7.3 Performance data
100
~
c:
E
"-
-l
~
10
0
0
1J
Q)
Q)
a.
W
10
C>
c:
a.
E
:::l
a..
1
10
-,
"
",!
10-
3
ISP-250C
Wi
I
II
III
II
IIII
~ll
~
:;-
~
fttJ/-
#I-
0
,
:>
2
5
10
10
10
10
3
Inlet
Pressure
(Pa)
"
~"
'
;0~2
' '
~
"
'
;O-~
"
~
"
';O
~
"
~
"'
;O
;
(Torr)
-
31
-
ISP-500C
~
~
"
1 1
1
000
=
~
100
10
1
:>
4
:>
10 10
5
