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Agilent E5260A

8 Slot High speed Measurement Mainframe

Technical Overview

Introduction

The Agilent E5260A 8 Slot high

speed measurement mainframe is

completely user-configurable. You

can install up to eight single-slot

modules (such as the MPSMU), up to

four dual-slot modules (such as the

HPSMU), or any physically allowable

combination thereof.

Basic features

• Performs high-speed, dc parametric

measurements

• Eight slots for plug-in modules

• User interface allows spot mea-

surements to be made from the

front panel

• High-speed ADC present on each

installed SMU

• Ground unit up to 4 A

• BNC trigger-in and trigger-out

connectors

• 16 general-purpose digital I/Os

• Program memory

• GPIB port for instrument control

• Self-test, self-calibration, diagnostics

Measurement modes

The Agilent E5260A supports the

following measurement modes:

• Spot

• Pulsed spot

• Quasi-pulsed spot

• Staircase sweep

• Multi-channel sweep

• Pulsed sweep

• Staircase sweep with pulsed bias

• Linear search

• Binary search

Summary of content (8 pages)

PAGE 1
Agilent E5260A 8 Slot High speed Measurement Mainframe Technical Overview Introduction The Agilent E5260A 8 Slot high speed measurement mainframe is completely user-configurable. You can install up to eight single-slot modules (such as the MPSMU), up to four dual-slot modules (such as the HPSMU), or any physically allowable combination thereof.
PAGE 2
Hardware Specification conditions The measurement and output accuracy are specified at the module connector terminals when referenced to the Zero Check terminal under the following conditions: 1. Temperature: 23°C ± 5°C (double for 5°C to 18°C, and 28°C to 40°C if not noted otherwise) 2. After 40 minutes warm-up 3. Ambient temperature change less than ± 1°C after auto calibration execution 4. Measurement made within one hour after auto calibration execution 5.
PAGE 3
MPSMU (Medium Power SMU) Module Specifications Voltage range, resolution, and accuracy (MPSMU) Voltage range Force Measure Force accuracy1 Measure accuracy1 resolution resolution ±2 V 100 µV 100 µV ±(0.03 % + 900 µV) ±(0.03 % + 700 µV) ±20 V 1 mV 1 mV ±(0.03 % + 4 mV) ±(0.03 % + 4 mV) ±40 V 2 mV 2 mV ±(0.03 % + 7 mV) ±(0.03 % + 8 mV) ±100 V 5 mV 5 mV ±(0.04 % + 15 mV) ±(0.03 % + 20 mV) 1. ± (% of output/measured value + offset voltage) 2.
PAGE 4
Output terminal/connection: Triaxial connector, Kelvin (remote sensing) Voltage/current compliance (limiting) The SMU can limit output voltage or current to prevent damaging the device under test. Voltage: 0 V to ± 100 V Current: ± 100 pA to ± 200 mA Compliance accuracy: Same as the current (or voltage) set accuracy. MPSMU supplemental information Maximum allowable cable resistance (Kelvin connection): Force Line: 10 Ω (I ≤ 100 mA) Force Line: 1.
PAGE 5
Power consumption (HPSMU) Voltage source mode: Current (mA) 1000 Voltage range Power 2V 20 x Ic (W) 20 V 20 x Ic (W) 40 V 40 x Ic (W) 100 V 100 x Ic (W) 200 V 200 x Ic (W) Where Ic is the current compliance setting. Current source mode: 500 125 50 -200 -100 -40 -20 20 40 -50 Voltage compliance Power Vc ≤ 20 20 x Io (W) 20 < Vc ≤ 40 40 x Io (W) 40 < Vc ≤ 100 100 x Io (W) 100 < Vc ≤ 200 200 x Io (W) Where Vc is the voltage compliance setting and Io is output current.
PAGE 6
Functions Front panel operations Display • Display error messages • Display spot measurement set value • Display spot measurement result Keypad operations • Set GPIB address • Set local/remote mode • Select measurement channel • Set spot measurement set value • Start calibration/diagnostics MPSMU and HPSMU Measurement Mode Details Spot measurement mode Outputs and measures voltage and current. Staircase sweep measurement mode Outputs swept voltage or current, and measures dc voltage or current.
PAGE 7
Trigger I/O General Purpose Digital I/O Attached Software Trigger in/out synchronization pulses before and after setting and measuring dc voltage and current. Arbitrary trigger events can be masked or activated independently. 16 general-purpose digital I/O signals are available via a 25-pin DIN connector. These pins can be used as an alternative to the BNC trigger-in and trigger-out lines to synchronize the E5260A with other instruments.
PAGE 8
Other Agilent Products www.agilent.com www.agilent.com/find/msmu Agilent B2900A Series Precision Source/Measure Unit www.agilent.com/find/B2900A For more information on Agilent Technologies’ products, applications or services, please contact your local Agilent office. The complete list is available at: www.agilent.com/find/contactus Agilent B1500A Semiconductor Device Analyzer www.agilent.com/find/B1500A Agilent B1505A Power Device Analyzer/ Curve Tracer (40A/3000V) www.agilent.