E4980A Precision LCR Meter 20 Hz to 2 MHz E4980AL Precision LCR Meter 20 Hz to 300 kHz/500 kHz/1 MHz Data Sheet Fully compliant to LXI Class C specification
Definitions All specifications apply to the conditions of a 0 to 55 °C temperature range, unless otherwise stated, and 30 minutes after the instrument has been turned on. Specifications (spec.): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution, measurement uncertainties, and changes in performance due to environmental conditions.
Basic Specifications Measurement functions Measurement parameters • • • • • • • • • Cp-D, Cp-Q, Cp-G, Cp-Rp Cs-D, Cs-Q, Cs-Rs Lp-D, Lp-Q, Lp-G, Lp-Rp, Lp-Rdc1 Ls-D, Ls-Q, Ls-Rs, Ls-Rdc1 R-X Z-θd, Z-θr G-B Y-θd, Y-θr Vdc-Idc2 Definitions Cp Cs Lp Ls D Q G Rp Rs Rdc R X Z Y θd θr B Vdc Idc Capacitance value measured with parallel-equivalent circuit model Capacitance value measured with series-equivalent circuit model Inductance value measured with parallel-equivalent circuit model Inductance value measure
Table 1. Trigger delay time Range 0 s - 999 s Resolution 100 µs (0 s - 100 s) 1 ms (100 s - 999 s) Table 2. Step delay time Range 0 s - 999 s Resolution 100 µs (0 s - 100 s) 1 ms (100 s - 999 s) Measurement terminal: Four-terminal pair Test cable length: 0 m, 1 m, 2 m, 4 m Measurement time modes: Short mode, medium mode, long mode. Table 3. Averaging Range 1 - 256 measurements Resolution 1 Test signal Table 4.
Signal level Table 6. Test signal voltage Range Resolution Accuracy Normal Constant1 0 Vrms - 2.0 Vrms 100 µVrms (0 Vrms - 0.2 Vrms) 200 µVrms (0.2 Vrms - 0.5 Vrms) 500 µVrms (0.5 Vrms - 1 Vrms) 1 mVrms (1 Vrms - 2 Vrms) ±(10% + 1 mVrms) Test frequency ≤ 1 MHz: spec. Test frequency > 1 MHz: typ. ±(6% + 1 mVrms) Test frequency ≤ 1 MHz: spec. Test frequency > 1 MHz: typ. Table 7.
Measurement display ranges Table 10 shows the range of measured value that can be displayed on the screen. For the effective measurement ranges, refer to Figure 1. impedance measurement accuracy example . Table 10. Allowable display ranges for measured values Parameter Measurement display range Cs, Cp ± 1.000000 aF to 999.9999 EF Ls, Lp ± 1.000000 aH to 999.9999 EH D ± 0.000001 to 9.999999 Q ± 0.01 to 99999.99 R, Rs, Rp, X, Z, Rdc ± 1.000000 aΩ to 999.9999 EΩ G, B, Y ± 1.000000 aS to 999.
Absolute measurement accuracy The following equations are used to calculate absolute accuracy. Absolute accuracy Aa of |Z|, |Y|, L, C, R, X, G, B (L, C, X, and B accuracies apply when Dx ≤ 0.1, R and G accuracies apply when Qx ≤ 0.1 ) Equation 1. Aa Ae Acal Aa = Ae + Acal Absolute accuracy (% of reading value) Relative accuracy (% of reading value) Calibration accuracy (%) where G accuracy is applied only to G-B measurements. D accuracy (when Dx ≤ 0.1) Equation 2.
G accuracy (when Dx ≤ 0.1) Equation 5. Dx Bx Da f Cx Lx Bx + Da (S) Bx = 2πfCx = 1 2πfLx Measured D value Measured B value (S) Absolute accuracy of D Test frequency (Hz) Measured C value (F) Measured L value (H) where the accuracy of G is applied to Cp-G measurements. Absolute accuracy of Rp (when Dx ≤ 0.1) Equation 6. Rpx Dx Da ± Rpx±× Da Dx Da (Ω) Measured Rp value (Ω) Measured D value Absolute accuracy of D Absolute accuracy of Rs (when Dx ≤ 0.1) Equation 7.
Relative accuracy Relative accuracy includes stability, temperature coefficient, linearity, repeatability, and calibration interpolation error. Relative accuracy is specified when all of the following conditions are satisfied: • Warm-up time: 30 minutes • Test cable length: 0 m, 1 m, 2 m, or 4 m (Agilent 16047A/B/D/E) • A “Signal Source Overload” warning does not appear. When the test signal current exceeds a value in table 11 below, a “Signal Source Overload” warning appears. Table 11.
Q accuracy (when Q x De < 1) Q accuracy Qe is given as: Equation 10. Qx De Qe = ± (Qx2 × De) ± (1 Qx × De) Measured Q value Relative D accuracy θ accuracy θ accuracy θe is given as: Equation 11. θe = 180 × Ae π × 100 Ae (deg) Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B G accuracy (when Dx ≤ 0.1) G accuracy Ge is given as: Equation 12.
Example of C-D accuracy calculation Measurement conditions Test Frequency: Measured C value: Test signal voltage: Measurement time mode: Measurement temperature: 1 kHz 100 nF 1 Vrms Medium 23 °C Ab = 0.05% |Zm| = 1 / (2π × 1 × 103 × 100 × 10-9) = 1590 Ω Zs = 0.6 mΩ × (1 + 0.400/1) × (1 + √(1000/1000) = 1.68 mΩ Yo = 0.5 nS × (1 + 0.100/1) × (1 + √(100/1000) = 0.72 nS C accuracy: Ae = [0.05 + 1.68 m/1590 × 100 + 0.72 n × 1590 × 100] × 1 = 0.05% D accuracy: De = 0.05/100 = 0.
Effect by impedance of DUT Table 14. For impedance of DUT below 30 Ω, the following value is added. Test frequency [Hz] 20 - 1 M 1M-2M Impedance of DUT 1.08 Ω ≤ |Zx| < 30 Ω |Zx| < 1.08 Ω 0.05% 0.10% 0.10% 0.20% Table 15. For impedance of DUT over 9.2 k Ω, the following value is added. Test frequency [Hz] 10 k - 100 k 100 k - 1 M 1M-2M Impedance of DUT 9.2 kΩ < |Zx| ≤ 92 kΩ 92 kΩ < |Zx| 0% 0.05% 0.05% 0.05% 0.10% 0.
Short offset Zs Table 16. Impedance of DUT > 1.08 Ω Test frequency [Hz] 20 - 2 M Measurement time mode SHORT MED, LONG 2.5 mΩ × (1 + 0.400/Vs) × 0.6 mΩ × (1 + 0.400/Vs) × (1 + √(1000/Fm)) (1 + √(1000/Fm)) Table 17. Impedance of DUT ≤ 1.08 Ω Test frequency [Hz] 20 - 2 M Vs [Vrms] Fm [Hz] Measurement time mode SHORT MED, LONG 1 mΩ × (1 + 1/Vs) × 0.2 mΩ × (1 + 1/Vs) × (1 + √(1000/Fm)) (1 + √(1000/Fm)) Test signal voltage Test frequency Effect of cable extension (Short offset) Table 18.
Effect of cable length Table 21. When the cable is extended, multiply Yo by the following factor. Test frequency [Hz] 100 - 100 k 100 k - 1 M 1M-2M Fm [Hz] 0m 1 1 1 Cable length 1m 2m 1 + 5 × Fm/1 MHz 1 + 10 × Fm/1 MHz 1 + 0.5 × Fm/1 MHz 1 + 1 × Fm/1 MHz 1 + 1 × Fm/1 MHz 1 + 2 × Fm/1 MHz Test frequency Temperature factor Kt Table 22. The temperature factor Kt is given below.
Calibration accuracy Acal Calibration accuracy Acal is given below. For impedance of DUT on the boundary line, apply the smaller value. Table 23. Impedance range = 0.1, 1, 10 Ω |Z| [%] 20 - 1 k 0.03 θ [radian] 1 × 10-4 1 k - 10 k 0.05 2 × 10-4 Test frequency [Hz] 10 k -100 k 100 k - 300 k 0.05 0.05 + 5 × 10-5 Fm 3 × 10-4 3 × 10-4 + 2 × 10-7 Fm 300 k - 1 M 0.05 + 5 × 10-5 Fm 3 × 10-4 + 2 × 10-7 Fm 1M-2M 0.1 + 1 × 10-4 Fm 6 × 10-4 + 4 × 10-7 Fm 300 k - 1 M 0.05 + 5 × 10-5 Fm 3 × 10-4 1M-2M 0.
Measurement accuracy The impedance measurement calculation example below is the result of absolute measurement accuracy. 1p 10 1n F pF 1G H 1M 10 0f F 10 10n 100M 100n 10M H 10 f 0k 10 F kH 10 1f F H 1k 10 0a F 0H 10 H 0p 10.0% 10 1n 1.0% 1H F F 0.3% H 0m 10 10 1μ nF 1M 0.1% 10 0n 10μ F 100k H 1m 1μ F 10k H [Ω] [S] 100μ 0μ 10 10 1k μF C 1m μH 10 10 0μ 10m 100 100m 10 F 0.1% H 1μ 1m F H 10 0n 10 m 1 H m 10 F 1 0.
Compensation function Table 28. The E4980A provides three types of compensation functions: OPEN compensation, SHORT compensation, and LOAD compensation. Type of compensation Description OPEN compensation Compensates errors caused by the stray admittance (C, G) of the test fixture. Compensates errors caused by the residual impedance (L, R) of the test fixture. Compensates errors between the actual measured value and a known standard value under the measurement conditions desired by the user.
Comparator function of list sweep: The comparator function enables setting one pair of lower and upper limits for each measurement point. You can select from: Judge with the first sweep parameter/Judge with the second parameter/Not used for each pair of limits. Time stamp function: In the sequential mode, it is possible to record the measurement starting time at each measurement point by defining the time when FW detects a trigger as 0 and obtain it later with the SCPI command.
Options The following options are available for the E4980A LCR Meter. Frequency options Note Option xxx is described as E4980A-xxx in the order information None of below 20 Hz to 2 MHz Option 030 20 Hz to 300 kHz Option 050 20 Hz to 500 kHz Option 100 20 Hz to 1 MHz Table 30.
Power and DC Bias enhancement specification Increases test signal voltage and adds the variable DC bias voltage function. This function is available when the option 001 is installed. Measurement parameters The following parameters can be used. • Lp-Rdc • Ls-Rdc • Vdc-Idc where Rdc Vdc Idc Direct-current resistance (DCR) Direct-current voltage Direct-current electricity Test signal Signal level Table 31.
Table 32. Test signal current Range Resolution Setup accuracy 0 Arms - 100 mArms 1 µArms (0 Arms - 2 mArms) 2 µArms (2 mArms - 5 mArms) 5 µArms (5 mArms - 10 mArms) 10 µArms (10 mArms - 20 mArms) 20 µArms (20 mArms - 50 mArms) 50 µArms (50 mArms - 100 mArms) normal ±(10% + 10 µArms) (test signal voltage ≤ 20 mArms) (test frequency ≤ 1 MHz : spec., test frequency > 1 MHz : typ.) ±(10% + 100 µArms) (test frequency ≤ 300 kHz, test signal current > 20 mArms) (spec.
DC bias signal Table 35. Test signal voltage Range Resolution Accuracy test signal voltage ≤ 2 Vrms test signal voltage > 2 Vrms –40 V to +40 V Setup resolution: 100 µV, effective resolution: 330 µV ±(0 V - 5 V) 1 mV ±(5 V - 10 V) 2 mV ±(10 V - 20 V) 5 mV ±(20 V - 40 V) 0.1% + 2 mV (23 °C ± 5 °C) (0.1% + 2 mV) x 4 (0 to 18 °C or 28 to 55 °C) 0.1 % + 4 mV (23 °C ± 5 °C) (0.1% + 4 mV) x 4 (0 to 18 °C or 28 to 55 °C) Table 36.
Table 37. Test signal voltage ≤ 0.2 Vrms (measurement time mode = MED, LONG) DC bias current range 20 µA 200 µA 2 mA 20 mA 100 mA Impedance range [Ω] 100 300, 1 k 30 µA 3 µA 30 µA 3 µA 30 µA 3 µA 30 µA 30 µA 150 µA 150 µA < 100 150 µA 150 µA 150 µA 150 µA 150 µA 3 k, 10 k 300 nA 300 nA 3 µA 30 µA 150 µA 30k, 100 k 45 nA 300 nA 3 µA 30 µA 150 µA 10k, 30 k 300 nA 300 nA 3 µA 30 µA 150 µA 100 k 45 nA 300 nA 3 µA 30 µA 150 µA Table 38. 0.
DCR measurement specification DC resistance (Rdc) measurement function is available when either option 001, 030, 050, 100, or 200 is installed. DC resistance (Rdc) accuracy Absolute measurement accuracy Aa Absolute measurement accuracy Aa is given as Equation 15. Aa = Ae + Acal Aa Absolute accuracy (% of reading value) Ae Relative accuracy (% of reading value) Acal Calibration accuracy Relative measurement accuracy Ae Relative measurement accuracy Ae is given as Equation 16.
Effect of cable length (Short offset) Table 46. The following value is added to Rs when the cable is extended. Cable length 1m 0.25 mΩ 2m 0.5 mΩ 4m 1 mΩ Temperature coefficient Kt Table 47. Temperature coefficient Kt is given below.
General specifications Table 48. Power source Voltage Frequency Power consumption 90 VAC - 264 VAC 47 Hz - 63 Hz Max. 150 VA Table 49. Operating environment 0 - 55 °C 15% - 85% RH Temperature Humidity (≤ 40 °C, no condensation) Altitude 0 m - 2000 m Table 50. Storage environment Temperature Humidity ( ≤ 60 °C, no condensation) Altitude –20 - 70 °C 0% - 90% RH 0 m - 4572 m Outer dimensions: 375 (width) x 105 (height) × 390 (depth) mm (nominal) 367.4 14.4 338.6 14.4 28.0 41.
367.4 332.2 17.6 17.6 34.7 25.7 28.0 23.2 26.6 41.6 23.9 118.1 Serial Label E4980A LAN 101.6 GPIB Trigger Option 710: No Interface Option 710: No Interface 49.3 25.5 55.0 Fuse T3A , 250V 37 115V -230V 50/60Hz 150VA MAX 72.3 72.3 31.1 0.4 Option 002: DC Current Control Interface Option 301: Scanner Interface 36.2 Option 201: Handler Interface 36.2 36.2 72.3 20.9 17.1 113.9 72.3 72.3 Figure 4. Dimensions (rear view, with handle and bumper, in millimeters, nominal) 317.
388.7 55.0 101.6 103.8 66.6 141.4 Figure 6. Dimensions (side view, with handle and bumper, in millimeters, nominal) 374.0 347.9 10.5 45.7 21.9 84.4 88.3 21.9 15.7 19.7 50.9 Figure 7. Dimensions (side view, without handle and bumper, in millimeters, nominal) Weight: 5.3 kg (nominal) Display: LCD, 320 × 240 (pixels), RGB color Note Effective pixels are more than 99.99%. There may be 0.01% (approx. 7 pixels) or smaller missing pixels or constantly lit pixels, but this is not a malfunction.
Description Supplemental Information EMC European Council Directive 2004/108/EC IEC 61326-1:2005 EN 61326-1:2006 CISPR 11:2003 +A1:2004 EN 55011:1998 +A1:1999 +A2:2002 Group 1, Class A IEC 61000-4-2:1995 +A1:1998 +A2:2000 EN 61000-4-2:1995 +A1:1998 +A2:2001 4 kV CD/8 kV AD IEC 61000-4-3:2002 EN 61000-4-3:2002 3 V/m, 80-1000 MHz, 80% AM IEC 61000-4-4:2004 EN 61000-4-4:2004 1 kV power /0.5 kV Signal IEC 61000-4-5:1995 +A1:2000 EN 61000-4-5:1995 +A1:2001 0.
Supplemental Information Settling time Table 51. Test frequency setting time Test frequency setting time 5 ms 12 ms 22 ms 42 ms Test frequency (Fm) Fm ≥ 1 kHz 1 kHz > Fm ≥ 250 Hz 250 Hz > Fm ≥ 60 Hz 60 Hz > Fm Table 52.
Measurement time Definition This is the time between the trigger and the end of measurement (EOM) output on the handler interface. Conditions Table 54 shows the measurement time when the following conditions are satisfied: • • • • • • • • Normal impedance measurement other than Ls-Rdc, Lp-Rdc, Vdc-Idc Impedance range mode: hold range mode DC bias voltage level monitor: OFF DC bias current level monitor: OFF Trigger delay: 0 s Step delay: 0 s Calibration data: OFF Display mode: blank Table 54.
Table 55. Measurement time when option 030/050/100 is installed [ms] Measurement time mode 1 2 3 LONG MED SHORT 20 Hz 729 650 579 100 Hz 423 250 149 Test frequency 1 kHz 10 kHz 363 353 140 122 26 14 100 kHz 343 119 12 1 MHz 343 118 12 10 Measurement time [sec] 1 1. LONG 2. MED 3. SHORT 0.1 0.01 0.001 20 100 1k 10k 100k 1M 2M Test frequency [Hz] Figure 10. Measurement time (Option 030/050/100) Table 56.
When DC bias is ON, the following time is added: Table 57. Additional time when DC bias is ON [ms] Test frequency 20 Hz 100 Hz 30 30 1 kHz 10 10 kHz 13 100 kHz 2 1 MHz 0.5 2 MHz 0.5 When the number of averaging increases, the measurement time is given as Equation 17. MeasTime Ave AveTime MeasTime + (Ave – 1) × AveTime Measurement time calculated based on Table 53 and Table 54 Number of averaging Refer to Table 56 Table 58.
Display time Except for the case of the DISPLAY BLANK page, the time required to update the display on each page (display time) is as follows. When a screen is changed, drawing time and switching time are added. The measurement display is updated about every 100 ms. Table 61. Display time Item When Vdc, Idc monitor is OFF When Vdc, Idc monitor is ON MEAS DISPLAY page drawing time 10 ms 13 ms MEAS DISPLAY page (large) drawing time 10 ms 13 ms BIN No.
DC bias test signal current (1.5 V/2.0 V): Output current: Max. 20 mA Option 001 (Power and DC Bias enhance): DC bias voltage: DC bias voltage applied to DUT is given as: Equation 18. Vdut = Vb – 100 × Ib Vdut [V] DC bias voltage Vb [V] DC bias setting voltage Ib [A] DC bias current DC bias current: DC bias current applied to DUT is given as: Equation 19. Idut [A] Vb [V] Rdc [Ω] Idut = Vb/(100 + Rdc) DC bias current DC bias setting current DUT’s DC resistance Maximum DC bias current Table 64.
Table 66. Yo_DCI1 value DC bias current range 20 µA 200 µA 2 mA 20 mA 100 mA Measurement time mode SHORT 0S 0.25 nS 2.5 nS 25 nS 250 nS MED, LONG 0S 0.05 nS 0.5 nS 5 nS 50 nS Table 67.
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