 • Model 7100 Workflows, section 3.6 • Stopping System Operation, section 3.7 • Log File, section 3.
System Operation Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Powering Up/Down Procedures 3.1 Powering Up/Down Procedures 3.1.1 Powering Up the System This section describes the procedure for powering up the Model 7100 at the beginning of a session. Once powered on, the Model 7100 can be run continuously. It only needs to be powered down in order to perform repair and maintenance procedures. For additional information about powering down the System, see section 3.1.2.
Powering Up/Down Procedures Restore dialog window that appears on the monitor screen after an abnormal shut down: Figure 3-1: Database Restore dialog window Checking the "Allow Database Restoration" checkbox enables the options of database restoration from backup. Note: After Power On, and before normal operation, it is recommended to warm up the system by running a simulated dicing session for thirty minutes.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Powering Up/Down Procedures 3.1.2 Powering Down the System Powering down is required to perform maintenance on the Model 7100. Powering down the System every night is not required. Note: It is recommended to stop System operation before initiating the power down procedure. To Power Down the System: 1 Press the Stop>OFF button.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Logging In 3.2 Logging In When the Model 7100 software is launched, the login dialog box is the first window displayed. The User Interface will not open unless a valid user name and password are entered. Figure 3-2: Login Dialog Box To Log into the System: 1 Select a name from the User drop-down list. 2 Enter the password in the Password field. Asterisks are displayed in place of each character.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual System Initialization 3.3 System Initialization Once the machine is powered up and the user has logged in, the user can initialize the system. When the System is successfully initialized, the green light is lit on the Dicer Status Indicator, in the lower right corner of the screen, as shown below: Figure 3-3: Dicer Status Indicator A red light indicates that the Dicer was not successfully initialized.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Defining the Job 3.4 Defining the Job Defining the job means defining specific recipe as active so that this recipe is assigned when the Workpiece is loaded. To Assign a Recipe From the Auto menu: 1 Select Define Job to display the following: Figure 3-4: Job Dialog Box 2 The name of the currently assigned recipe is displayed in the field in the upper left corner.
Defining the Job To Assign a Recipe From the Setup & Diagnostics Workbook: 1 Click in the toolbar to display the Setup & Diagnostics workbook. From the Setup & Diagnostics tree, select Saw to display the following: Figure 3-5: Assigning Recipe from Saw Screen 2 Double-click the Value cell for the Recipe parameter and select a Recipe from the drop-down list that appears in the cell. 3 Click Save Advanced Dicing Technologies Ltd. 3.4-2 . The Recipe becomes active.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Placing/Removing a Workpiece 3.5 Placing/Removing a Workpiece To Place a Workpiece on the Cutting Chuck in Auto Mode: 1 Click the Run button in the toolbar. 2 Place a Workpiece on the Cutting Chuck, following the Wizard instructions. 3 Close the Load/Unload Cover and click Finish in the Wizard.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Model 7100 Workflows 3.6 Model 7100 Workflows The workflows for operating the Model 7100 can be divided into two basic types: • Workflows for existing recipes • Workflows for new recipes The procedures included in the workflows are described in sections 3.6.4.1 through 3.6.4.6 3.6.
Model 7100 Workflows For additional information about Defining Jobs, see section 3.4. For additional information about Recipes, see Chapter 5 and Appendix 3. Run: Once the job has been defined, the System can be activated in Auto mode by clicking the Run button on the toolbar. From that point on, System operation is entirely automatic. The User only needs to intervene when changing a Workpiece or replacing the Blade.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Model 7100 Workflows 3.6.2 Auto Mode Workflow - New Recipe Additional steps must be added to the Auto mode workflow when cutting the first in a new series of workpieces (First Work).
Model 7100 Workflows Inspection Illumination: Teaching the Inspection Illumination for the best view of the workpiece inspected. This setting is used later during Manual inspection and Y-offset operations. For the instruction as to how to teach the Inspection Illumination, refer to section 8.7. Note: The above is correct for manual Mode Workflow as well Teach Focus & Illumination: Teaching the Focus and Illumination for the best view of the workpiece to be diced.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Model 7100 Workflows 3.6.3 Manual Mode Workflow When operating entirely in Manual mode (for example, when cutting a single Workpiece), the typical workflow is as follows: Define Job Place Workpiece on Cutting Chuck Align & Cut Workpiece Remove the Workpiece From the Dicer Each of these steps can be performed manually, using the commands available in the Manual menu or the toolbar icons. 3.6.
Model 7100 Workflows 3.6.4.1 Defining Jobs When defining jobs, the User selects a Recipe to be assigned to a Workpiece or series of Workpieces. The Recipe contains information about the Blade that will do the cutting, the Workpiece that will be cut and the algorithms and parameters that define exactly how the Workpieces are processed. 3.6.4.1.1 Assigning Recipes When a Workpiece enters the System it is assigned the default Recipe, unless a new Recipe is assigned using the Define Jobs procedure.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Model 7100 Workflows 3.6.4.5 Manual Alignment When performing Manual Alignment, the User operates the Vision System to precisely align a Workpiece for cutting. This includes using the Vision System to ensure that the Streets on the Workpiece are parallel to the Blades, as well as defining a Cut Position as a reference point. Proper Alignment is required in order to cut Workpieces accurately.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Stopping System Operation 3.7 Stopping System Operation System operation can be halted in different ways, depending on whether it is operating in Auto mode or Manual mode: • Emergency Stop, see section 3.7.1 • Stop/OFF Button, see section 3.7.2 • Pausing Process in Auto mode, see section 3.7.3 • Manual Stop, see section 3.7.
Stopping System Operation 3.7.3 Pausing a Process When running in Auto mode, System operation can be paused at any time by clicking the Run button in the toolbar. The button’s appearance changes to . This is useful when the User needs to suspend System operation for a moment in order to check a component or perform a quick inspection on the substrate. To resume System operation, click Run button again. The System resumes operation from the point at which it stopped. 3.7.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Log File 3.8 Log File The Model 7100 software generates a Log File that contains the main system events, the time of their occurance, their Attributes and values. The list of Events and Attributes is provided in Appendix 3. To access the Log File, select Log File from the Maintenance Menu.
Log File Time and Date Settings By default, the Time and Date setting for the current Log File is twelve hours backwards and twelve forward in relation to the current time (defined by the current OS time settings). Note: The user can view Log Files that are up to 1-year old. 3.8.1 Applying Log Filters The user can set a filter for the Events for viewing only the events of interest. Click the Filter button to open the Filter configuration screen (Figure 3-8).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Log File 3.8.3 Exporting Log Files Log data can be exported as two different file types: • *.mdb. The file will be exported according to the Time and Date data defined in the Log File, but ignoring the Event Filter. When this file type is used, the following folder and files are created: • Log - The Folder that contains the Log Files per day • GUI_DB.mdb - Database file • PERS_DB.mdb - Database file • LOG_DBfile name.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Administration 4 ADMINISTRATION Access Levels are categories that provide security by enabling the Customer to determine which personnel (Users) are authorized to perform specific activities, including the viewing and modification of parameters in the Model 7100 software. Each User is registered in the System as a member of a particular level (group).
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Access Levels 4.1 Access Levels There are five Access Levels. Four of these allow for User designation by the Customer, while the highest level ("ADT software eng.") is intended for ADT personnel only. The Customer levels in ascending order are as follows: • Operator: Users who only perform basic operating procedures.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Modifying Access Levels 4.2 Modifying Access Levels Users with read-write access to a parameter or software function can modify the access rights allowed to Users with a lower access level than themselves. The following can be modified: 4.2.1 • Process Program Parameters, section 4.2.1 • User Interface Elements, section 4.2.2 • Protected Mode, section 4.2.
Modifying Access Levels To Modify Access Rights to Parameters: 1 Double-click anywhere in the access rights columns of a grid row. The existing access rights for the row appear in a multi-colored bar, as follows: 1 Slider (blue) 2 Slider (orange) 1 2 Figure 4-10: Access Rights Bar 2 Drag the sliders to change the access rights for each User type. For example, drag the orange slider to the right to extend read only access to the Users defined as Technicians.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Modifying Access Levels Importing and Exporting Recipes: Users with read-write access can determine which Users can import and export Recipes by limiting access to the PP Import and PP Export buttons in the Import/Export section of the Programming Workspace.
Modifying Access Levels 2 The existing access rights for the selected element appear in a multi-colored bar, as follows: 1 Slider (blue) 2 Slider (orange) 1 2 Figure 4-12: Access Rights Bar 3 The type of access for each User is indicated by color, as follows: Table 4-2: User Interface Elements Access Color Codes Color Access Green User can operate the GUI elements inside the selected area and manipulate access rights to those GUI elements.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Modifying Access Levels 4.2.3 Protected Mode The Model 7100 software normally operates in Protected mode. The software prevents performing diagnostic operations. Switching to Unprotected mode enables such operations to be performed in the Setup & Diagnosis workbook, for example, on the flow of water to the Cooling Block. When working in unprotected mode, the responsibility passes from the software to the User performing the task.
Modifying Access Levels with access to unprotected mode but with no ability to modify the access rights of other Users to unprotected mode. Figure 4-15: Access Rights to Unprotected Mode 4 Press Enter on the keyboard, or click outside the area of the multicolored bar to save the modified access rights. Advanced Dicing Technologies Ltd. 4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Adding and Removing Users 4.3 Adding and Removing Users Administrators can add and remove Users using the Registration command in the User menu. Note: Registration is enabled only when an Administrator is logged in. This option is disabled for Users with other Access Levels. 4.3.1 Adding Users Administrators can add Users by performing the following procedure.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Building Recipes 5 BUILDING RECIPES Recipes are the settings, algorithms and parameters that control the operation of the Model 7100. Recipes can either be assigned to an individual Workpiece, or used by an unlimited number of Workpieces that share the same characteristics. Usually, Recipes are assigned to Workpieces at the beginning of the dicing process. For more information about assigning Recipes to Workpieces, see section 3.4.
Building Recipes • • The type of blade to be used for this recipe, including the size, exposure, and thickness. • The type of Workpiece, its shape and its dimensions. • The algorithms that control the operation of the System. • The Author (see Table 5-1) of the Recipe, the date it was created, and the date it was updated. Parameters: The parameters included in a Recipe contain the essential information for operating the System. Parameters are divided into categories.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Building Recipes Workflow 5.1 Building Recipes Workflow The workflow for building Recipes using the Model 7100 software is as follows: Create a New Recipe Define Recipe Properties Specify Recipe Parameters Figure 5-2: Building Recipes Workflow Each step in the workflow is described in the following sections. P/N 97100-9002-000-14 Ver 06/05 5.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Creating a New Recipe 5.2 Creating a New Recipe When first installed, the Model 7100 software contains the following Default Recipes: • APC Standard Template (for details, see section 5.6.1) • APC Loop Cut Template (for details, see section 5.6.2) • GPC Standard Template (for details, see section 5.6.3) • GPC Multi Die Size Template (for details, see section 5.6.4) • Standard Dressing Template (for details, see section 5.6.
Creating a New Recipe create a new Template Recipe that will be kept permanently, type "Template_" before the name of the recipe. 5 Click OK. The new Recipe is created based on the Recipe selected in Step 2, including all of its properties and parameters. When the save is complete, the new Recipe appears in the Programming tree. Note: Recipes cannot be renamed. The only way to rename a recipe file is to duplicate it and assign a new name to the copy. Advanced Dicing Technologies Ltd. 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Defining Recipe Properties 5.3 Defining Recipe Properties When a new Recipe is created, it inherits the properties and parameters of the Recipe that was used as a base or template for the new Recipe. The User can modify the properties of the new Recipe, which are as follows: Table 5-1: Recipe Properties Property Description Editable Name The name of the recipe. No Group The group to which the recipe belongs.
Defining Recipe Properties Table 5-1: Recipe Properties Property Description Editable Author The User Name of the creator of the Recipe. The creator is the person logged into the System at the time the Recipe is created (read-only). No Created The creation date of the Recipe (readonly). No Updated The date when the Recipe was last edited (read-only). No Comment Optional description field. Yes Cut The algorithm for cutting the Workpiece.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Defining Recipe Properties 2 Select the Recipe from the Programming tree. The properties for the Recipe are displayed on the right. Figure 5-4: Recipe Properties 3 Double-click the Value cell for each property in turn and enter a value or select a value from a drop-down list. Note: To add a descriptive comment to any Recipe, double-click the Comments cell and enter the desired text. 4 Click Save . The new Recipe is saved to the System.
Defining Recipe Properties 5.3.1 Defining Blade Properties The blade property of the Recipe specifies the name of the blade that is used to cut the Workpiece. The User can select a blade from the drop-down list in the Value field, as described in the previous procedure. Additionally, the User can view detailed properties about the blade and add new blades to the System. This section describes how the User can: 5.3.2 • Display the blade properties for the selected blade, section 5.3.2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Defining Recipe Properties A list of existing blades defined in the System is displayed in the upper pane. The properties of the blade selected in the upper pane are displayed in the lower pane, as follows: Table 5-2: Blade Properties Parameter Description Blade The name of the blade. Any name, up to 255 characters in length, can be entered. Blade Type The type of blade. Possible values: Regular, Bevel, Step.
Defining Recipe Properties 5.3.2.1 Changing Blades in a Recipe A blade assigned to the recipe can be changed by performing the procedure described below. To Change Blades: 1 Double-click the Value cell for the blade property to display a dropdown list arrow . 2 Click . The Blade Selection List appears. Figure 5-7: Blade Selection List 5.3.2.2 3 Select the desired blade. 4 Click Save . Defining New Blades A new blade can be added to the System by performing the procedure described below.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Defining Recipe Properties To Define a new blade: 1 Click once in the Value cell of the blade property to display a browse button . 2 Click the browse button Figure 5-8). 3 Select a blade that has the most similar properties to the blade you want to define. 4 Click Duplicate Blade. The Duplicate Blade dialog box appears. to display the Blade Properties screen (see Figure 5-9: Duplicate Blade Dialog Box 5.3.2.
Defining Recipe Properties 5.3.2.4 Deleting Blades Blades can be deleted from the System by performing the procedure described below. To delete a blade: 1 Select a blade from the list in the upper pane of the Blade Properties screen. 2 Click Delete blade to display the following message. Figure 5-10: Delete Blade Message 3 Click Yes. The selected blade is removed from the list in the upper pane and is no longer available as a selection for the Blade Recipe property in the Programming Workspace.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Specifying Recipe Parameters 5.4 Specifying Recipe Parameters When a new Recipe is created, it inherits the properties and parameters of the Recipe that was used a base or template for the new Recipe. The User can modify the parameters of the Recipe, as required. 5.4.
Specifying Recipe Parameters Table 5-3: Parameter Categories Parameter Category Description Air Defines the duration of the air puff used to release Workpieces from the Cutting Chuck. Align Defines how Alignment is performed. Align Model Contains the Kerf model options when the Align Kerf type models are used. Align Pos Defines the conditions under which Alignment is performed. Average Index Contains parameters required for Average Index calculation.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Specifying Recipe Parameters Table 5-3: Parameter Categories Parameter Category Description Loop cut Defines how to cut using repetitive patterns. Manual Inspection Defines the regularity of Automatic Inspection and the Inspection Illumination settings. Model Processing Contains parameters for special model processing models with a variation in gray levels. Multi-panel Contains parameters required for Multi-panel applications.
Specifying Recipe Parameters To Display Recipe Parameters: 1 Expand the Recipe in the Programming tree to display its parameter categories. 2 Select any parameter category in the Programming tree. The parameters for the Recipe are displayed in the Parameter Table in the upper right pane of the Programming Workspace, as follows: Figure 5-12: Recipe Parameters Note: The Parameter Table is automatically scrolled to the category selected in the Programming tree. 5.4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Specifying Recipe Parameters 5.4.3 General and Angle Parameters Certain parameters in a Recipe are defined for each angle to be cut in the Workpiece, while others are considered general because they apply to the Workpiece as a whole. Angle parameters appear in the Angle tabs, and general parameters appear in the General tab. Before specifying parameters, define the angles along which the Workpiece will be cut.
Specifying Recipe Parameters To Define New Angles: 1 In the Programming Workspace, right-click on any existing Angle tab to display the following popup menu: Figure 5-14: Angle Tab Popup Menu 2 Click Insert to display the following dialog box: Figure 5-15: PP Insert Dialog Box 3 Enter the desired angle and select whether to have the parameter tab for the angle added Before or After the parameter tab selected in the text box. 4 Click OK.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Specifying Recipe Parameters To Move Angle Tabs in the Parameter Table: 1 In the Parameter Table, right-click the tab to be moved to display the popup menu (see Figure 5-14). 2 Click Move to display the following dialog box: Figure 5-17: PP Move Dialog Box 3 Select the place to move the tab by selecting one of the parameter tabs displayed and then clicking After or Before. 4 Click OK.
Specifying Recipe Parameters 2 Click Change to display the following dialog box: Figure 5-19: PP Change Dialog Box 3 5.4.3.1.4 Enter the new angle, then click OK. The angle is redefined in the Parameter Table. The parameters defined in the tab remain the same as before. Angle Access Rights Users with read-write access can determine which Users can add, move and modify angles by limiting access to the popup menu (see Figure 5-14). For further information on limiting access rights, refer to Chapter 4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Specifying Recipe Parameters 2 In the Parameter area below the Parameter Tree, select a parameter category from the Category drop-down list, as shown below: Figure 5-20: Parameter Category List 3 Select a parameter from the Parameter drop-down list, as shown below: Figure 5-21: Parameter List 5.4.3.2.2 4 Click Add. The parameter is added to the Parameter Table with the default value for the parameter assigned.
Specifying Recipe Parameters To Modify Parameter Values: 5.4.3.2.3 1 In the Parameter Table, double-click the Value cell of the parameter to be modified. If the User can choose from among a list of preset values, a drop-down list with those values appears in the cell. Otherwise, a blinking cursor appears. 2 Select a value from the drop-down list or enter the value directly. Only values within the min and max range are valid. 3 Click . The new settings are saved to the Recipe.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Importing and Exporting Recipes 5.5 Importing and Exporting Recipes Recipes can be imported from other Systems or exported to other Systems, by using the network (if the System is connected to a network) or by using a diskette. This enables the same Recipe to be copied and used on multiple Systems.
Importing and Exporting Recipes 4 [optional] Change the name of the Recipe by entering a new name in the Change Recipe Name field, if required. 5 Click OK. The Recipe is exported to the selected System. Note: The exported recipe contains a file pecipe.mdb and a folder named "Blobs of recipe".
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Importing and Exporting Recipes 4 [optional] Change the name of the blades by entering a new name in the Change Blade Name fields, if required. 5 Click OK. The Recipe is imported into the System. Note: If the recipe/blade being imported already exists in the System, a dialog box is displayed to give the user two options: add the recipe/blade, changing its name, or replace the existing recipe/blade, with the new one being imported.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Recipe Templates 5.6 Recipe Templates As explained above, a new recipe is created by duplicating an existing recipe template file. This section contains the recipe templates of the Model 7100 and the cut maps based on these templates. All the Model 7100 templates have the Taught parameter (Align category) set to "Yes". The user can create a cut map (see Figures 5-24, 5-25, 5-26 and 5-27) in three steps given below: 5.6.1 1 Load a workpiece.
Recipe Templates Figure 5-24: APC Standard Cut Map 5.6.2 APC Loop Cut Template Angle 0 Angle 90 Parameters Work piece Shape Rectangular Work piece Size 100 x 100 mm Thickness 1 mm Blade 00777-6045-010-QIP Align type Manual Spindle speed 20 krpm Index 3 mm Sub index N/A Cut count 5 5 Cut speed 10 mm/sec 10 mm/sec Chop velocity 0.5 mm/sec N/A Loop From Ang.1 to Ang.1 Loop offset X=20mm Y=22mm Loop count 5 Depth 3 mm Advanced Dicing Technologies Ltd. 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Recipe Templates Figure 5-25: APC Loop Cut Map 5.6.3 GPC Standard Template Angle 0 Angle 90 Parameters Work piece Shape Circular Work piece Size 150 mm Thickness 0.635 mm Blade 00777-6045-010-QIP Align type Manual Spindle speed 20 krpm Index 18 mm Sub index N/A Cut count 5 6 Cut speed 6 mm/sec 20 mm/sec Loop offset NA Loop count NA Depth 3 mm 15 mm P/N 97100-9002-000-14 Ver 06/05 5.
Recipe Templates Figure 5-26: GPC Standard Cut Map 5.6.4 GPC Multi Die Size Template Angle 0 Angle 90 Parameters Workpiece Shape Circular Workpiece Size 150 mm Thickness 0.635 mm Blade 00777-4300-050-BLO Align type Manual Spindle speed 30 krpm Index 20 mm 20 mm Sub index 5 N/A 5 N/A Cut count 5 6 Cut speed 45 mm/sec Loop offset NA Loop count NA Depth 3 mm Advanced Dicing Technologies Ltd. 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Recipe Templates Figure 5-27: GPC Multi-Die Size Cut Map 5.6.5 Standard Dressing Template Angle 0 Angle 90 Parameters Workpiece Shape Rectangular Workpiece Size 75 mm Thickness 0.635 mm Blade 00777-4300-050-BLO Align type Manual Dress 75 mm Spindle speed Index Sub index Cut count Cut speed Loop offset Loop count Depth P/N 97100-9002-000-14 Ver 06/05 5.
Recipe Templates 5.6.6 GPC Dressing Template Angle 0 Angle 90 Parameters Workpiece Shape Rectangular Workpiece Size 100 mm Thickness 1 mm Blade 00777-4300-050-BLO Align type Manual Spindle speed 40 krpm Index 18 mm Sub index N/A 100 mm 15 mm N/A Cut count 5 Cut speed 30 mm/sec Loop offset NA Loop count NA Depth 3 mm Advanced Dicing Technologies Ltd. 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual 6 DICER PROCEDURES This chapter contains the instructions that deal with: 1 Workpiece Alignment, section 6.1 2 Cut Verification, section 6.2 3 Kerf Checking, section 6.3 4 Y-Offset, section 6.4 5 Special Cut Procedures, section 6.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment 6.1 Workpiece Alignment Alignment uses the Vision System to precisely align a Workpiece parallel to the Blade to ensure accurate cutting down the middle of each Street. The User has the option of choosing either Auto Alignment (performed automatically by the Pattern Recognition System - PRS) or Manual Alignment (performed by the User). In order to perform Auto Alignment, the System must first be taught Alignment.
Workpiece Alignment 6.1.1 Manual Alignment Manual Alignment is generally used when there are no eyepoints for Auto Alignment. It may also be used when making one or two cuts on a single Workpiece in order to test the results of a Recipe before it is put into use. Likewise, Manual Alignment is a part of the Teach Alignment procedure (see section 6.1.3.2).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment the location in the FOV. Adjust the Theta Axis, if required, by using the Z/T Axis Controls. Figure 6-2: Aligning the Reticle 4 Click Next. The Workpiece moves along the X-Axis until the left side of the Workpiece is beneath the microscope. (This distance is limited by the Area parameter in the Align category.
Workpiece Alignment To Define the Cut Position: 1 Use the X/Y-Axis Controls to move the Camera to the reference point. 2 Click Finish. The System automatically calculates and displays the cut map for that angle in the Main Workspace Window in the Video Workspace, according to the recipe parameters. Note: For APC algorithm the defined cut position is normally the point where the blade enters the Workpiece. For GPC algorithm, the defined cut position is anywhere in a center of a street.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment 6.1.2.1 Teach Index Note: Teach Index procedure for Street alignment type must be performed also to update the Align Index. This procedure is critical for the Street alignment type, because otherwise Teaching Alignment will not succeed. Teaching the Index defines the exact distance along the Y-Axis between each Street on a Workpiece. Once defined, each cut to be performed along a Street is called a Main Index Cut.
Workpiece Alignment 4 Scroll to the Index parameter and click the cell containing the value defined for the Index parameter. The Teach Parameter button in the lower right corner becomes enabled. Figure 6-5: Teach Parameter Button Enabled 5 Click Teach Parameter. The following message box is displayed: Figure 6-6: Teach Alignment Process Message Box 6 Click Update to modify a previously taught Index, or New to teach the Index for the first time.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment 8 Define a Cut Position (see section 6.1.1.2). At the end, click Finish. The following dialog box is displayed: Figure 6-7: Teach Index Process Dialog Box 9 Click Auto. Note: Click Auto if there are clearly visible models on the substrate. Clicking Manual enables the User to teach the Index manually as described in section 6.1.2.1.1. 10 Click Next. The Camera moves to the top of the Workpiece.
Workpiece Alignment flashes a score indicating whether the Model has been successfully found and displaying the index distance. Note: If a Model is not found, the System prompts the user to move to the next Model. After the fifth Index jump, the Camera moves to the bottom of the cut map (80% of the number of cuts defined in that angle) and attempts to locate the Model again. If the attempt is successful, the System calculates the remaining Index positions along the selected angle.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment Index is defined and flashed on the screen. The Update Parameters dialog box, shown in Figure 6-8, is displayed. 7 6.1.3 Click Yes. The new values for the Index and Align Index parameters are saved to the Recipe. Teach Alignment In order to perform Auto Alignment on a group of Workpieces that share the same Recipe, Alignment must first be taught to the System, using a sample of the Workpieces to be cut.
Workpiece Alignment 43 2 1 5 Street: Auto Alignment is performed by finding a Model (repeating pattern) along the Street. Align Index 2 1 3 2 1 2-Points: Auto Alignment is performed by finding two different Models at two pre-defined locations. The accuracy depends on the accuracy of the Manual Alignment taught. V-Street: Similar to the Street Align Type but performed on the vertical (Y) axis.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment Note: In order for the entire cut map to be copied from one cut to another, the following parameters must be identical in both cuts: • Index • Number of cuts Figure 6-9: Copy From Angle - Enhancement Parameters To Select an Align Type: 1 Click to display the Programming Workspace. 2 Expand the Recipe assigned to the Workpiece in the Programming tree, and select the Align parameter category of that Recipe.
Workpiece Alignment Figure 6-10: Selecting an Align Type 6.1.3.2 Performing Teach Alignment After the Align Type has been selected and the Index has been taught, Teach Alignment can be performed for each angle defined in the Recipe. The Teach Alignment procedure begins by setting the focus, zoom and illumination for the Vision System. Manual Alignment is then performed as described in section 6.1.1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment To Perform Teach Alignment: 1 Click to display the Programming Workspace. 2 Expand the Recipe assigned to the Workpiece in the Programming tree, and select any parameter category of that Recipe. The parameter table for the Recipe is displayed on the right. 3 In the parameter table, select the tab for the first defined angle. 4 Click Teach Align in the Program area of the lower right pane.
Workpiece Alignment 10 Select the confidence level for the Model. Note: Focus, Zoom and Illumination settings can be defined per Model. 11 Teach the Model by using the X/Y-Axis Control and the Guide Control to set the Search Area and Teach Window around the selected Model. Click Teach. A flashing message is displayed indicating that the Model has been successfully taught. To test the Model, click Find. Another flashing message is displayed if the Model was successfully found by the System.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment 6.1.3.3.1 Low Model Detection After the first low model is detected at the taught position, the system starts searching for the second model. If the search fails, the system performs an index spiral search (see Figure 6-12). 7 8 1 Small Spiral Search 6 2 Original Model 5 4 3 Figure 6-12: Spiral Search In case the Index spiral search fails, the system performs a directional search as shown below.
Workpiece Alignment spiral search starts from the model situated after the third model. The search ending positions are the same as for the second model. Note: The search for the second model is performed in the direction from the center to the edge and the search for the third model is performed from the edge towards the center. In case both directional spiral searches for the second model fail, the system starts the whole alignment procedure again, on the upper 1/3 of the wafer.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment directional search if needed. If the system still fails to find the second model, the fine (main) alignment procedure is repeated again on the lower 1/ of the wafer. 3 If finding the second model still fails, the whole fine (main) alignment procedure fails and the user assistance is required. For the second main model the procedure is similar. The directional search areas are limited by the align area of the wafer.
Workpiece Alignment sharp enough, the user can teach a sub-model (clear model not on the same street), which will be used to verify the main models’ thresholds. Normally, the system is set up to use models, where the threshold would not be lower than 80%. When teaching alignment for a workpiece with corrupted models, models with threshold set between 65% and 80% are used. These models require verification against the sub-model.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment Note: If no sub-models are taught, this algorithm is not performed even if the parameter Use Sub-model is set to "Yes". The low and sub-models are always found using the taught (low) threshold. Any score above it or equal to it is considered to be a success, so in these cases there is no use for this algorithm. The algorithm is performed as follows: 1 Find the main model as in the usual algorithm (no change for low models).
Workpiece Alignment For more information regarding the standard Multi-Panel option, see section 6.5.5. The new option “Choice of cutting angle by panel” enables cutting in such a manner as to always have the debris-laden water directed to the outside of the workpiece, away from the other panels. This option does not interfere with any other feature supported by the software. Figure 6-16 illustrates the concept of this new option.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment are added to a recipe as shown in Figure 6-17. Before running the Teach Align, modify the recipe with the new parameters as shown in Figure 6-17. Figure 6-17: Multi-Panel Teach Screen At the end of the teach process, there will be new tabs of angless, as shown in Figure 6-18. Figure 6-18: Multi angles View P/N 97100-9002-000-14 Ver 06/05 6.
Workpiece Alignment 6.1.4.1 Multi-Panel Bar Code Identification The new option “Choice of cutting angle by panel” can synchronize with bar code reading ability to enable naming each of the panels according to the bar code identified with it. The panel name will be displayed on the animated cut map. 6.1.4.2 Teach Alignment Multi-Panel Adaptations To adjust the Teach Alignment procedure in an existing recipe for a multipanel application, conduct the following steps: 6.1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment Figure 6-19: Model Options 6.1.5.2 Align Kerf Model The Align Kerf Model is a standard alignment model that can be selected from the model list. It allows detection of black streets on white background. These streets can be used as Main models or Sub-models (the Low model is always the die model). A model needs to be defined as an Align Kerf Model during every step of Teach Alignment procedure.
Workpiece Alignment the Processing Method for All Models parameter. This parameter provides the Vision with a capability to perform pre-processing for each model, i.e., sub, main, low. The following is a list of possible filter options: Horizontal Edge Filter - detects the horizontal edges of the model image by enhancing horizontal edges and removing the vertical ones. The recommended number of iterations is 1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment For example, in a ceramic application, the Close Morphology is usually the main filter with the number of iterations set to 5. The Smooth filter is added once to smooth the model image. Figure 6-20: Model Processing Filter Parameters 6.1.
Workpiece Alignment coordinate values. The system uses the first and second Cut Verify models to find their Y coordinates and Theta angle (see Figure 6-21). Figure 6-21: Rotational Shrinkage Parameters Setting the Yes/No parameter called "Shrinkage before cutting" to Yes allows the shrinkage algorithm to be fully activated prior to the cutting stage. 6.1.8 Average Index When the index in a part of the cut map changes, the system can be set up to calculate the average index.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment If the new calculated index is within the allowed tolerance, the cut map is updated according to it. If required, the calculated index can be expanded for the entire workpiece (see Figure 6-22). Figure 6-22: Average Index Parameters Note: The Average Index feature is applicable only for two-point alignment type. P/N 97100-9002-000-14 Ver 06/05 6.
Workpiece Alignment 6.1.9 Updating the Workpiece Alignment Once the workpiece alignment has been taught, and there is a complete cut map, the operator can use the Align Update tool in order to update the existing cut map as required without having to reteach the whole sequence. The Align Update tool allows the operator to choose which angle to modify and which angle to skip (leave as it is), should there be any changes to be done to the existing cut map.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Workpiece Alignment This window refers to a specific angle in the recipe.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Verification 6.2 Cut Verification Cut Verification is a procedure that checks the position of the verification model in order to define the next cut position and update the Cut Map created during Alignment. Cut Verification can be performed either automatically, as defined in the recipe, or manually, at any time during the dicing process to check the cut position and verify the Cut Map.
Cut Verification required cut position and updates the Cut Map created during Alignment. Refer to section 6.1.8 for more information on the Avarage Index feature. For information about setting the above parameters, refer to Chapter 5. When the Activate parameter is set to Yes, the System dices the Workpiece as normal until it reaches the cut specified in First Cut No. After that cut, the System finds the Model and revises the Cut Map, if necessary.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Verification In case the system fails to detect a cut verification model (X1 in the drawing below), it starts looking for a secondary cut verification model (X2 in the drawing below), jumping one index at a time. X1 X2 The next cut verification is performed according to the last X2 model found. The X2 position updates the Kerf Check coordinates according to the delta between X1 and X2.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking 6.3 Kerf Checking Kerf Checking uses the Vision System to inspect the Kerf to check the quality and position of the cut. This section describes the various Kerf Check functions available in the 7100 Series. 6.3.1 Kerf Check Glossary The following terms are used when describing Kerf Check functions: Alignment Center: The position of the center of the Street as taught during Teach Alignment (see section 6.1.3).
Kerf Checking black/white threshold. The system memorizes the number of checks per cut and the positions, on which it performs the Kerf Check later on. The Kerf Check is performed on each position, until the system passes a sufficient number of Kerf Checks or until the number of allowed fails is reached. The user should define the number of Kerf Checks per street and the number of check points, on which the Kerf Check is allowed to fail.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking Kerf Checks are performed at defined intervals throughout the cutting process. The workflow is as follows: Step 1: Cut n Streets: The number of Streets cut in Auto mode between Kerf Checks, where n is the number specified in the Rate parameter (Kerf Check category). Step 2: Cutting Process Pauses: When n Streets have been cut, the automatic cutting process pauses.
Kerf Checking angle. The Kerf Check has to be taught for the second angle before automatic Kerf Checks can be performed on that angle. Step 1: Cut n Streets Step 2: Cutting Process Pauses Step 3: Kerf Check Taught? Yes No Kerf Check Performed No Teach Kerf Check Step 4: Final Cut Reached? Yes Step 5: Move to Next Angle Figure 6-24: Kerf Check Workflow 6.3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking Figure 6-25: Kerf Check Measurements The distance between the red lines is the maximum Kerf width (Wmax in Figure 6-25) and the distance between the green lines is the minimum Kerf width (Wmin in Figure 6-25). The yellow line is the center of the Kerf. The results of each Kerf Check are displayed in the FOV.
Kerf Checking 6.3.4.1 Main Workspace Window The Main Workspace Window, in the top left corner of the Video Workspace, shows the cut map for the current Workpiece. Figure 6-26: Main Workspace Window Showing Kerf Check Results The Kerf Checks performed on each cut are marked by a small square. The color of the square indicates if the Kerf Check passed (cyan) or failed (red).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking Double-clicking on the Model displays a close-up of the Kerf in the Multiview of the FOV, which may help the User to understand why a Kerf Check failed. Note: The Model tab is described in detail in Chapter 2. 6.3.
Kerf Checking be selected from the main screen by activating the pulldown menu next to the Automatic Kerf Check button, as shown in Figure 6-28. Figure 6-28: Manual Kerf Check Screen This Manual Kerf Check option allows the user to manually adjust the kerf by moving the inner box and selecting the limit of the kerf. Another way of manually adjusting the kerf is by adding a numeric value to a new textbox titled Kerf Width. The inserted value changes the inner box according to the kerf paramters.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking 3 Add the Activate parameter in Cut Depth Compensation category. 4 Change the Activate option on the Cut Depth Compensation recipe list value to YES, as shown in Figure 6-29. Figure 6-29: Cut Depth Compensation value list There are two methods of conducting a Manual Kerf Check. The first one is selecting the Cancel option during dicing and stop the system after it had partially cut the Wafer.
Kerf Checking The Teach Kerf-Check procedure is carried out according to the following attributes: Pattern Type and Model Reference Position.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking Figure 6-31 below illustrates a user choosing a Reference Position: Lower Edge Model and Pattern Type: Kerf up during the Kerf Teach process. Figure 6-31: Pattern: “Kerf Up” with Reference Position: “Lower Edge” Other parameters relating to Kerf Checks are either optional or are automatically specified by the Teach procedure. For more information about Kerf Check parameters, see Appendix 3.
Kerf Checking including some of the Workpiece beyond the edges of the Kerf, as shown below: 3 2 4 1 1 Kerf (Black) 2 Search Area (Green) 3 Reticle (Green) 4 Teach Window (Blue) Figure 6-32: Teach Kerf Check 7 Set the value for Black/White threshold. (The threshold setting is located below the illumination setting windows on the right pane of the screen.) Note: When teaching the Kerf for angle 0 degrees, make sure it does not cross the Kerf of 90 degrees. 8 Click Teach. The first Model is taught.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking • Top Chip Area: The area of all chipping measured from WMin to WMax at the front of the Kerf (ddY). • Bot Chip Area: The area of all chipping measured from WMin to WMax at the rear of the Kerf (ddY). Select the Model tab on the lower left of the Video workspace to see the taught Model. 11 Click Next.
Kerf Checking Figure 6-33) in order to enable the user to set values for each step of the process. Figure 6-33: Two-step Kerf Check Parameter Table This feature was developed for the applications that deal with two-layer workpieces and one-edged Kerfs (section 6.3.7.5 provides an example). The Kerf Check can be performed in two steps: 1 Y-Offset Correction 2 Z-Compensation, according to the measured Kerf width. The two-Step Kerf Check is also referred to as One-Edge Model Z Compensation.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Checking Figure 6-34: Kerf Check Algorithm Options 6.3.7.1 Adaptive This option is intended to solve the issue of ink dots and dark areas situated close to the Kerf Areas. While performing Find Kerf, the system calculates the black/white threshold, disregarding the threshold data of the taught Kerf. Note: In case the Adaptive option is selected, the system performs Standard Kerf Check first.
Kerf Checking the current cut and not according to the taught one. All the Kerf Check tests are performed on the taught X-positions. 6.3.7.4 Advanced Only When this option is selected, the system performs Chipping Removal only. Use this option to measure the Kerf width (W-min) in order to define the YOffset correction if necessary. The system uses only the W-min and YOffset correction parameters set in the Kerf Check limit parameters of the recipe.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Manual Y Offset 6.4 Manual Y Offset The Manual Y Offset procedure teaches the System the difference in position between the Blade and the Microscope in the Y direction, enabling the System to make the necessary adjustments during the dicing process.
Manual Y Offset the center of the Workpiece within which the single cut can be performed. • Define Start Location from Edge: (Y Offset category) The distance from the upper and lower edge of the Workpiece towards the edge of the frame within which the single cut can be performed. Note: For information regarding adding parameters to a recipe, see Chapter 5. 6.4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Manual Y Offset 6.4.3 Y-Offset Reference Positions This feature enables Teaching the reference position (center, lower edge or upper edge) and the pattern type (middle, kerf up, kerf down, upper bar or lower bar) of each kerf model separately. Reference position refers to the part of the kerf model from which the Y coordinate result should be taken.
Manual Y Offset • If the previous cut was on the Dress Block, Y-Offset is performed on the Dress Block. • If there is no previous cut, the Y-Offset location is determined by Cutting Location parameter. Advanced Dicing Technologies Ltd. 6.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures 6.5 Special Cut Procedures This section contains instructions as to how to perform the special cut procedures, such as: 6.5.1 1 Partial Wafer Cut, section 6.5.1. 2 Sub-Index, section 6.5.2. 3 Loop Cut, section 6.5.3. 4 Chopping, section 6.5.4. 5 Multi-Panel Alignment, section 6.5.5 6 Cut Depth Compensation, section 6.5.6 7 Negative Index, section 6.5.
Special Cut Procedures The cut map and basic parameters for building sub-index recipes are given in section 5.6. Note: After a cut map is generated, with all main and sub-indexes, the saw dices from rear to front, regardless of whether the next index is a main index or a sub-index. 6.5.3 Loop Cut The Loop-Cut option enables the System to create a cut map, where the existing angles can be duplicated an unlimited number of times with fixed X/Y shift.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures 3 Define the Last Angle parameter. 4 Define the Number of repetitions parameter. 5 Set the X-shift value. 6 Set the Y-shift value. 7 Click Save. The User can create several loops in the same recipe. In this case, there should be an additional set of the Loop-Cut parameters for each loop. Note: Every loop is indicated by (idx)# in the left column of the recipe.
Special Cut Procedures Figure 6-39: Loop Cut Map 6.5.4 Chopping "Chopping” is cutting within the substrate, as opposed to the usual cutting that starts at the circumference. To use this feature, the User should specify the Chopping Z Start (default value is 20 mil/0.5 mm above the substrate) and the Chopping Velocity parameters. After the saw reaches the cut position in X and Y axes, it descends to the Chopping Z Start height and from there slows down to Chopping Velocity.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures This section contains the following features: • Create a Multi-Panel Recipe • Teach Multi-Panel Alignment • Angle Tabs • Multipanel Animation • Deleting an Angle/Panel • Multi-Panel Recipes with Loop Cuts • Changing a Multi-Panel Recipe to a Regular Recipe • Multi-Panel Cutting Sequences To Create a Multi-Panel Recipe 1 Open an existing recipe or template. 2 Select the Multi-Panel category.
Special Cut Procedures by the wizard. At the end of teaching process the following message appears: 4 Click Yes. Note: It is important to take into consideration, that the workpieces in the MultiPanel applications must be rectangular unlike most wafers. Figure 6-40 illustrates the alignment lines for the two alignment angles in a Multi-Panel application.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures 6 Click Yes. At this point the System performs automatic alignment of the reference panel. 7 Define the 0 degrees cut positions for all the panels. Note: The angles’ reference numbers and panel numbers appear in the lowerright corner of the video workspace. By default, after defining a cut position, the vision system returns to the first panel.
Special Cut Procedures In case one of the alignment models is not found, the System stops the process and an error message asking for manual help appears on the screen. The wizard gives four options as shown in Figure 6-41. Figure 6-41: Wizard - Model Not Found The User can now either find a model, or proceed with manual alignment, or skip alignment for this specific angle of this specific panel. 6.5.5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures 6.5.5.2 Multipanel Animation In the Simulation Workspace, the workpiece animation reflects the quantity and location of the workpieces on the Chuck, once the cut map has been built. 6.5.5.3 Deleting an Angle/Panel To Delete an Angle or Panel: 6.5.5.4 1 Right-click on the angle tab. 2 Choose Delete from the pop-up menu. The specific angle/tab is deleted.
Special Cut Procedures 6.5.5.6 Multi-Panel Cutting Sequences The Multi-Panel cutting sequences can vary depending on the users requirements. Table 6-2 shows the cutting sequences according to the combination of the three parameter values: • Cut per Panel • Alignment Algorithm • Optimize Order Table 6-2: Multi-Panel Cutting Sequences No.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Cut Procedures 6.5.6 Cut Depth Compensation When Cut Depth Compensation category is activated, the System automatically lowers or raises the Z-Axis to ensure a uniform cut width of mid-way between the limits specified by the Max Cut Depth, Max and Min Cut Width parameters. The System measures the width of the Bevel cut during a Kerf Check.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Saw Procedures 7 SAW PROCEDURES This chapter includes the topics related to: 7.1 1 Z-Axis Safety, section 7.1 2 Blade Expansion, section 7.2 3 Height Measurements, section 7.3 4 Blade Handling, section 7.4 5 Chuck Change, section 7.5 Z-Axis Safety To ensure the Z-Axis safety, the System defines the Z Height Movement, which is the lowest point that Z-Axis can travel while the X and Y Axes are in motion.
Saw Procedures Z-Axis Safety To set the Calibration Start Position: 7.1.4 1 Manually set the largest blade in use approximately 2 mm above the Chuck. (If the system uses more than one type of chuck, perform this step with the thickest chuck.) 2 In the Setup and Diagnostics workbook, select Dicer > Axes > Z. 3 Double-click Calibration Start Position. Teach is activated. 4 Click Teach. The Calibration Start Position is recorded as one of the possibilities for the Z Height Movement.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Expansion 7.2 Blade Expansion There are three blade expansion parameters that are set in the Setup & Diagnostics workbook to monitor blade expansion. To access the blade expansion parameters: • In the Setup & Diagnostics workbook, select Saw > Dicer > Cutting Block. The blade expansion parameters appear on the parameters list. The following is a list and explanation of the blade expansion parameters: • Max.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Height Procedures 7.3 Height Procedures The Height procedure is performed in order to determine the Cutting Chuck position along the Z-Axis. Figure 7-1: Height Procedure Height is performed by lowering the Spindle until the edge of the Blade makes contact with either the Cutting Chuck (Contact Height) or the Height Device (Button Height).
Height Procedures Process Height can be performed manually at any point during the cutting process. To Manually Perform Process Height: Pause the dicing process, exit to Inspection. Then, • Right-click on the spindle icon and select Height from the drop-down menu. or • From the Manual menu, select Services > Process Height. The System moves to the NCH station and lowers the Blade towards the Height Device. The System calculates the exact distance traveled.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Height Procedures Figure 7-3: Non-Contact Height Procedure Tools in GUI The user can configure the system to perform Height procedure upon every initialization by setting the Height After Init parameter to "Yes". This parameter, under Saw > Dicer in Setup & Diagnostics screen, determines whether to perform a Height procedure after saw initialization, regardless of the height rate value in the recipe. 7.3.
Height Procedures To Perform Button Height: 7.3.1.1 1 In the Setup & Diagnostics Workbook, select Saw > Dicer > Height to display the Height tools, as shown in Figure 7-2. 2 Click NCH/Button. The System lowers the Blade to the Height Device and calculates the exact distance traveled. When completed, the message "Contact Height completed" appears in the Wizard.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Height Procedures 10 Firmly tighten the upper C-clamp on the Mechanical Button housing. 11 In the Wizard in the Video Workspace, click Next and then Finish (according to the wizard). The System automatically performs a flatness check on the Mechanical Button and then performs the Chuck to Non-Chuck Delta Measurement procedure to calibrate the difference in height between the Mechanical Button and the Cutting Chuck.
Height Procedures contact Height, it can only be done when no Workpiece is present on the Cutting Chuck. Note: This procedure should be performed using a dressed blade (especially, for the systems equipped with NCHD). To Perform Chuck to Height Device Delta Measurement: 7.3.3.1 1 In the Setup & Diagnostics Workbook, select Saw > Dicer > Height to display the Height tools, as shown in Figures 7-2 or 7-3. 2 Click Chuck to Height Device Delta Measurement.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Height Procedures Sample Blade Calibration is performed at the factory and should be carried out after Spindle adjustment or replacement. Note: Since this procedure is very delicate, it has its own access rights setting. To Perform Sample Blade Calibration 7.3.5 1 Accurately Measure the blade diameter (e.g. using microscope.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7.4 Blade Handling This chapter describes the software and hardware procedures related to Blade functions for the 7100 Series. Note: Setting parameter values and selecting a blade per recipe are described in Chapter 5. The following topics are discussed in this chapter: 7.4.1 • Blade Information, section 7.4.1 • Blade Replacement, section 7.4.2 • Blade Dressing, section 7.4.
Blade Handling The Blade Information screen includes the following sections: 7.4.1.1 • Blade Exposure Chart/Wear Rate Chart, section 7.4.1.1 • Export Data Tab, section 7.4.1.2 • Blade Change Tab, section 7.4.1.3 • Blade Type Tab, section 7.4.1.4 • Blade Status Tab, section 7.4.1.5 Blade Exposure Chart/Wear Rate Chart In the upper half of the Blade Information screen, the User can toggle between a chart depicting Blade Exposure and a chart displaying information about the Blade Wear Rate. 7.4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling • Arrow-shaped cursor - click on a point in the graph to get the Cut Length and Blade Exposure values • Cross-shaped cursor - click and drag to zoom in • Arrowed Cross-shaped cursor - click and drag to move the zoomed graph The red line in the graph is the maximum Blade wear or minimum Blade exposure permitted, and the yellow line is a warning that Blade exposure has reached a critical level.
Blade Handling To Display the Wear Rate Chart: • If not already displayed, click Wear rate chart in the center of the Blade Information screen. Figure 7-8: Wear Rate Chart Note: The Wear rate chart button is only enabled when the Process Height procedure has been performed at least once. The graph displays the Blade wear versus the cut length. A straight horizontal line indicates that the wear rate is consistent, whereas peaks stand for high wear within short distance. 7.4.1.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7.4.1.3 Blade Change Tab The Blade Change tab is selected in the lower half of the Blade Information screen. Figure 7-9: Blade Change Tab (2" and 4" Systems without BBD) Figure 7-10: Blade Change Tab (2" Systems with BBD) Note: The gauge in the Blade Change tab shows the tuning position of the BBD sensor (2” Spindle only). For further information, refer to BBD tuning, section 7.4.2.2.2.
Blade Handling 7.4.1.4 Blade Type Tab The Blade Type tab displays the properties for the currently mounted Blade, as follows: Figure 7-11: Blade Type Tab (Hub Blade) Figure 7-12: Blade Type Tab (Hubless Blade) Blade properties are described in section 5.3.1. 7.4.1.5 Blade Status Tab The Blade Status tab displays the following: Figure 7-13: Blade Status Tab • The Standard Diameter is the Blade diameter entered by the User in the Blade properties (see Chapter 5.) Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling • The Measured Diameter is the Blade diameter measured by the System during the Height Procedure. The measured diameter is a reference for the next Height procedure. This value is also displayed in the log window.
Blade Handling The colors in the Blade Indicator bar indicate the following: Green: Blade exposure satisfactory, cutting can continue. Yellow: Blade exposure critical, cutting can only continue for a short time. (The length of time is defined by the parameters in the Blade category of the Recipe, as described in Appendix 1.) Red: Blade requires changing, no cutting possible. The system provides the following indicators when Blade replacement is required: 7.4.2.2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling Securing Nut. This nut is intended for final locking the BBD in place after setting. The BBD adjusting is performed automatically during the Blade Replacement procedure, as described in section 7.4.2.3. The user needs to adjust it manually so the readout of the analog sensor is between 12 and 18.
Blade Handling To Replace a Blade: 1 Initiate the Blade Change procedure in one of the following ways: • Right-click the Blade Indicator and select Blade Change. • From the Manual menu, select Services > Blade Change. • In the Blade Change tab of the Blade Information screen (see Figure 7-9), click Change.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling The new exposure value is displayed once the process height is finished. Figure 7-16: Define Blade Screen 2 Open the Cooling Block by unscrewing the Thumbscrew and lifting it away from the Spindle. Figure 7-17: 2" Spindle with Cooling Block P/N 97100-9002-000-14 Ver 06/05 7.
Blade Handling Figure 7-18: 4" Spindle with Cooling Block 3 Attach the Spanner Tool onto the Torque Wrench and remove the Holding Nut in the center of the Spindle by turning the Spanner Tool clockwise. Note: [2" Spindle only] If the Holding Nut cannot be removed with the Torque Wrench, use the Hex Wrench (Allen Key). Note: Steps 4, 6 and 7 refer to 2" spindles only. 4 Pull up the silver Release Ring on the Blade Holder and place the Blade Holder over the Blade.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7 Insert the new Blade into the Blade Holder (the Blade must be face up). Figure 7-19: 2" Blade Holder 8 Install the new Blade onto the Spindle. 9 Replace the Holding Nut and tighten it with the Torque Wrench (if available) until there is a click. Note: For 2" spindles the Torque wrench is set to 2.2 Nm 10 Close the Cooling Block and tighten the Thumbscrew. 11 In the Define Blade screen, click OK.
Blade Handling 15 Lock the Middle Securing Nut. 1 2 3 1 BBD Travel Securing Nut 2 Middle Securing Nut 3 Adjustment Nut Figure 7-20: Tuning the BBD 16 Close the cutting cover. 17 Click Finish. The Blade Information screen is displayed. The System performs initialization. The Spindle starts rotating and the System performs a Height procedure. Note: It is recommended to perform manual Y Offset after changing the Blade. See Chapter 6 for details.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling This process updates the value of Chuck to NCH/Button Delta under Saw > Dicer > Cutting Blocks in Setup and Diagnostics screen. Note: It is recommended to perform a Chuck to Non-Chuck Delta Measurement procedure only with a blade that has been dressed or worked with. 7.4.3 Blade Dressing Blade Dressing is performed in order to prepare a Blade for use.
Blade Handling Table 7-1: Dressing vs. Override 7.4.3.2 Subject Dress Mode Override Use Usually used for performing Dressing on Dressing Block or Dressing wafers. Usually used for Dressing on production Workpieces. Setup Assign a cutting algorithm for a specific Workpiece, and specify standard cutting parameters. Suitable for any Blade. Blade Dressing parameters are defined for a normal Workpiece. Steps Unlimited Unlimited Increment Increment is gradual.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7.4.3.2.1 Creating a Dressing Program Note: Dress recipes are based on GPC concept except for defining cut positions. Once a new dressing recipe file is created, do the following: 1 Open the first recipe screen. 2 Define the wafer shape. 3 Define the wafer dimensions. 4 Define the wafer type (select either Dressing Wafer or Dressing Block). 5 Define the cut type as Standard Dressing.
Blade Handling 4 Set the After Change Treatment parameter to Dressing. 5 Open the Blade properties, double-click the Dress Wafer parameter and enter the filename of the dressing recipe described in section 7.4.3.2.1. Note: Dressing program does not create a cut map. 7.4.3.3 Performing Dressing Using the Override Option In this method of Dressing, a production Workpiece is used to dress the Blade during the actual cutting process.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7.4.3.3.2 Override Screen Information about Dressing using Override is displayed in the Override Screen. To Display the Override Screen • Click the Override button in the toolbar to display the following: Figure 7-21: Override Steps Screen Note: If the Override button is not displayed, click the arrow next to the Dressing/Blade Info button in the toolbar, and select Override to display the Override button.
Blade Handling 7.4.3.3.3 Override Manual Stop To Stop the Override Dressing Process Manually 7.4.3.4 1 Click the Override button in the toolbar. The following dialog box is displayed: 2 Click OK to stop the Override sequence or Cancel to resume override. Dressing with a Dressing Workpiece A Dressing Workpiece is a special substrate used only to dress the Blade in order to condition it for cutting.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling Table 7-3: Dressing Parameters Parameter Description Dressing Cut Depth The distance along the Z-Axis between the top of the Dressing Workpiece (or Dressing Block) and the cutting edge of the Blade in its cutting position. Dressing Index The distance along the Y-Axis between adjacent cuts in a Workpiece.
Blade Handling To Display the Dressing Screen: • Click the Dressing button in the toolbar to display the following. Figure 7-22: Dressing Screen Note: If the Dressing button is not displayed, click the arrow next to the Override/Blade Info button in the toolbar, and select Dressing to display the Dressing button. The graph at the top shows the relation between the cutting speed and the cut length for the Blade.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Blade Handling 7.4.3.4.3 Dressing Manual Stop To Stop the Dressing Process Manually 7.4.3.5 1 Click the Dressing button in the toolbar. The following dialog box is displayed: 2 Click Abort to exit the Dressing sequence or Retry to resume Dressing. Dressing on a Dressing Block Another way to perform Blade dressing involves the Model 7100 optional Dress Station.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Chuck Change 7.5 Chuck Change The Model 7100 can use various cutting chucks, designed for different production needs and applications. Chuck replacement can be carried out on-site and does not require ADT Field Service staff involvement. The chuck replacement procedure is performed in two steps, completed in the following order: 7.5.
Chuck Change 4 Follow the Wizard instructions. Click Next to install a new chuck or Finish to leave the current chuck. Note: After chuck replacement, set the Calibration Start Position according to the largest blade and the highest chuck. Note: It is recommended to perform the Chuck to Non-chuck Height procedure using a dressed blade. 5 Update the Auto-Focus on dicer chuck, as described in section 7.5.2 below.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Chuck Change To replace a Thick chuck with a Thin one Note: When physically replacing the chuck, ensure that the Theta table is clean. 1 Measure the thickness of the New and Old Chucks. 2 Access Z-Axis parameters: Workbook Workspace Axes > Z.
Chuck Change 6 Click on the field name Autofocus on Dicer Chuck to display the Teach button. 7 Click Teach. 8 Click Apply in the toolbar to apply the new settings for the current work session. 9 Click Save in the toolbar to save the new settings. Perform the camera adjustment procedure as described in section 8.1.1 of the Model 7100 Maintenance Manual. Advanced Dicing Technologies Ltd. 7.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Special Features 8 SPECIAL FEATURES This chapter describes the special features available for the Model 7100, including: • Load Monitoring, section 8.1. • Multi-Language GUI, section 8.2 • Wafer Vacuum Check, section 8.3 • Open Loop Theta Accuracy Procedures, section 8.4 • Spindle Velocity, section 8.5. • Focus Change, section 8.6 • Manual Inspection Illumination, section 8.7 • Daily Database Backup, section 8.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Load Monitoring 8.1 Load Monitoring The Load Monitor consists of a sensor that measures the electrical current of the spindle motor and provides the relevant statistics that represent the cutting behavior. 8.1.1 Load Monitoring with DC or AC Spindle If the system is equipped with a DC Spindle, the Load Monitor graph shows the change in current. The current is a function reflecting the spindle torque, i. e.
Load Monitoring The Load Monitor Workspace is divided into two graphs, the top measuring the Average Value per Cut and the bottom measuring the Raw Data. Figure 8-1: Load Monitor Workspace During Cutting 8.1.2.1 Average Value per Cut This graph illustrates the current Workpiece’s average load value for the last several cuts. The vertical axis measures the spindle current in Amps, while the horizontal axis displays the last several cuts.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Load Monitoring 8.1.2.2 Raw Data The Raw Data graph illustrates the load values during the cutting process. The vertical axis measures the spindle current value in Amps while the horizontal axis shows the progress of the current cut in seconds. This graph displays two lines, the Baseline Values and the Load Values. When cutting begins, the lower Raw Data graph displays the spindle current values for the current cut.
Load Monitoring Table 8-1: Parameters for Cutting 8.1.2.4 Parameter Name Parameter Description F Sp High AVG Limit The highest average load the Load Monitor allows until the response is triggered. F Sp Low AVG Limit The lowest average load the Load Monitor allows until the response is triggered. Load Monitor Baseline Parameters The Baseline is the load of the Spindle when the blade is not cutting. It includes the Spindle Idle Load and the drag force of the cooling water.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Load Monitoring To Access the Load Monitor Control Screen: • From the Load Monitor menu, click Control. The Control screen appears. Figure 8-4: Control Screen The Load Monitor Control screen contains the following features: • Sampling Period: The frequency of load sampling. This value is preset to sample every 100 msecs. It is recommended not to change this value. • System Overload: The maximum load value that Model 7100 can handle.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Language Selection 8.2 Language Selection The Model 7100 is supplied with an option to change the GUI language. The software supports one local language and English (default). To Activate the Feature 1 In the menu bar click User > Language. The Language local selection screen is displayed (see Figure 8-5). 2 Set one of the local languages to Yes. The system is now set up to support English and another pre-defined language.
Language Selection The active language is displayed in the Setup and Diagnostic workspace in both English and the local language (see Figure 8-6) Figure 8-6: Simplified Chinese GUI Advanced Dicing Technologies Ltd. 8.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Wafer Vacuum Check 8.3 Wafer Vacuum Check During initialization, the System checks if there is a Workpiece on the Chuck. The User can set exactly when this check takes place by setting the Vacuum Check Delay parameter. This parameter determines how much time in seconds elapses between the initial operation of the vacuum during initialization and performance of the check by the sensor.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Open Loop Theta Accuracy Procedures 8.4 Open Loop Theta Accuracy Procedures 8.4.1 Stress Release This function, when enabled, serves to follow the Theta axis motions and detect when the Theta axis exceeds the defined limits (see below).
Open Loop Theta Accuracy Procedures performing the Stress Release. The default value for this parameter is 3. Figure 8-7: Theta Align Stress Disabled Figure 8-8: Theta Align Stress Enabled 8.4.2 Theta Motion Replay While the system is being taught the Workpiece Alignment, it records every movement of the Theta axis. Once the Theta Stress Release is enabled, the system replays all the Theta motions, which had been taught for a specific workpiece, each time when performing angle move.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Open Loop Theta Accuracy Procedures changed angles, the Theta axis may perform slight movements for final correction of the new position. Note: Using this feature can significantly improve the Theta Axis accuracy. It should be used only with open loop Theta Axis (cable type). It is important to take into account, that Final Accuracy and Maximum no. of iterations settings depend on the camera magnification.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Spindle Velocity 8.5 Spindle Velocity The speed of the spindle rotation can be varied for different purposes. 8.5.1 Reduced Height Velocity When the blade descends to the NCHD, it creates "mist" between the prisms due to high-speed spindle rotation. This phenomenon reduces the NCH accuracy, or prevents the photoelectric cell from properly registering the moment when the blade crosses the ray.
Spindle Velocity 8.5.2 Reduced Vision Spindle Velocity This feature allows the user to set a different spindle speed to be used while the Vision Tasks (Inspection, Teaching Alignment, Auto/Manual Alignment, Kerf Teaching and Checking, Cut Verification) are performed. This feature is useful if the spindle vibration affects the image on the monitor. This may happen if the Blade and the Flange are not balanced.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Focus Change (Initial Focus Position) 8.6 Focus Change (Initial Focus Position) When the thickness of the Workpiece is changed after Alignment has been taught (for example, change in the tape thickness), instead of reteaching Alignment, there is a simpler and faster process of updating the Initial Focus Shift parameter (Align category). This parameter specifies a position of the Z-Axis that provides an acceptable default focus.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Manual Inspection Illumination 8.7 Manual Inspection Illumination To provide the best illumination for manual workpiece inspection, the user can pre-set the illumination parameters in the Manual Inspection category: • Coaxial Illumination After Cut - Defines the Coaxial illumination intensity for the inspection that is done after the cut.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Database Backup 8.8 Database Backup The system can be set to perform automatic backup of the database files, to prevent data loss. Once set, the system performs the automatic backup according to the set Frequency and Time, unless it is in the middle of any auto-cycle or manual operation. In this case, the automatic backup is postponed until the operation is completed. The default drive for the backup is drive D.
Database Backup 4 To perform the backup on a CD-RW, type the CD-RW drive (for example: E:\) in the Value line. If the user does not define the backup location, the system automatically saves the backup files on drive D:\. Figure 8-10: Backup Drop-Down List Advanced Dicing Technologies Ltd. 8.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Theta Safety Limits on X-Axis 8.9 Theta Safety Limits on X-Axis When the Height Theta Safety Zone in system configuration is set to Yes (see Figure 2-15), the following stations become enabled: • Theta Safety Right • Theta Safety Left Figure 8-11: Dicer Tree Note: Using this option requires a hardware change: additional hardware limit and a special double flag on the X-Axis.
Theta Safety Limits on X-Axis The axX values define the Right (see Figure 8-12) and Left (see Figure 813) X-limits respectively. Figure 8-12: Right X Limit Figure 8-13: Left X Limit The left limit is more critical for systems that use Autoloader option and square cutting chucks, because the frame/chuck can damage the curtain between the Model 7100 and the Autoloader. Advanced Dicing Technologies Ltd. 8.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Change of Length Unit Type 8.10 Change of Length Unit Type By default, all the length units used by the System are set in millimeters. The user can change the unit type to inches. To Change the Length Unit Type 1 Click to open the Workbook Workspace. 2 Select Setup and Diagnostics > Saw. 3 Under Saw parameters, double-click the Length Units parameter. 4 Select the desired option (mm/inch) from the drop-down menu.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Multi-Panel Bar Code 8.11 Multi-Panel Bar Code The Bar Code feature allows tracking and monitoring of parts that are being processed in the machine. It logs the part number that is either manually typed in or scanned by using a bar code scanner (not supplied). This feature allows the user to use the log file data in order to understand or track process parameters. This feature must be added to the current recipe before it can be uses. 8.11.
Multi-Panel Bar Code 8.11.2 Using the Bar Code Reader While performing an Auto-Run operation or Wafer-Cut operation, the Bar Code screen appears (see Figure 8-15.). Figure 8-15: Bar Code Dialog Box In the Lot column next to Panel 1, manually enter a number (the panel number is defined during the Teach Alignment procedure.) The system then automatically enters the same Lot number for the remaining three panels.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Configuration Options 9 CONFIGURATION OPTIONS This Chapter contains the descriptions and instructions for the following Model 7100 Series optional features: • Autoloader, see section 9.1 • Tilted Spindle, see section 9.2 • Dress Station, see section 9.3 • Wash Pipe, see section 9.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader 9.1 Autoloader The Autoloader option has been developed for the Model 7100 to meet the need for a system that automates the loading and unloading processes. This option enables the system to automatically load metal frames from a Cassette onto the Cutting Chuck, and later unload them from the Cutting Chuck back to the Cassette when the dicing procedure is complete.
Autoloader The Autoloader consists of the following components: • Mechanical Modules • Linear Arm (X Axis) • Elevator (Z Axis) • Finger (Y Axis) • Dry System • Cassette Compartment • Curtain • Utility and Electrical Compartment The Autoloader uses its mechanical modules to move frames from the Cassette to the Cutting Chuck and back. The entire load/unload procedure is handled automatically by the Autoloader. The user is required only to change Cassettes when necessary.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader Linear Arm moves into position, the Upper Dry System at the front of the Pick-Up Arm dries the top surface of the frame. 8 The Pick-Up Arm grabs the frame with its four vacuum cups and holds it while the Linear Arm returns the frame to the Autoloader. As the Frame passes over the lowered Curtain, the Lower Dry System attached to the Curtain dries the bottom surface of the frame. 9 The Linear Arm returns to its Load/Unload Station.
Autoloader Most Autoloader features are implemented in two dedicated Workbooks: MHS (see section 9.1.2.2), which monitors and controls the Pick-Up Arm, and CassComp (see section 9.1.2.1), which monitors and controls all other aspects of the Autoloader. In the User field two Status Indicators are added: Linear Arm status indicator. Cassette Compartment status indicator. Cassette Compartment Simulation Next to each Status Indicator there are three virtual LEDs: • Red: An error/failure exists.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader 9.1.2.1 CassComp Workbook Select CassComp from the Setup & Diagnostics tree to display the following: Figure 9-3: CassComp Workbook The CassComp screen enables the user to do the following: • • Initialize the Autoloader Parts: • Cassettes Compartment • Elrvator • Finger Perform a New Cassette Setup The CassComp section of the Setup & Diagnostics tree includes the following subsections: • Axes (see section 9.1.2.1.
Autoloader 9.1.2.1.1 Axes The Axes subsection of the CassComp section of the Setup & Diagnostics tree includes the following: • Elevator • Finger The Setup & Diagnostics screens for each axis are very similar. These screens enable the user to initialize the individual axes, perform self tests and manually position the axis at a specific location.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader In the lower right pane (identical for Elevator and Finger screens), the user can do the following: • Position the axis manually: Move the module along its axis in one of the following ways: • Click and hold one of the arrow buttons. Clicking the button between the arrows selects whether the slider moves fast (F) or slow (S), as defined by the Fast Velocity and Slow Velocity parameters in the upper pane.
Autoloader • Slow acceleration • Deceleration • Kill deceleration • Self test delay • LU - Finger Load/Unload station coordinate • Home • Finger safety position • Finger cassette slot 1 - Y-coordinate, to which the Finger moves to pick up the frame from the lowest slot Figure 9-5: Finger Screen Advanced Dicing Technologies Ltd. 9.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader 9.1.2.1.2 Cassette1 Select Cassette1 from the Setup & Diagnostics tree to display the following: Figure 9-6: CassComp > Cassette1 Workbook The upper right pane includes parameters that define the number of slots, and the pitch between the slots. It also contains the Dress parameter. The lower right pane displays the Cassette Compartment status. If the Dress parameter is set to Yes, the user should define the Dress frame.
Autoloader Select MHS from the Setup & Diagnostics tree to display the following: Figure 9-7: MHS General Screen In the upper left pane of the MHS main screen, the user can define the values of Dry system speed. In the Software Version 5.1 or later, the Top Side Dry Speed parameter can be added to a Process Program a number of times so that the workpiece is dried several times before it is placed back into cassette.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader • Initiate the MHS: Click MHS Init to initiate the the whole Material Handling System. • Initiate the Linear Axis: Click Linear Axis Init to initiate the Linear Axis. • Elevate or Lower the Curtain: • Click Close to elevate the Curtain. • Click Open to lower it.
Autoloader 9.1.3 • LU Dicer - the Linear Arm Load/Unload position coordinate for the Dicer station • LU Prealign - the Linear Arm Load/Unload position coordinate for the Prealign station Autoloader Operation This section describes the operation of the Model 7100 with the Autoloader, including the following topics: 9.1.3.1 • Loading and Unloading workpieces using the Autoloader (see section 9.1.3.1) • Running the Model 7100 with the Autoloader (see section 9.1.3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader 9.1.3.1.2 Manual Loading/Unloading from the Autoloader To Manually Load a Workpiece from the Autoloader: In the Main Load screen, click the Load button (see Figure 9-9). Figure 9-9: Main Load Screen To Manually Unload a Workpiece to the Autoloader: In the Main Unload screen, click the Unload button (see Figure 9-10). Figure 9-10: Main Unload Screen P/N 97100-9002-000-14 Ver 06/05 9.
Autoloader 9.1.3.1.3 Manual Loading/Unloading a Workpiece To Manually Load a Workpiece: Press Ctrl+L to neutralize the Autoloader and enable the Manual Load procedure. The Manual Load screen appears: Figure 9-11: Manual Load Screen To Manually Unload a Workpiece: Press Ctrl+R to neutralize the Autoloader and enable the Manual Unload procedure. The Manual Unload screen appears: Figure 9-12: Manual Unload Screen Advanced Dicing Technologies Ltd. 9.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader 9.1.3.2 Running the Model 7100 with the Autoloader The 7100-Autoloader model operates exactly as a regular Model 7100, except for loading and unloading frames automatically by the Autoloader. It is possible, however, to disable the Autoloader option and operate a 7100-Autoloader model as if it was a regular Model 7100, loading and unloading wafers manually. This option is described in section 9.1.3.4.
Autoloader 9.1.3.3 Loading Cassettes to the Autoloader Before the Autoloader can be operated, you must load a Cassette, as follows: To Load the Cassette: 9.1.3.4 1 Fill the Cassette with frames, as needed. Not all slots need to be filled in order to operate the Autoloader. 2 Open the Cassette Compartment Cover. 3 Place the Cassette on the Adapter (see Figure 16). Make sure that the two placement-pins at the bottom of the Cassette are fitted into the corresponding voids at the rear of the Adapter.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Autoloader The system notifies the user by • Displaying an error message • Flashing the yellow light on the Light Tower • Indicating the fault location by illuminating the appropriate virtual LEDs on the Model 7100 window. The system does not resume operation until the problem is corrected, following the steps outlined below. To Recover From a System Failure: 1 Remove the frame that was being processed at the time the failure occurred.
Autoloader 9.1.3.5.2 Recovery After a Severe System Failure A severe failure, such as the loss of air or water pressure, causes the system to immediately suspend operation. The system notifies the user by flashing the red light on the Light, but will not necessarily display an error message on the screen.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle 9.2 Tilted Spindle This option enables the System to cut wafers at any angle that falls between 0 and 15 degrees by changing the orientation of the Spindle and the Microscope. Proximity sensors, controlled by the software, detect whether the Spindle and the Microscope are correctly positioned at the selected angle.
Tilted Spindle 9.2.1 Changing the Spindle Angle in a Recipe Once the Spindle Angle is changed in the Setup screen, it should be changed in the relevant recipes. To Change the Spindle Angle in a Recipe 1 Locate the relevant recipe on the programming screen. 2 Select the Spindle Angle parameter under the Titled category and type the new Spindle Angle value (see Figure 9-15).
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle 9.2.3 Changing the Spindle Angle Changing the Spindle Angle on Model 7100 does not require powering down the System. Follow the instructions given in this chapter in order to perform the Spindle Angle change. It is important not to change the blade, while changing the Spindle Angle. If, for any reason, a new blade was installed, while changing the Spindle Angle, run Sample Blade Calibration before operating the System.
Tilted Spindle 4 Click Save. Figure 9-16: Setup Screen 5 In the wizard click Finish. The dicer moves to the Change station. The following message appears: 6 Use an 8 mm socket wrench to release the three Spindle holding screws shown in Figure 9-17. 7 Change the angle using the 8 mm socket wrench (keep rotating the tool until it reaches the stopper). Advanced Dicing Technologies Ltd. 9.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle 8 Secure the Spindle holding screws. 1 Spindle Holding Screws 1 Figure 9-17: Spindle Holding Screws 9 Release the Camera holding screws (see Figure 9-18) using 5 mm alien wrench. 1 Camera Holding Screws 1 Figure 9-18: Camera Holding Screws 10 Manually set the camera height by sliding the Camera downwards. 11 Secure the Camera holding screws. 12 Click Next in the wizard.
Tilted Spindle If one of the sensors detects that the Spindle or the Camera is at a wrong angle, no angle indicator illuminates and an error message is displayed (see Figure 9-19). Figure 9-19: Error Message 9.2.3.1 Changing the Spindle Angle From Tilted to Level Position To Change the Spindle Angle From Tilted to Level Position 1 Click on the Change button (see Figure 9-16). The dicer moves to the Change station.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle 5 In the wizard click Finish. The following message appears: 6 Use 8 mm socket wrench to release the three Spindle holding screws shown in Figure 9-17. 7 Change the angle using the 8 mm socket wrench (keep rotating the tool until it reaches the stopper). 8 Secure the Spindle holding screws. 9 Release the Camera holding screws (see Figure 9-18) using 5 mm alien wrench.
Tilted Spindle To Adjust the Spindle Angle 9.2.4.2 1 Release the three spindle holding screws. 2 Release the Spindle upper stopper lock. 3 Move the Spindle up or down, using an 8 mm socket wrench, so that it does not rest on the stopper. 4 Rotate the stopper clockwise to reduce the angle or counterclockwise to increase it. 5 Lock the stopper. 6 Rotate the adjusting screw until the Spindle reaches the stopper. 7 Secure the holding screws. Adjusting the Camera position.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle 3 Update this parameter value according to the mechanical change. 4 Click Save. 9.2.4.4 Tilted Spindle Stations Setup 9.2.4.4.1 Teaching the Chuck center To Teach the Chuck center 9.2.4.4.2 1 Open the Calibration screen. 2 Locate the Dicer station. 3 Manually bring the Camera to the Chuck center. 4 Click the Chuck Center parameter and then click Teach. 5 Click Save.
Tilted Spindle 9.2.4.4.4 Sample Blade Calibration Note: Before performing Sample Blade Calibration, update the Z Calibration start position according to the new Blade height. To Perform Sample Blade Calibration 9.2.4.4.5 1 Open the Blade screen. 2 Enter the current Blade diameter as the Sample Blade diameter. 3 Open the Height screen. 4 Perform Sample Blade Calibration. 5 Click Save.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Dress Station 9.3 Dress Station The Dress Station is intended to periodically clean and reshape the cutting blade in order to enhance the Kerf quality, without interrupting the cutting process, i.e.
Dress Station 2 In the Menu Bar click User > Configuration. Configuration screen appears. 3 Set the Dress Station value to Yes. 4 Click Save. Once the Dress Station is enabled, it can be setup in the recipes so that the System performs Blade Dressing as required by the process. Dressing procedure can also be run by the user regardless of the process program settings, by clicking the Dress Station arrow button and selecting Dress on Dress Block: 9.3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Dress Station The new Dress Station position parameters (see Figure 9-21) are automatically updated upon running the Changing Dress Block procedure.
Dress Station Once the Change Dress Block procedure is started, follow the Wizard instructions. Perform the following procedure when asked to physically replace the Dressing Block: To Replace the Dressing Block 1 Push the Clamp-Opening buttons as shown in Figure 9-22. The Clamps open. Figure 9-22: Replacing the Dressing Block 2 Slide the Dressing Block to the right and remove it from the Dress Station. 3 Slide in the new Dressing Block into the Dress Station. 4 Release the buttons.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Dress Station To Teach the Dressing Block Lower-left Corner Location 1 Manually bring the Camera over the Dressing Block lower-left corner. 2 Focus the Camera on the Dressing Block. 3 Click Finish in the Wizard. Running the Change Dress Block procedure updates the Dress Station parameters that are taught in the Dress Station setup screen. 9.3.
Dress Station For more information about specific parameters, see Table 9-1. Table 9-1: Dressing Block Parameters 9.3.4 Parameter Description axX Defines the Dressing Block upper-left corner position on the X-Axis axY1 Defines the Dressing Block upper-left corner position on the Y-Axis axZ1 Defines the Z-Axis height above the Dressing Block (focus). Y Safety From Boundaries Defines the distance taken from the Dressing Block holding clamps on two sides of the Dressing Block.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Dress Station The blade dressing on a Dressing Block can be performed in one of the two modes: 9.3.4.1 • Cut, see section 9.3.4.1 • Chop, see section 9.3.4.2 Cut Mode When the selected dressing mode is Cut, the recipe programming screen displays the relevant parameters: For detailed information about specific parameters, refer to Table A-13. 9.3.4.
Dress Station 9.3.4.3 Dressing Block Cut Mapping Once the Dressing parameters (see section 9.3.4.1 and section 9.3.4.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Wash Pipe 9.4 Wash Pipe The Wash Pipe is an optional feature that enhances the ability to clean the workpiece during or after cutting. The wash pipe is a metal pipe with spray nostrils that can be mounted on the Dicer as shown in Figure 9-25. Figure 9-25: Wash Pipe For the Wash Pipe mounting instructions refer to the Model 7100 Series Maintenance Manual.
Wash Pipe The washing mechanism is based on the Wash Pipe and a toggle move of the X axis between the two points - A and B (see Figure 9-26). The Wash Pipe can be retrofitted into an existing machine or installed at the factory. In order to enable the Wash Pipe, the corresponding option in the Model 7100 configuration screen should be set to Yes (refer to the following procedure). The Wash Pipe water supply works simultaneously with the Cooling Block.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Wash Pipe To Activate the Wash Pipe 9.4.1 1 Click User > Configuration. The Configuration screen appears. 2 Scroll down to the Wash Pipe. 3 Set the value to Yes. 4 Click Save. The Wash Pipe option is now active. Manual Operation The Wash Pipe feature can be activated manually, using the Wash Pipe icon (see Figure 9-29) in the GUI Toolbar. Once this icon is pressed, the washing procedure is activated.
Wash Pipe Figure 9-29: Wash Pipe Activation Icon 9.4.2 Model 7100 Vectus and ProVectus The Model 7100 Vectus/ProVectus standard configuration uses the standard Spray Bars. Optionally, the user can also enable the Wash Pipe option. Once the Wash Pipe option is enabled, the GUI displays a sensor or the water flow on both Spray Bars and optional Wash Pipe (see Figure 9-30). Figure 9-30: Spray/Wash Indicator Advanced Dicing Technologies Ltd. 9.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Wash Pipe 9.4.3 Model 7100 Fortis and ProFortis The optional Wash Pipe is not included in the Model 7100 Fortis/ProFortis default configuration, so the sensor is not connected to the System, and no GUI indication is provided (see Figure 9-31). Figure 9-31: No Water Flow Indicator However, the optional Wash Pipe can be installed on the Model 7100 Fortis/ProFortis as an option.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Troubleshooting 10 TROUBLESHOOTING The Model 7100 provides several options for troubleshooting problems that may occur while operating the System, including: • Error Message Information, Section section 10.1. • Recipe Problems, section 10.2 • Initializing the System, section 10.3 • Height Problem, section 10.4 • Database Restoration, section 10.5 • Camera Installation After Emergency Stop, section 10.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Error Message Information 10.1 Error Message Information Error messages, described in the Model 7100 Maintenance Manual, can be used to help diagnose problems that occur while operating the System. Each error message is divided by three fields: • Main Field • Details Field • Troubleshooting The user can identify the problem source using the data given in the Main Screen and the Details Screen.
Error Message Information Figure 10-1: Sample Error Messages Note: To view Troubleshooting, select the Troublehooting checkbox. To view the Error Details, select the Details checkbox. The Error Messages Browser, located at the bottom of the error message window, is useful when several errors occur simultaneously. Instead of having all of them display at once, the System enables the User to use the drop-down list to select the error message to display.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Recipe Problems 10.2 Recipe Problems If the system reports a recipe problem (e.g. missing model message), the user can try doing the following: • Check the recipe parameters. • Ensure that the active recipe and the workpiece on Dicer fit. If they do not fit, either redefine the job, or unload and reload the workpiece. • Reteach Alignment.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Initializing the System 10.3 Initializing the System When a problem occurs in the Model 7100, the user can try to solve the problem by re-initializing the System. This will often solve the problem and enable normal operation to resume. Before re-initializing the whole system, it is recommended to first try reinitializing a specific system component (see section 10.3.1), then the Dicer, and only if the problem persists, the whole system.
Initializing the System 3 From the Setup & Diagnostics tree, select Saw > Dicer to display the following: Figure 10-2: Subsystem Initialization Screen 4 Click Init Z initialize the Z-Axis. 5 Initialize the X, Y and T (Theta) axes by clicking the buttons provided. The X, Y and T axes may be initialized in any order. 6 Click Init Spindle to initialize the Spindle.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Height Problem 10.4 Height Problem If there is a problem with performing a Height process, and it can neither be solved by Blade Change, nor it is a hardware problem (the Height device is functioning properly), then try performing a sample Blade Calibration procedure. Note: Carefully read the instructions on how to perform this procedure. P/N 97100-9002-000-14 Ver 06/05 10.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual Database Restoration and PC Recovery 10.5 Database Restoration and PC Recovery If when powering up the system, the Database Restore screen is displayed, use the instructions given in section 3.1.1.1. All the 7100 Series machines starting from version 4.3 are supplied with an Image disc, providing a complete backup of the PC hard drives (including the database).
Database Restoration and PC Recovery Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Camera Installation After Emergency Stop 10.6 Camera Installation After Emergency Stop After using the Emergency Stop, the following message may appear: For correct and proper functioning of the System, follow the camera installation procedure given below: 1 Click No on the MIL DLL Message and Exit to Windows. 2 On the Desktop, right-click the My Computer icon and select Properties.
Camera Installation After Emergency Stop 4 In the Device Manager, double-click Imaging Devices. 5 Right-click on 1394 Digital Camera and select Uninstall. The Confirm Device Removal dialog box appears. 6 Click OK. 7 Close all the windows. 8 Right click My Computer icon and select Properties. System Properties window appears. Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Camera Installation After Emergency Stop 9 Select Hardware > Add Hardware Wizard. Add Hardware Wizard appears. 10 Click Next. Found New Hardware Wizard appears. Note: Make sure, that Install the software automatically (Recommended) check box is checked. P/N 97100-9002-000-14 Ver 06/05 10.
Camera Installation After Emergency Stop 11 Click Next. Hardware Installation dialog box appears. 12 Click Continue Anyway. 13 In the Completing the Found New Hardware Wizard window, click Finish. During the installation process, the Found New Hardware label appears in the Taskbar. Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Camera Installation After Emergency Stop Once the installation process is completed, the Completing the Add Hardware Wizard window appears. 14 Click Finish. 15 Close all windows. 16 Restart the computer. If Nothing Helps As in most computerized systems, not all the problems, which occur while running the Model 7100, are identifiable.
Camera Installation After Emergency Stop Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual If Nothing Helps 10.7 If Nothing Helps As in most computerized systems, not all the problems, which occur while running the Model 7100, are identifiable. If the steps, suggested in the Troubleshooting field of the error messages do not solve the problem, powering the system down and then back up can be a solution. 10.7.1 KMI and Database The Model 7100 software has two fundamental components: the KMI software and the Model 7100 Database.
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ADT Model 7100 Semi-Automatic Dicing System Operations Manual UPS Bypass 10.8 UPS Bypass The following procedure covers the situations of UPS battery Discharge or Failure. Caution: if the UPS is bypassed the PC may be damaged by a loss of power. This procedure defines the steps that should be taken to bypass the UPS in the 7100 Software. Caution: This process must be finished within 110 seconds. To Bypass the UPS in case of its Discharge or Failure 1 Verify that the Windows is UP. 2 Start the 7100.
UPS Bypass 8 In the Services screen, mark PowerMon II and click Stop (see Figure 10-4). The status changes from "Started" to " __ " (empty). Figure 10-4: Stopping the PowerMon II 9 Click Start in the Services window. 10 Change the Startup Type from Automatic to Disable (see Figure 10-5). Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual UPS Bypass 11 Click OK. Figure 10-5: Changing the Startup Type 12 Click the Dicing System icon in the Desktop to start the 7100 GUI and operate the machine. 13 After replacing the UPS, change the Startup Type (see step 10 and Figure 10-5) back from Disable to Automatic. 14 Click Start in the Services window (services control will pop up and the status will change from "_________" to Started). 15 Click Close to close the Service windows.
UPS Bypass Advanced Dicing Technologies Ltd. 10.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual The Model 7100 Glossary A APPENDICES This chapter includes the following appendices: • Appendix 1: “The Model 7100 Glossary” • Appendix 2: “Algorithms” • Appendix 3: “Recipe Parameters” Appendix 1: The Model 7100 Glossary Access Level Categories that permit or deny to Users the right to perform specific activities, view or change program specific parameters. Administrator The highest Access Level. See also Access Level.
The Model 7100 Glossary The characteristics of a particular Blade. Block A series of cuts which are defined in a recipe (0/1, 90/2, 90/3 etc). Button Height See Height. Channel Set of parallel streets. There are usually two channels (CH1 and CH2) on each Workpiece, located at 90-degree angles to each other. The Workpiece is completely cut in one channel and then the Cutting Chuck is rotated 90 degrees to enable cutting in the other channel. See Angle.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual (plural: Dice) That portion of a Workpiece which has been cut into a segment separate from the Workpiece. Die Model Reference eye-point used in two-point alignment. Downcut The Blade enters the Workpiece from the top and exits from the bottom. Dress To prepare a Blade for use by cutting it into a dedicated Dressing block in order to condition the Blade for cutting.
The Model 7100 Glossary 3 Non-Contact Height Secondary Device detects if the beam is obstructed by the Blade. 4 Chuck to Non-Chuck Delta Measurement measures the difference between Chuck Height and Button Height/NCHD. 5 Sample Blade Calibration, performed after Spindle adjustment or replacement, uses a new Blade of known diameter to set the benchmark Chuck position value, which is then used during operation to determine the accurate exposure of the current Blade by performing Chuck or Button Height.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Mixed The workpiece is cut in both directions, i.e. it is fed in the right-to-left direction at one index and left-to-right at the next index. Model (also known as eyepoint or fiducial) A set of points which constitute a pattern, located on the Workpiece, and used by the Vision System for locational and orientational referencing. See also Die Model and Align Kerf Model.
The Model 7100 Glossary Supplier ADT production personnel, field engineers and customer support personnel. Table Rotating platform on which a Workpiece is mounted and held in place by vacuum during processing. Teaching The System is taught Models. In Teach Alignment, the System is taught to find the center of the streets to be cut and in Teach Kerf Check, the System is taught which part of the kerf to inspect. Technician (formerly known as Keeper) Middle-rank Access Level.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual X-Axis X-Axis components move left and right. See also Axis. Y-Axis Y-Axis components move front and back. See also Axis. Y Offset The deviation of the Blade Center from the Camera/Vision System Center. Y Offset Correction Automatic compensation and correction for deviation of the Blade center from the Camera/Vision System Center. Z-Axis Z-Axis components move up and down. See also Axis.
Algorithms Cut Algorithms Appendix 2: Algorithms The Model 7100 software contains the algorithms described in the following sections. Each section describes an algorithm and the compulsory parameters that must be defined in order for the algorithm to function. For more information about the function of algorithms and selecting algorithms in Recipes, see Chapter 5. For a detailed description of each parameter, see Appendix 3.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Align Algorithms to cut regular round or rectangular Workpieces placed in the center of the Cutting Chuck. Standard Dressing The Standard Dressing algorithm is used to control the Blade Dressing procedure. It is used for both dressing Workpieces and dressing blocks. For more information about Blade Dressing, see Chapter 7.
Algorithms Kerf Check Algorithm Alignment to be performed, the Align Type parameter must be specified as Dress Manual Once. Note: The Full Dress Alignment algorithm is applicable only when using a dressing block or workpiece mounted on the Chuck as the dressing medium. Kerf Check Algorithm The Kerf Check algorithm controls the manner in which the System performs Kerf Checking on Workpieces. Kerf Checking can only be performed once the Teach Kerf Check procedure has been completed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Check Teach Algorithm • Type • Wafer Mounting Angle Tolerance Once the Full Teach Alignment procedure has been performed, some parameters are automatically generated and included in the Recipe, and default values assigned. These default values can be changed before performing the Alignment procedure. Kerf Check Teach Algorithm The Kerf Check Teach Algorithm controls the manner in which Kerf Checking is taught to the System.
Recipe Parameters Air Parameters Appendix 3: Recipe Parameters The Model 7100 software contains the parameters described in the following sections. Parameters are listed alphabetically by category. For information about how to specify parameters and adding parameters to Recipes, see Chapter 5.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Align Parameters Align Parameters Table A-2 lists the Align parameters available in the Model 7100. Align parameters are used to define how Alignment is performed. Table A-2: Align Parameters Category Parameter Description Align-Cut Sequence The sequence of the cutting process. Possible Values: Align, Align Cut, Cut (default): Align all angles and then cut all angles (A,AC,C).
Recipe Parameters Align Parameters Table A-2: Align Parameters Category Align Align Align Align Align Align Align Align Parameter Description Index Tolerance The permitted variation between the index found during Alignment and the index specified in the Recipe. Possible Values: min =.001, max = 900, Default =.01 Initial Focus-Shift The relative position of the Z-Axis that provides an acceptable default focus.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Align Parameters Table A-2: Align Parameters Category Parameter Description Main Model High Score (%) The threshold value after which the verification of the model is not required Possible Values: 50% - 100% Should be set to 70% Main to Sub model accuracy It defines the accuracy to accept low threshold model as a valid model based on the sub model. Possible values: 1 - 50 µm Default - 2 µm Maximum No.
Recipe Parameters Align Parameters Table A-2: Align Parameters Category Parameter Description Spiral-Index Search Width (Y) The width of the spiral search area outside the Index. When the System fails to find a Model, it makes a spiral search around the area. The parameter is defined per Angle. Possible Values: min = 0, max = 300, Default = 50 Align Street Index During the Teach Index procedure, this parameter is updated according to the Cut Index of the second angle.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Align Parameters Table A-2: Align Parameters Category Align Align Align Align Parameter Description Type The way Auto Alignment is performed. Defined per Angle. Possible Values: No (default): No Alignment is performed on the Workpiece. The center of the Cutting Chuck is used as a reference point or the previous taught alignment. Manual: The User must perform Manual Alignment.
Recipe Parameters Align Kerf Model Parameters Table A-2: Align Parameters Category Align Align Align Parameter Description Vertical Manual Alignment When a vertical Alignment Type is specified, whether manual Alignment is still horizontal. Possible Values: Yes, No (default) Verification Whether the Model 7100 should confirm Alignment by finding two Models to re-check Alignment accuracy. Possible Values: Yes, No (default) For Cree purposes this parameter should be set to Yes.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Auto Height Compensation Table A-3: Align Keft Model Parameters Category Parameter Description Align Kerf Model Kerf Model Processing Methods Defines the algorithm to be used. It works like sub indexes. Read the chapter describing each filter. Optional values: Close Morphology, Open Morphology, Vertical Edge Filter, Horizontal Edge Filter, Smooth Filter.
Recipe Parameters Average Index Parameters Average Index Parameters Table A-5 lists the parameters in the Average Index category. Table A-5: Average Index Parameters Category Parameter Description Average Index Active When set to Yes, the system calculates the Average Index between the Start Index and Stop Index and defined category Optional values: Yes, No (default) Average Index Extend When set to Yes, the system uses the calculated Average Index throughout the cut map.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Bar Code Parameters Table A-5: Average Index Parameters Category Parameter Description Average Index Start Index Defines the position, from which the system will start calculating the Average Index using the Cut Verify models. Units: Index Possible Values: min = 1, max = 5000, Default = 1 Average Index Stop Index Defines the position, from which the system will stop calculating the Average Index using the Cut Verify models.
Recipe Parameters Blade Parameters Blade Parameters Table A-7 lists the Blade parameters. Blade parameters are used to define the permitted wear of the Blade. Table A-7: Blade Parameters Category Blade Blade Blade Blade Blade Parameter Description After Change Treatment Whether to perform Dressing, Override or neither after a Blade Change. Possible Values: None (default), Override, Dressing Max Wear Rate The maximum amount the Blade can wear down within a specified cut length.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Depth Comp Cut Depth Comp Table A-8 lists the Cut Depth Comp parameters. The Cut Depth Comp parameters define values used as compensation when cutting with Bevel Blades. Table A-8: Cut Depth Comp Parameters Category Cut Depth Comp Cut Depth Comp Cut Depth Comp Cut Depth Comp Cut Depth Comp Cut Depth Comp Parameter Description Activate Whether to perform Cut Depth Compensation.
Recipe Parameters Cut Parameters Cut Parameters Table A-9 lists the parameters in the Cut category. Cut parameters define the way Workpieces are cut in the Model 7100. Table A-9: Cut Parameters Category Cut Cut Cut Cut Cut Cut Cut Parameter Description Chopping Velocity The speed of the Z-Axis (mm/sec) when performing a chop into a Workpiece. Usually performed with the Standard APC algorithm. Possible Values: min =.05, max = 2, Default =.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Parameters Table A-9: Cut Parameters Category Parameter Description Cut Cut Map Build Direction Defines the direction in which the Cut Map is built. Possible Values: Front to Back, Back to Front (default) Cut Map - X Shift Defines an offset in the X direction for determining the cut position used to draw the Cut Map.
Recipe Parameters Cut Parameters Table A-9: Cut Parameters Category Cut Cut Cut Cut Cut Cut Parameter Description Entry Overcut The distance for which the entry speed is maintained to ensure the Blade enters the Workpiece at the specified speed. Possible Values (µ/sec): min = 0, max = 30, Default = 0 Exit Overcut The distance the exit speed is maintained to ensure the Blade actually exits the Workpiece at the specified speed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Parameters Table A-9: Cut Parameters Category Parameter Description Overtravel The distance along the X-Axis that is added to the cut to ensure that all cuts begin from beyond the edge of the Workpiece. For APC, this distance is added only to the start cut. The cut length should compensate for this addition. For GPC, this distance is added to both X and Y. (See Overtravel - Y-Axis.
Recipe Parameters Cut Verify Parameters The following diagram illustrates the velocity and travel of the X-Axis during cutting: Speed Cutting Speed Cut Exit Speed Cut Entry Speed X Axis A B C Overtravel: Distance between A - B and D - F Overcut: Distance between A - C and D –F (A – C is cut at Entry speed. D – F is cut at Exit speed.) D E F Cut: Distance between C – D (Cut at Cutting Speed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Cut Verify Parameters Table A-10: Cut Verify Parameters Category Parameter Description Cut Verify Enables the verification of two models to be used for Average Index with Nominal Distance. Number of Models While performing the Average Index procedure with two models, the value of this parameter should be: 2 Optional values: 1 (default), 2 Rate The number of cuts between each instance of Cut Verification.
Recipe Parameters Cut Verify Limit Parameters Table A-10: Cut Verify Parameters Category Parameter Description Cut Verify X Pos The position on the X-Axis where Cut Verification is performed. This value is automatically specified. Possible Values: min = 0, max = 300, Default = 0 Cut Verify X Searches The number of places for which the machine will search. These points are taught in the “Teach Align” procedure. Y Pos The position on the Y-Axis where Cut Verification is performed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Diagnostisc Parameters Diagnostisc Parameters Table A-13 lists the parameters in the Dressing category. Dressing parameters define how the Blade is dressed.
Recipe Parameters Dress Block Parameters Table A-13: Dressing Parameters Category Dressing Dressing Dressing Parameter Description Dressing End Speed The speed of the X-Axis (mm/sec) at the end of the Dressing process. Possible Values: min = 1, max = 200, Default = 30 Dressing Index The distance along the Y-Axis between adjacent cuts in a Dressing Workpiece. Possible Values: min =.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Dress Block Parameters Table A-14: Dress Block Parameters Category Parameter Description Dress Block Cut depth to which the blade enters the Dressing Dress/Chop Depth Block as related to the Dress Station surface. Options: 0.1 - 5 mm. Default = 1 Dress Block Dress/Chop Rate Defines the number of wafer cuts, after which the System performs blade dressing. Options: 0 - 100 cuts. Default = 0 Dress Block Dress After a No.
Recipe Parameters Height Parameters Height Parameters Table A-15 lists the parameters in the Height category. Height parameters define the way the Model 7100 performs the Height procedure. Table A-15: Height Parameters Category Parameter Description Height Height Check Units The unit of measurement for height checks. Possible Values: Length, No of Cuts (default) Height Type Whether to postpone the Process Height procedure for the normal Blade.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Check Parameters Kerf Check Parameters Table A-16 lists the parameters in the Kerf Check category. Kerf Check parameters define the way the Model 7100 performs Kerf Checks, which examine the quality and position of cuts performed on a Workpiece. Table A-16: Kerf Check Parameters Category Parameter Description Active Enables/disables the Kerf Check function.
Recipe Parameters Kerf Check Parameters Table A-16: Kerf Check Parameters Category Parameter Description Last Cut No. The Street where Kerf Checking ends. Possible Values: min = 1, max = 999, Default = 999 The default value of 999 means Kerf Checking is performed to the last cut. Kerf Check Max. Failures per Cut The number of Kerf Check failures permitted per cut. If more than this number of Kerf Checks fail, the Recover option comes into play.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Kerf Check Limit Parameters Table A-16: Kerf Check Parameters Category Parameter Description Kerf Check Settling Time The amount of time the Workkpiece is allowed to dry before the Kerf Check begins. Possible Values: min = 0, max = 20, Default = 0.5 Kerf Check Whether the System checks the Model during a Kerf Check and uses the Model-to-Kerf distance to check the position of the cut.
Recipe Parameters Kerf Check Limit Parameters Table A-17: Kerf Check Limit Parameters Category Parameter Description Kerf Check Limit Head1 Center-To-Max Chip The maximum distance permitted from the center of the cut to the tip of the largest chip. Possible Values (mm): min = 0, max = 1, Default = 0 Head1 Correction DY Offset When the Kerf Check finds a dY Offset above this value, no automatic Y Offset correction is performed but an error is found.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Load Monitor Cutting Parameters Load Monitor Cutting Parameters Table A-18 lists the parameters in the Load Monitor Cutting category. Load Monitor parameters define the way Model 7100 monitors the electrical charge required to spin the Spindle and allow the blades to function for cutting. Note: Load Monitor Cutting Parameters apply to future versions of the Model 7100 only.
Recipe Parameters Loop Cut Parameters Loop Cut Parameters Table A-20 lists the parameters in the Loop Cut category. Loop Cut parameters define the way the Model 7100 cuts using the Standard APC algorithm and repetitive patterns. Table A-20: Loop Cut Parameters Category Parameter Description First Angle The angle where the loop starts. Possible Values (Pure): min = 0, max = 99, Default = 0 Loop Cut Last Angle The angle where the loop ends.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Manual Inspection Parameters Table A-21: Manual Inspection Parameters Category Parameter Manual Inspection Defines the Coaxial illumination intensity for the inspection that is done before the cut. (This parameter Coaxial Illumination Before value is inserted manually). Possible Values: Cut min = 0, max = 255, Default = 0 Manual Inspection First Cut No.
Recipe Parameters Model Precessing Parameters Table A-21: Manual Inspection Parameters Category Parameter Description Manual Inspection Defines the intensity of Coaxial Illumination for the Oblique Manual Inspection before cut. Illumination Before Possible Values: Cut min = 0, max = 255, Default = 0 Manual Inspection Rate Possible Values: min = 0, max = 255, Default = 124 Model Precessing Parameters Table A-22 lists the parameters in the Model Processing category.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual MHS Parameters MHS Parameters Table A-23 lists the parameters in the MHS (Material Handling System) category. Table A-23: MHS Parameters Category Parameter Description MHS Top Side Dry Speed This parameter defines how many times and at what speed the Top Side drying will be performed. Optional values: Min=1, Max=200, Default 50 Multi-Panel Parameters Table A-24 lists the parameters in the Multi-Panel category.
Recipe Parameters Shrinkage Parameters Table A-25: Override Parameters Category Override Override Parameter Description Override Length The total length of the cut when performing Override. Possible Values: min = 0, max = 200000, Default = 5000 Override Start Speed The speed of the X-Axis (mm/sec) at the beginning of the Override process. Possible Values: min = 1, max = 200, Default = 30 Shrinkage Parameters Table A-26 lists the parameters in the Rotational Shrinkage category.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Shrinkage Parameters Table A-26: Shrinkage Parameters Category Parameter Description Align Correction Verification When Yes is selected, and Align Correction is set to Yes, the system performs alignment using the cut verify models. Then the system performs verification using the Final Alignment Accuracy, defined under Align category (General tab).
Recipe Parameters Teach Center Parameters Table A-26: Shrinkage Parameters Category Shrinkage Shrinkage Parameter Description X Search Streets Defines the numbers of streets on which the system will perform a search if the model has not been found and the Y search also failed.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Tilted Spindle Parameters Tilted Spindle Parameters Table A-28 lists the parameters in the Tilted Spindle category. Table A-28: Tilted Spindle Parameters Category Parameter Description Tilted Spindle Tilted Spindle Angle Defines the Spindle tilt angle value. Options: 0 - 15 degrees. Default = 2 Tilted Spindle Y-Offset After Height Defines if the System is to perform Y-Offset after every Height procedure.
Recipe Parameters Y Offset Parameters Y Offset Parameters Table A-30 lists the parameters in the Y Offset category. The Y Offset parameters define how the Model 7100 performs the Y Offset procedure that measures the difference between the Blade and the Microscope in the Y direction. Table A-30: Y Offset Parameters Category Y-Offset Y Offset Y Offset Y Offset Y Offset Parameter Description Cutting Location Defines the Y-Offset location in cases where there is no previous cut.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Y Offset Parameters Table A-30: Y Offset Parameters Category Y Offset Y Offset Parameter Description Y Offset After Blade Change Whether the Y Offset procedure should be automatically performed after each Blade change.
Recipe Parameters Y Offset Parameters Advanced Dicing Technologies Ltd.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Index INDEX A Access Levels, 4-1, A-1 Administrator, A-1 modifying, 4.2-1 Operator, A-5 Protected mode, 2.2-4 Technician, A-6 Access Rights. See Access Levels Activate, A-23 Activate (Cut Verify) parameter, 6.2-1 Activate Dress Block Parameter, A-32 Activate Parameter, A-28 Activate Wash Pipe Parameter, A-47 Active User Field, 2.2-10 Activity Log, 2.2-10 Administration, 4-1 Administrator, 4.1-1, A-1 After Change Treatment, 7.
Index Hubless, A-4 Indicators, 2.2-10, 7.4-7 Information, 7.4-1 Wear, 7.4-2 Blade Angle Factor, A-23 Blade Change, 2.2-3, 3.6-7 BBD, 7.4-8 conditions, 7.4-7 detection, 7.4-7 procedure, 7.4-9 Process Height, 7.4-8 Blade Change procedure, 1.1-vi Blade Change Tab, 7.4-5 Blade Expansion, 7.1-2, 7.2-1 Blade Indicator, 7.4-7 Blade Indicators, 2.2-10, 7.4-7 Blade Parameters, A-22 Blade Replacement, 7.4-7 Blade Status Tab, 7.4-6 Blade Treatment menu options, 2.2-4 Blade Type, 5.3-5 Blade Type Tab, 7.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Index Die Model, 6.1-22, A-3 Display Controls, 2.2-20 Guide Control, 2.2-21 X/Y Axis Control, 2.2-20 Z/T Axis Control, 2.2-22 Downcut, A-3 Dress after a No. of Heights Parameter, A-33 Dress Cut Length Parameter, A-33 Dress Cutting Speed Parameter, A-33 Dress Length, 7.4-20 Dress Length Parameter, A-31 Dress Spindle Speed Parameter, A-33 Dress Station, 9.3-1, A-3 Configuring, 9.3-1 Dressing Modes, 9.3-6 Teaching, 9.3-2 Dress Station Setup, 9.
Index Help Menu, 2.2-5 High AVG Limit, A-39 I Illumination, 2.1-5 coaxial, 2.1-6 oblique, 2.1-6 Oblique (Ring), 2.2-25 Vertical (Coaxial), 2.2-25 Illumination Controls, 2.2-25 In Cut Map Only Parameter, A-48 In cut map only parameter, 6.4-1 Index (Align), A-10 Index (Cut) Teaching, 3.6-4, 3.6-6, 6.1-5 Index (Cut) Parameter, 6.1-6, 6.1-8 Index Parameter (Cut Category), A-26 Index Tolerance Parameter, A-14 Initial Focus, 8.6-1 Initial Focus Shift parameter, 8.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Index First Cut No. Parameter, A-41 Focus on Kerf Step Parameter, A-41 Inspection Before Cut Parameter, A-41 Inspection Focus Type After Cut Parameter, A-41 Last Cut No. Parameter, A-41 Oblique Illumination After Cut, A-41, A-42 Rate, A-42 Manual Kerf Check, 6.3-7 Manual Menu, 2.2-3 Manual Mode, 1-2, A-4 Workflow, 3.6-5 Manual Vertical Alignment Parameter, 6.1-9 Manual Y Offset, 3.6-7, 6.4-1 required parameters, 6.4-1 Material, 5.
Index P S Parameters, A-12 access, 4.2-1 adding, 4.2-2, 5.4-8 categories, 5.4-2 defining, 5.4-8 deleting, 4.2-2, 5.4-10 modifying, 5.4-9 Parameters for Cutting, 8.1-4 Partial Wafer Cut, 6.5-1 Pattern Recognition System, A-5 PC Recovery, 10.5-1 Perform Y-Offset in Step Parameter, A-36 Perform Z-Compensation in Step Parameter, A-36 Placing Workpieces, 3.5-1 Placing/Removing Workpieces, 3.6-6 Power Lights, 2.1-3 Powering down, 3.1-3 Powering up, 3.1-1 Pre Non Contact Height, 7.1-2 Process Height, 2.2-3, 2.
ADT Model 7100 Semi-Automatic Dicing System Operations Manual Index Theta Safety Limits on X-Axis, 8.9-1 Theta Tolerance Parameter, A-45 Thickness (Blade), 5.3-5 Thickness (Workpiece), 5.3-1 Tilted Spindle Changing the Spindle Angle in a Recipe, 9.2-2 Height Procedure Changes, 9.2-2 Mechanical Adjustments, 9.2-7 Y-Offset After Height Parameter, A-47 Tilted Spindle Angle Parameter, A-47 To Index, A-27 Toolbar, 2.2-5 Troubleshooting, overview, 10-1 Two-Step Kerf Check, 6.3-14 Type (Workpiece), 5.
Index Y Offset Parameters, A-48 Y Offset Reference Position Parameter, A-49 Y Offset, reference position, 6.4-3 Y Pos Parameter, A-30 Y Search Streets Parameter, A-46 Y Shift Parameter, A-40 Y-Axis, A-7 Y-coordinate, 6.4-3 Y-coordinate, reference position, 6.4-3 Advanced Dicing Technologies Ltd. Index-viii Z Z/T Axis Control, 2.2-22 Z-Axis, A-7 Z-Axis Return Height, 7.1-1 Z-Axis Safety, 7.1-1 Z-Axis Safety Position, 7.1-1 Zoom Controls, 2.2-23 Zoom, controlling, 2.2-24 Zoom, enabling, 2.
