Instruction manual
5 M
,
am t
enance an
d'
mspec
f
Ion
6
WARNING
Danger
of
failure and
bodily
injury
Conduct periodical maintenance and inspection.
If
not
,
it
can
cause
insufficient
performance
,
failure
of
vacuum
pump,
and
bodily
injury.
0
Conduct periodical
maintenance and
inspection
Danger
of
burns
Conduct maintenance and inspection
only
after
vacuum
pump
becomes
cool
~
enough.
Maintenance
and
inspection
soon
afte
r vacuum
pump
stops
can
cause
burn
injury.
Be
careful about
high temperature
Danger
of
restart
Be sure to switch off electric
source
before
maintenance
or inspection.
0
Single-phase motor
has
a thermal protector.
Vacuum
pump
restarts become
coo
l without
warning
after vacuum
pump.
With a thermal
protector
[Only singlel'hase
motor]
Danger
of
electric
shock
Be sure to
conduct
maintenance
and inspection after you turn off electric source.
S
If
not
,
it
can
cause
bodily
injury
from
el
ectric
shock
or
turning
object.
Danger
of
accident
,
failure
and
shorter
operating
lifetime
Ask specialist to perform repairs.
Defective repairs can cause accident,
fai
lure
or
shorter operating lifetime.
5.1
Daily maintenance and inspection
Conduct the following daily maintenance and inspection.
Items Contents
Abnormal sound
- .
---
-
Abnormal vibration
Vacuum pump
itself
Abnormal
temperature
..
- -
-
-
---
~.-
Cooling fins are dirty or clogged
Smooth turning
Turn off
electric
source
0
Ask specialist to
perform repairs
Measures
Ask
specialist to repair.
--
Ask specialist
to
repair.
.-
Ask specialist
to
repair.
Blow air, cleaning
Ask specialist
to
repair.
.-
Cooling fan
.--
-
-
--
~--.-------
-
-~---~-~--
----
---~~-~-
--
-
-
----.----
Fan
cover
Dirty,
clogged, damaged
Blowing air, clean, Ask specialist
to
repair.
Air;nuffler
Dirt
y,
clogged Replace
Exhaust valve
Dirty, clogged Blowing air, clean
Ele
ctric source cable Deteriorated Replace
-2
5-