Specifications

Series W of OIL MATIC
Water-type OIL MATIC models for semiconductor manufacturing equipment and industrial machines
W Series
Circulation (closed) type
Controlling a wide range of
“water” temperature with
high precision
These models adopting inverter control
method are used for high-precision
temperature control of “water” used by
built-in motors and linear motors of main
spindle head, semiconductor-manufacturing
equipment and various industrial machines.
While implementing the existing know-how
accumulated through the development of
OIL MATIC that handles a variety of cooling
oils
, the series W can control a wide range of
liquid temperature from low load to maximum
heat load by implementing “twin-pulse valve
control” (patented) technology that controls
liquid temperature with high precision even
in a low-load area.
W300
Semicon
ductor
manufacturing
equipment
Linear
motor
Other
various
industrial
machines
Model
W300 W750 W1500 W2200
Effective cooling capacity (W) 0-1800W 0-3700W 0-5800W 0-8000W
Nominal chiller capacity (W) 300 450 700 1100
Refrigerant used R-407F
Amount of refrigerant filled (g) 450 640 800 1000
Condenser Forced air-cooled type parallel flow type
Rated output of fan motor (W) 25 60 150
Cooler (evaporator) Plate-type heat exchanger (for water)
Heating exchange method Constant-flow forced circulation
Solution-sending pump type Immersion-type multistage pump
Rated output of motor (W) 520 1040
Flow rate (L/M) (50/60 Hz)
16L/min
(24m/36m)
33L/min (44m/66m)
Size of connected pipes (IN×OUT) RC1/2×RC1/2 RC3/4×RC3/4
Reservoir tank capacity (L) 13 13 16 27
Power source
Motor circuit AC200V 50/60Hz, 220V 60Hz, 3-phase,
control circuit DC24V DC15V DC5V
Maximum operating current (A) 12 14 16 24
Normal operating current (A) 6 9 11 17
Temperature regulator Digital inverter controller
Setting range
Constant type (5-45°C),
follow-up type (standard temperature: -9.9°C - +9.9°C)
Range of surrounding temperature 5-45 (°C)
Range of temperature control 5-45 (°C)
Fluid to use Water
Appearance Light gray / silver
Dimensions (W×D×H (mm)) 400×510×790 400×570×860 472×614×970 591×714×1055
Weight (kg) 70 90 100 140
* The operating current indicates normal operating current, not the maximum operating current.
* For effective cooling capacity, the maximum value within a range of use when oil complying with ISO VG2 or
equivalent is used.
* Specifications are subject to change without notice for improvement.
With heater Tropical
(passing)
treatment
Water-cooled
condenser
specifications
Specifications
complying with
various standards
Tropical
band
Standard-
compliant
Options
implemented
* Please consult us for other
special specifications. For
details, please contact our
sales representatives.