Instruction manual

For safe operation
CAUTION
o
Beware
temperature
of intake gas
o
Beware of intake
gas volume
Danger of exceeding permissible
temperature of intake gas
If intake gas te m pera ture is over SO"C , be
sure to ins tall a chiller or trap between
vac
uu m pump and vacuum chamber so
thai gas intake temperature of vacuum
pump keeps
below 50"C . If nol, vacuum
pump temperature can increase,
resul li ng
in failure.
Danger of exceeding permissible
Intake ga s volume
When sending N2 gas or dry air into
air-llush port, pressure should be the
same as atmospheric pressure and f low
rate should be less than 10NLJmin.lf not,
il can increase pressure inside vacuum
pump, resulting in failure .
-5-
o
Caution after
exhausting vapor
o
Operate while
opening air41ush
port
Danger of Insufficient vapor
exhaust
After ev acuating vapor, do air-flush
operation lor at least one hour. II you close
air-flush
port or stop vacuum pump soon
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Danger 01 remaining moisture
When evacuating mo is tu re , be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port Is
closed, condensed moistu re will remain
inside vacuum pump and cause
fa ilure.